Entries |
Document | Title | Date |
20080229811 | STABILIZING A SUBSTRATE USING A VACUUM PRELOAD AIR BEARING CHUCK - Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload. | 09-25-2008 |
20090025463 | Method for Scanning the Surface of a Workpiece - A measurement system has a surface sensing device mounted on an articulating probe head, which in turn is mounted on a coordinate positioning apparatus. The surface sensing device is moved relative to a surface by driving at least one of the coordinate positioning apparatus and probe head in at least one axis to scan the surface. The surface sensing device measures its distance from the surface and the probe head is driven to rotate the surface sensing device about at least one axis in order to control the relative position of the surface sensing device from the surface to within a predetermined range in real time. | 01-29-2009 |
20090044610 | SYSTEMS AND METHODS FOR CHARACTERIZING THICKNESS AND TOPOGRAPHY OF MICROELECTRONIC WORKPIECE LAYERS - Metrology systems, tools, and methods that characterize one or more layers of a microelectronic workpiece are disclosed herein. In one embodiment, a system for characterizing thickness and topography of a workpiece layer includes a layer thickness instrument configured to measure a thickness of a first workpiece layer at individual sampling sites, a surface topography instrument configured to measure a relative surface height of the first layer at the individual sampling sites, and a processing unit communicatively coupled to receive thickness and topography measurements and operable to output layer data that includes individual thickness measurements combined with individual topography measurements at workpiece coordinates corresponding to the individual sampling sites. In another embodiment, the system further includes an output device communicatively coupled with the processing unit and operable to graphically display a stratigraphic cross-section corresponding to the output layer data. | 02-19-2009 |
20090084169 | WAFER BOW METROLOGY ARRANGEMENTS AND METHODS THEREOF - An arrangement for quantifying a wafer bow. The arrangement is positioned within a plasma processing system is provided. The arrangement includes a support mechanism for holding a wafer. The arrangement also includes a first set of sensors, which is configured to collect a first set of measurement data for a plurality of data points on the wafer. The first set of measurement data indicates a minimum gap between the first set of sensors and the wafer. The first set of sensors is positioned in a first location, which is outside of a set of process modules of the plasma processing system. | 04-02-2009 |
20090120173 | STABILIZING DEVICE AND METHOD FOR HANDHELD MEASUREMENT DEVICE - A stabilizing device for a handheld measurement device. An illustrative embodiment of the stabilizing device includes a device harness adapted to receive the handheld measurement device and having a handle opening and a nose opening and at least one harness attachment device carried by the device harness. A method for taking surface measurements with a handheld measurement device is also disclosed. | 05-14-2009 |
20090126471 | FRACTURE DETECTING STRUCTURAL HEALTH SENSOR - A sensor device for monitoring and testing the integrity of structural elements is disclosed. A frangible membrane including a thin breakable conductor sense loop is bonded to a structural element to be tested. A fracture in the bonded structural element induces a disruption in the both the frangible membrane and the thin breakable conductor sense loop. Measured electrical property change of the disrupted conductor sense loop reveals the fracture in the structural element. Connection to the sensor device may be through a connector or using a wireless reader which remotely energizes the sensor device. The sensor may also be implemented as a gasket and/or employ weep holes to the breakable conductor to reveal possible corrosion as well. | 05-21-2009 |
20100018298 | SURFACE TEXTURE MEASURING INSTRUMENT AND MEASURING METHOD - A surface texture measuring instrument includes: a measuring device that includes a detector for detecting surface texture of a workpiece and an X-axis movement mechanism for moving the detector in a measurement direction; an elevation inclination adjuster capable of adjusting an elevation position and an inclination angle of a table on which the measuring device is mounted; a stage on which the workpiece is mounted; and a controller that controls the measuring device and the elevation inclination adjuster. The controller includes: a measurement controller that controls the X-axis movement mechanism to conduct a preliminary measurement and main measurement of the workpiece; a computing unit that acquires a result of the preliminary measurement from the detector and obtains an inclination angle of the workpiece at which the workpiece is inclined to the measurement direction; and a positioning controller for adjusting the inclination angle of the table based on the obtained inclination angle. | 01-28-2010 |
20100095752 | COKE OVEN WALL SURFACE EVALUATION APPARATUS, COKE OVEN WALL SURFACE REPAIR SUPPORTING APPARATUS, COKE OVEN WALL SURFACE EVALUATION METHOD, COKE OVEN WALL SURFACE REPAIR SUPPORTING METHOD AND COMPUTER PROGRAM - An oven wall three-dimensional profile data ( | 04-22-2010 |
