Class / Patent application number | Description | Number of patent applications / Date published |
073724000 | Capacitive | 77 |
20080229839 | SENSOR WITH COMPOSITE DIAPHRAGM CONTAINING CARBON NANOTUBES OR SEMICONDUCTING NANOWIRES - A sensor preferably capable of high resolution sensing over a large operating range includes a composite diaphragm containing nanotubes or nanowires. The nanotubes or nanowires preferably form a mat that is embedded in insulating material, such as high dielectric or insulating thin films. The nanotubes or nanowires may provide the diaphragm with a Young's modulus of greater than about 1000 GPa and a tensile strength of greater than about 100 GPa. The strain in the nanotubes or nanowires may be measured by a change in resistance, voltage, current or capacitance. | 09-25-2008 |
20080245154 | Pressure Sensor - There is provided a pressure sensor having: a sensor chip ( | 10-09-2008 |
20090090190 | Pressure sensor and manufacturing method therefor - A pressure sensor (e.g., a condenser microphone) includes a plate having a fixed electrode, a diaphragm having a moving electrode positioned opposite to the fixed electrode, and a support, wherein the diaphragm is subjected to displacement due to pressure variations applied thereto, and the support has a first interior wall forming a first cavity, in which the end portions of the plate are fixed, and a second interior wall, in which a step portion is formed in the thickness direction of the diaphragm in relation to the first interior wall and which forms a second cavity whose cross-sectional area is larger than the cross-sectional area of the first cavity in the plane direction of the diaphragm. The first and second cavities can be redesigned to communicate with each other via a passage, whereby it is possible to improve both of low-frequency characteristics and high-frequency characteristics in the pressure sensor. | 04-09-2009 |
20090114029 | ELECTROSTATIC CAPACITANCE DIAPHRAGM TYPE PRESSURE SENSOR - An electrostatic capacitance diaphragm type pressure sensor which includes a stationary electrode and a diagraph that are arranged to oppose each other, and in which the diaphragm is deformed by an external force and a pressure is obtained from an electrostatic capacitance between the stationary electrode and diaphragm which changes in accordance with deformation of the diaphragm, includes an outer case which surrounds the main body of the sensor, a heater arranged on the inner surface of the outer case, a temperature sensor to measure the temperature inside the outer case, and a temperature adjustment circuit which compares a temperature signal obtained by the temperature sensor with a predetermined value and outputs a drive signal to drive the heater on the basis of the comparison result. | 05-07-2009 |
20090158853 | DIAPHRAGM PRESSURE MEASURING CELL ARRANGEMENT - A diaphragm pressure measuring cell arrangement has a housing body at least partly made of sapphire material and a planar sapphire diaphragm with a peripheral edge joined by a first edge seal to the housing body to form a reference vacuum chamber. An outer surface of the diaphragm is exposed to a medium to be measured. A ceramic supporting body is attached to the back side of the housing body by sealing glass and includes a surface area overhanging that surrounds the housing body to form a first sealing surface. A tubular sensor casing incorporates the measuring cell for mounted the ceramic support body, the casing including an inside second surrounding sealing surface corresponding to the first sealing surface. A metal ring seal is between the sealing surfaces and a pressing member presses sealing surfaces together. | 06-25-2009 |
20090158854 | CAPACITANCE SENSING CIRCUIT FOR MEMBRANE PRESSURE SENSOR - A capacitance sensing circuit for a membrane pressure sensor is provided. The sensing circuit has a controller, two switches in signal communication with the controller, a charge amplifier and a charge injector. The charge amplifier is connected to the switches via a sensor capacitor C | 06-25-2009 |
20090193905 | Pressure Sensor Package Structure - Embodiments of the present disclosure are directed to a package having pressure sensor including a first substrate having a fixed electrode bonded to a second substrate having a movable electrode disposed at a predetermined interval from the fixed electrode, a support substrate with an opening for storing the second substrate, and a resin layer for fixing the pressure sensor and the support substrate. The pressure sensor may be packaged on the support substrate via the first substrate and a bonding member in a state where the second substrate is fit within the opening. The package for the pressure sensor may be sufficiently thin to be employed for the use on a minimum area. | 08-06-2009 |
