ORBOTECH LTD. Patent applications |
Patent application number | Title | Published |
20160094760 | IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR - An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. | 03-31-2016 |
20160028936 | AUTO-FOCUS SYSTEM - A distance measuring system is provided for auto focusing a camera of an inspection system for inspecting a planar surface that is patterned. The system includes a pattern generator, an image sensor, an optical element(s) and a processor. The pattern generator projects a spatially random pattern toward the planar surface at an oblique angle. The optical element(s) forms the image of the reflected pattern on the image sensor and the image sensor captures an image of the spatially random pattern reflected off the planar surface. The processor processes the image of the spatially random pattern and provides auto-focus information. | 01-28-2016 |
20150324968 | CALIBRATION OF A DIRECT-IMAGING SYSTEM - Optical apparatus includes a mount, which holds a workpiece. An array of optical heads project respective patterns of radiation onto the workpiece. A calibration assembly captures images of the respective patterns. A motion assembly, on which the calibration assembly is mounted, transports the calibration assembly among a plurality of different positions between the array of the optical heads and the mount so as to intercept and image, at each of the different positions, a respective pattern projected by a different one of the optical heads. A processor processes the images captured by the calibration assembly at the different positions so as to monitor operation of the apparatus. | 11-12-2015 |
20150285734 | OPTICAL INSPECTION SYSTEM AND METHOD - An optical inspection system including a first multiplicity of cameras operative to image a second multiplicity of regions on an object, a third multiplicity of illumination sources and at least one illumination manager operative to combine illumination from the third multiplicity of illumination sources and thereafter to direct illumination therefrom to the second multiplicity of regions, the at least one illumination manager including a beam distributor receiving a composite input beam of a multiplicity of non-mutually coherent, spatially concentrated laser pulses and directing a multiplicity of composite output beams of a plurality of the non-mutually coherent, spatially concentrated laser pulses to a corresponding plurality of spatially distinct locations corresponding to the second multiplicity of regions. | 10-08-2015 |
20150033557 | SYSTEM AND METHOD FOR PRODUCING A CONDUCTIVE PATH ON A SUBSTRATE - A method of producing a conductive path on a substrate including depositing on the substrate a layer of material having a thickness in the range of 0.1 to 5 microns, including metal particles having a diameter in the range of 10 to 100 nanometers, employing a patterning laser beam to selectably sinter regions of the layer of material, thereby causing the metal particles to together define a conductor at sintered regions and employing an ablating laser beam, below a threshold at which the sintered regions would be ablated, to ablate portions of the layer of material other than at the sintered regions. | 02-05-2015 |
20140160757 | LIGHT ENGINE - An LED-based high power uniform light engine including an array of LEDs having a common anode and a fill factor which exceeds 0.85, the common anode having heat spreading functionality and an active heat sink which is thermally connected to the common anode. | 06-12-2014 |
20130329103 | IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR - An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. | 12-12-2013 |
20130321898 | SYSTEM AND METHOD FOR DIRECT IMAGING - A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot. | 12-05-2013 |
20130147943 | LIGHTING SYSTEM - A system and method for illuminating an elongated field of view of a linear or high aspect ratio area image sensor comprises providing illumination with an elongated field shape with a plurality of discrete light sources and projecting the illumination toward an object to be imaged; wherein the illumination projected on the object is substantially spatially invariant in intensity and angular distribution along the elongated field shape on the object. | 06-13-2013 |
20130044360 | SYSTEM AND METHOD FOR DIRECT IMAGING - A direct imaging system comprises an illumination unit comprising a plurality of light sources, the plurality of light sources configured to emit a plurality of beams, an optical system for forming the plurality of beams to be aligned in position or angle, an acoustic optical modulator positioned to receive the plurality of beams aligned in one of position or angle and to consecutively diffract different portions of the plurality of beams as an acoustic wave propagates in an acoustic direction, and a scanning element adapted to scan an exposure plane with the plurality of beams modulated by the acoustic optical modulator at a scanning velocity, wherein the scanning velocity is selected to incoherently unite the different portions of the plurality of beams into a single exposure spot. | 02-21-2013 |
20130037526 | AUTOMATIC REPAIR OF ELECTRIC CIRCUITS - An apparatus and method for automatically inspecting and repairing printed circuit boards includes an inspection functionality automatically inspecting printed circuit boards and providing a machine readable indication of regions thereon requiring repair. An automatic repair functionality employs the machine readable indication to repair the printed circuit boards at some of the regions thereon requiring repair. An automatic repair reformulation functionality automatically reinspects the printed circuit boards following an initial automatic repair operation, and provides to the automatic repair functionality a reformulated machine readable indication of regions thereon requiring repair. | 02-14-2013 |