20100126258 | Arrangement And Process For The Detection Of The Sharpness Of Chopper Knives - An arrangement for detection of the sharpness of chopper knives that can be moved relative to a shear bar includes a sensor that detects the effective cutting forces directly or indirectly and an evaluation arrangement connected to the sensor. The evaluation arrangement integrates the measured values of the sensor over time in order to generate information concerning the sharpness of the chopper knives. | 05-27-2010 |
20100281965 | CUTTING TEST DEVICE FOR KNIVES AND OTHER CUTTING TOOLS - The device of the invention can be used for evaluating the cutting ability of knives and other like cutting tools. The device includes a rigid body ( | 11-11-2010 |
20110083496 | SEMICONDUCTOR PROCESSING APPARATUS WITH SIMULTANEOUSLY MOVABLE STAGES - A method and apparatus provide for simultaneously moving multiple semiconductor wafers in opposite directions while simultaneously performing processing operations on each of the wafers. The semiconductor wafers are orientated in coplanar fashion and are disposed on stages that simultaneously translate in opposite directions to produce a net system momentum of zero. The die of the respective semiconductor wafers are processed in the same spatial sequence with respect to a global alignment feature of the semiconductor wafer. A balance mass is not needed to counteract the motion of a stage because the opposite motions of the respective stages cancel each other. | 04-14-2011 |
20110214493 | METHOD FOR MEASURING FIBER CUTTING FORCE - A method for measuring the cutting force on a fiber. The method includes the steps of: providing a blade having an edge; providing a fiber mount for holding the fiber; providing at least one sensor connected to the fiber mount; moving the blade toward the fiber and cutting the fiber; and measuring the cutting force on the fiber with the at least one sensor. | 09-08-2011 |
20120017671 | TEST GAUGE - A test gauge for determining whether a tool holder assembly that utilizes a retention knob is properly assembled. The test gauge is mounted on a tool holder before the installation of a retention knob. Measurement devices, such as dial indicators, determine whether a “wobble” exists between the test gauge and the tapered surface of the tool holder and also provide a distance measurement between the test gauge and a reference surface on the tool holder. After installation of the retention knob, the test gauge is again placed on the tool holder in the same relative position and the distance between the test gauge and the reference surface is again observed. Any change in the distance measurement is an indication that the installation of the retention knob produced a distortion in the tool holder tapered surface. | 01-26-2012 |
20120090390 | Apparatus and method for testing an edge of a workpiece for sharpness - An apparatus for testing an edge of a workpiece for sharpness includes a body, a probe extending outwardly and pivotably mounted from the body, the probe is biased in a direction for placement against an edge of a workpiece with a predetermined force, a test head on a distal end of the probe for mounting test tape for physical contact with an edge as a test medium, a test point for mounting to the workpiece, and a continuity circuit mounted to the body in electrical communication with the test head and the test point for providing a predetermined electrical current between the test head and the test point through the workpiece when the test tape is cut sufficiently by the workpiece to allow the test head to touch the workpiece to form a complete circuit. | 04-19-2012 |
20120125088 | CONTACT TYPE SHAPE MEASURING APPARATUS - An acting force is applied to a probe on the basis of a target speed serving as a probe speed in a stable copy scanning state of a target surface to be measured and a probe speed error serving as a difference between the target speed and a probe speed. | 05-24-2012 |
20130133409 | SURFACE TEXTURE MEASURING APPARATUS - Surface texture measuring apparatus includes a measurement arm table storing mass of an entire measurement arm, an arm length from a supporting point to a stylus, and a horizontal and vertical barycenter of the measurement arm in a horizontal posture for each type of the measurement arm in which a second measurement arm having a different mass is attached; a measurement arm specifier; an inclination angle detector detecting an inclination angle of the detector; and a controller reading out from the measurement arm table the mass, the arm length, the horizontal barycenter, and the vertical barycenter for a specified measurement arm, calculating a difference between a measurement force of the measurement arm in the horizontal posture and a measurement force of the measurement arm in an inclined posture based on the read-out information and the inclination angle detected by the inclination angle detector, and adjusting a measurement force. | 05-30-2013 |