20120206634 | IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR - An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. | 08-16-2012 |
20120026272 | OPTICAL IMAGING SYSTEM - A method of scanning a pattern on a surface, the method comprises forming a first spatially modulated light beam including a pattern for writing on a surface; splitting the first spatially modulated light beam into a plurality of sub-beams; altering a spatial relationship between the plurality of sub-beams, thereby forming a second spatially modulated light beam; and canning the surface with the second spatially modulated light beam. | 02-02-2012 |
20110304835 | SYSTEM AND METHOD FOR OPTICAL SHEARING - A method of exposing a pattern on a light sensitive surface comprises forming a spatially modulated light beam including a rectangular matrix pattern of rows and columns of image data over a surface, wherein the spatially modulated light beam is operable to expose contiguous sub-exposure areas of the surface, each sub-exposure area associated with a datum of the image data, aligning one of the rows or columns of the spatially modulated light beam with a scan direction and the other one of the rows and columns of the spatially modulated light beam with a cross-scan direction for exposing the surface, shearing at least one portion of the modulated light beam with respect to a second portion of the modulated light beam in a cross scan direction by an amount less than a center to center distance between two sub-exposure areas in a cross scan direction, exposing the surface in the scan direction with the sheared spatially modulated light beam, and overlapping exposed sub-areas in the cross scan direction as a result of the scanning. | 12-15-2011 |
20110278269 | METHOD AND SYSTEM FOR ELECTRICAL CIRCUIT REPAIR - A system and method of repairing electrical circuits including employing a laser and at least one laser beam delivery pathway for laser pre-treatment of at least one conductor repair area of a conductor formed on a circuit substrate and employing the laser and at least part of the at least one laser beam delivery pathway for application of at least one laser beam to a donor substrate in a manner which causes at least one portion of the donor substrate to be detached therefrom and to be transferred to at least one predetermined conductor location. | 11-17-2011 |
20110237941 | DIRECTIONAL RADIATION DETECTOR - A method for imaging a body, including scanning the body so as to generate a tomographic image thereof, and analyzing the tomographic image to determine a location of a region of interest (ROI) ( | 09-29-2011 |
20110175271 | VACUUM HOLD-DOWN APPARATUS - A vacuum hold-down system for use with workpieces of various shapes and/or sizes is disclosed. The system comprising a vacuum hold-down table defining a mask support plane and an apertured vacuum table mask which is selectably positionable on said mask support plane, wherein said vacuum hold-down table and said vacuum table mask is configured to define a plurality of selectable different contiguous arrays of vacuum apertures, by suitable relative positioning of said vacuum table mask and said vacuum hold-down table in said mask support plane. | 07-21-2011 |
20110155424 | PRODUCING ELECTRICAL CIRCUIT PATTERNS USING MULTI-POPULATION TRANSFORMATION - A method for producing an electrical circuit includes providing a substrate having a first pattern of features and defining a second pattern comprising a net of interconnected circuit elements. Different respective transformation rules are specified for different ones of the circuit elements. The second pattern is modified by applying the respective transformation rules to the circuit elements so as to align the circuit elements with the features in the first pattern, and the modified second pattern is applied to the substrate. | 06-30-2011 |
20110122404 | EFFICIENT TELECENTRIC OPTICAL SYSTEM (ETOS) - A new architecture for machine vision system that uses area sensor (or line sensor), with telecentric imaging optics compound with telecentric illumination module is described. The illumination module may include a bright field illumination source and/or a dark field illumination source. The telecentric imaging optics includes an upper imaging module having an aperture stop and a lower imaging module positioned between the upper imaging module and object, such that the light source and the aperture stop are located in the back focal plane of the lower imaging module. The lower imaging module images the illumination source into a plane of an aperture stop of the upper imaging module. The optical axis of the upper imaging module is offset with respect to the lower imaging module. The optical axis of the telecentric illumination module is offset with respect to the axis of the lower imaging module in the opposite direction. | 05-26-2011 |
20110114823 | IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR - An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. | 05-19-2011 |
20100328643 | MULTIPLE MIRROR CALIBRATION SYSTEM - An optical system including a plurality of selectably directable mirrors ( | 12-30-2010 |
20100309308 | INSPECTION OF A SUBSTRATE USING MULTIPLE CAMERAS - Apparatus for inspection includes an imaging assembly, including a plurality of cameras, which are mounted in different, respective locations in the imaging assembly and are configured to capture respective images of a sample. A motion assembly is configured to move at least one of the imaging assembly and the sample so as to cause the imaging assembly to scan the sample with a scan accuracy that is limited by a predetermined position tolerance. An image processor is coupled to receive and process the images captured by the cameras so as to locate a defect in the sample with a position accuracy that is finer than the position tolerance. | 12-09-2010 |
20100282726 | MULTIPLE BEAM DRILLING SYSTEM - A method for laser drilling of holes in a substrate ( | 11-11-2010 |
20100245813 | MULTI-MODAL IMAGING - A method for scanning a surface with a number of different illumination configurations, the method comprises capturing a plurality of images in a sequential manner during a single sweep, each image including one or more lines of pixels, sequentially altering an illumination configuration used to capture the plurality of images according to a predefined sequence of illumination configurations and shifts of the relative position of the imaging unit for capturing each of the plurality of images, and repeating the sequence of illumination configurations settings and associated image capture positions until a desired area of the surface is scanned, wherein said predefined shift is between 10 pixels and less then one pixel. | 09-30-2010 |
20100231901 | INSPECTION SYSTEM EMPLOYING ILLUMINATION THAT IS SLECTABLE OVER A CONTINUOUS RANGE ANGLES - An illumination device and method for inspecting objects having microscopic features is provided. The device includes an illuminator which provides a solid angle of angularly specific illumination defining an illumination angle, selected by a user from among a continuous range of possible illumination angles. The device further includes an object inspector which inspects the object illuminated by the illuminator. The illuminator may include an illumination source, a light concentrator, an illumination angle selector, disposed along a light path between the illumination source and the object inspector. The illumination angle selector may have a first position in which directly -reflected light propagates toward the object plane and a second position in which no light both selected by the illumination angle selector and directly reflected from the object plane enters the collecting lens. Rather, in the second position, only scattered light from the object plane enters the collecting lens. | 09-16-2010 |
20090310239 | ILLUMINATION ANGLE CONTROL USING DICHROIC FILTERS - A method of controlling the illumination angle onto a target, including, illuminating onto the target with light from at least two light sources of pre-selected wavelengths; wherein each point on the target is illuminated by light from the light sources with a respective maximal illumination angle relative to a main illumination axis extending from substantially the center of the at least two light sources to the target, selecting a dichroic filter that transmits light from the at least two light sources as a function of the angle of incidence upon the filter, positioning the dichroic filter between the at least two light sources and the target to limit the transfer of light to light of the pre-selected wavelengths; and wherein the dichroic filter is selected to limit the maximal illumination angle illuminating each point on the target. | 12-17-2009 |
20090257050 | ILLUMINATION SYSTEM FOR OPTICAL INSPECTION - Apparatus for optical inspection includes an illumination assembly, including multiple parallel rows of light sources for emitting light and illumination optics associated with each row for directing the light onto an object under inspection. The multiple parallel rows include at least a first row with first illumination optics including a first array of prisms that are configured to reflect the light emitted by the light sources in the first row, and at least a second row with second illumination optics including a second array of prisms that are configured to refract the light emitted by the light sources in the second row. An imaging assembly is configured to capture an image of the object under illumination by the multiple parallel rows of the light sources. | 10-15-2009 |
20090114629 | MULTIPLE BEAM MICRO-MACHINING SYSTEM AND METHOD - A system for delivering energy to a substrate includes a laser energy source providing a plurality of laser beams, wherein each of the beams is steered to an independently selectable location on a target, and is independently focused onto the target. | 05-07-2009 |
20080278775 | HIGH-SENSITIVITY OPTICAL SCANNING USING MEMORY INTEGRATION - An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report. | 11-13-2008 |
20080224724 | Photoconductive Based Electrical Testing of Transistor Arrays - Apparatus for testing microelectronic components on a substrate, including a scanner operative to scan a light beam over a plurality of thin film transistors disposed on a substrate, one transistor at a time, so as to induce a photoconductive response in the plurality of transistors, one transistor at a time; current sensing circuitry operative, synchronously with said scanner, to measure an output induced by the photoconductive response associated with a transistor and to generate photoconductive response output values, the photoconductive response output values representing a photoconductive response induced by the light beam, for one transistor at a time from among the plurality of transistors; and diagnostic apparatus operative to analyze the electronic response output values and to characterize each of the transistors in accordance therewith. | 09-18-2008 |