20130186190 | TESTING DEVICE AND METHOD FOR TESTING SCISSORS - A testing device and method for testing scissors are disclosed. The testing device includes a mount device. The mount device includes a first mount feature for mounting a first grip end of the scissors thereon and a second mount feature movable with respect to the first mount feature for mounting a second grip end of the scissors thereon. The testing device additionally includes a feed device positioned to provide a test media between a first blade and a second blade of the scissors. The testing device further includes a position sensor associated with the mount device for measuring movement of the second grip end, and a load sensor associated with the mount device for measuring a load required for the scissors to cut the test media. | 07-25-2013 |
20140090455 | DING DETECTION SYSTEM - A method and system is provided to detect deformations on a sheet metal panel. The method includes swiping the sheet metal panel's surface through a screening material to screen the deformations present on the sheet metal panel's surface, thereby establishing screened deformations. Further, rubbing an area around the screened deformations through a stone material determines the size of the screened deformations. Finally, measuring the size of screened deformations according to a measuring rule establishes a nature of the screened deformation. | 04-03-2014 |
20140123740 | Working Abnormality Detecting Device and Working Abnormality Detecting Method for Machine Tool - Provided are a device and a method which determine a threshold value for detecting abnormality in a working path in which the cutting condition changes momentarily to thereby enable abnormality determination. Cutting force that becomes an abnormality determination value and threshold value information are previously calculated by cutting simulation, and a threshold value with which a comparison is to be made is determined from the position coordinates of a working machine which have been acquired during cutting and the measurement result of cutting force to thereby enable abnormality determination. | 05-08-2014 |
20140238119 | METHOD FOR OBTAINING EDGE PREP PROFILES OF CUTTING TOOLS - A method for obtaining an edge prep profile of a cutting tool with a point sensor. The method includes: (a) scanning edge points of the cutting tool, including a target edge point on a target edge, with the point sensor, by rotating the cutting tool around its axis, to generate a first point cloud; (b) repositioning the point sensor and cutting tool relative to each other based on the location and orientation information of the target edge point, such that the sensor focus is at a region of interest containing the target edge point; and (c) scanning the region of interest using the point sensor to generate a second point cloud. The first point cloud includes location and orientation information of the target edge point. The second point cloud includes information for edge profile analysis. | 08-28-2014 |
20150047423 | EDGE SHARPNESS MEASUREMENT - An edge sharpness measurement apparatus includes a clamp for securing a test medium against a frictional member, and an engagement mechanism for a normal force, such that the normal force directs the test medium against the frictional member with a force based on operational conditions of the test medium. A further engagement mechanism is for a tangential force, in which the engagement mechanism is adapted to increase the tangential force to identify a tangential force sufficient to dispose the frictional member across the test medium. A pivot defines an angle of application of the tangential force relative to the normal force, such that disposing the frictional member across the test medium defines a point of overcoming frictional forces between the test medium and the frictional member. A measurement device, such as a gauge or range on a spring, measures the tangential force sufficient to dispose the frictional member. | 02-19-2015 |
20160069785 | Edge Sharpness Tester - An edge sharpness tester determines the level of sharpness of a cutting edge of a knife, razor blade, scalpel, or other tool having a sharp edge. A motive force is applied to a moveable element of the device. The movable element provides an interface with the edge of the sharp-edged device to severe a line mounted in the moveable element. | 03-10-2016 |
20160082561 | TEST GAUGE - A test gauge for determining whether a tool holder assembly that utilizes a retention knob is properly assembled. The test gauge is mounted on a tool holder before the installation of a retention knob. Measurement devices, such as dial indicators, determine whether a “wobble” exists between the test gauge and the tapered surface of the tool holder and also provide a distance measurement between the test gauge and a reference surface on the tool holder. After installation of the retention knob, the test gauge is again placed on the tool holder in the same relative position and the distance between the test gauge and the reference surface is again observed. Any change in the distance measurement is an indication that the installation of the retention knob produced a distortion in the tool holder tapered surface which, if not corrected, can produce wear in the tool holder, the spindle and/or the cutting tool. The test gauge also includes at least one measurement device for measuring wobble between the test gauge and a tool holder received by the test gauge. | 03-24-2016 |