20090255342 | Capacitance Manometers and Methods of Making Same - A capacitance manometer comprises: a flexible diaphragm including a first electrode structure; an electrode structure including second and third spaced-apart electrode structures secured relative to the diaphragm so as to establish a capacitance between the first electrode structure and the second electrode structure and a capacitance between the first electrode structure and the third spaced-apart electrode structure, wherein the capacitances between the first electrode structure and each of the second and third electrode structures change with changes in differential pressure placed on opposite sides of the flexible diaphragm; and a thick film dielectric material disposed between the first electrode and each of the second and third spaced-apart electrode structures so as to increase the gain in capacitance of the manometer without decreasing the distance between the first electrode structure and each of the second and third electrode structures and without increasing the stroke of the flexible diaphragm, while preventing the first electrode structure from shorting with either the second or third electrode structure in response to over pressurization conditions. | 10-15-2009 |
20090255343 | PHYSICAL QUANTITY SENSOR AND METHOD FOR MANUFACTURING THE SAME - A physical quantity sensor includes two substrates and a movable electrode that is disposed between the two substrates and is bonded to the two substrates. In the physical quantity sensor, the movable electrode has an elastically deformable diaphragm and one of the two substrates is an electrode substrate having a detection electrode on a detection surface opposite to the diaphragm to detect capacitance between the diaphragm and the detection electrode. In the physical quantity sensor, in a range between a room temperature and a bonding temperature when the two substrates and the movable electrode are bonded, coefficients of thermal expansion of the two substrates are smaller than that of the movable electrode and in a temperature range where the physical quantity sensor is used, a coefficient of thermal expansion of the movable electrode is between a first and second substrates. | 10-15-2009 |
20090260447 | DIAPHRAGM ATTACHING STRUCTURE OF ELECTROSTATIC CAPACITY TYPE PRESSURE GAGE - The present invention provides a diaphragm attaching structure of an electrostatic capacity type pressure gauge which can achieve an improvement of a measuring precision by inhibiting a poor weld and a heat strain from being generated while restricting an increase of a cost with an easy manufacturing. | 10-22-2009 |
20090260448 | Apparatus for Measuring Pressure by Using Diaphragm and Method of Pressure Measurement by Using Diaphragm - The present invention relates to a capacitance type pressure measurement apparatus by using a diaphragm, and more specifically to an apparatus for measuring pressure by using a diaphragm capable of measuring pressure of atmospheric pressure or less as well as pressure of atmospheric pressure or more without having a getter pump by fixedly mounting a pressure variable container on a sensor housing having a diaphragm mounted therein. | 10-22-2009 |
20090266172 | SENSE ELEMENT ASSEMBLY AND METHOD - Described herein is the sense element assembly for a capacitive pressure sensor and method for creating same that has increased sensitivity without additional size. The sense element assembly and method includes fabricating an off-centered elliptically shaped center electrode, at least one elliptical annular-like electrode around the center electrode, a ground electrode and a method for fusing the layers together to optimize sensitivity. | 10-29-2009 |
20090266173 | PRESSURE SENSOR - In a pressure sensor including a pressure detecting element in an intermediate portion or at a deep side of a through hole formed in a protrusion, a body portion (a base portion and the protrusion) is made of ceramic or an insulative resin material and molded into a predetermined shape, and the pressure sensor is constituted as a molded interconnect device in which a conductive pattern is formed on a surface thereof. Accordingly, a smaller pressure sensor can be obtained. | 10-29-2009 |
20090301211 | CAPACITANCE TYPE PRESSURE SENSOR - A capacitance-type pressure sensor for measuring a change in a physical volume of a medium to be measured, by measuring two capacitances wherein the capacitances vary differently from each other in accordance with a change in the physical volume of the medium to be measured, provided with a function for measuring independent values for each capacitance and determining that there is an disconnect failure when at least one of these capacitance values falls below a capacitance value that indicates the normal operating range of the capacitance-type pressure sensor, to thereby provide a pressure sensor with higher reliability through performing the disconnect detection robustly. | 12-10-2009 |
20100000326 | High temperature capacitive static/dynamic pressure sensors - Disclosed is a capacitive pressure probe for high temperature applications, such as for use in a gas turbine engine. The capacitive probe or pressure sensor of the present invention includes, inter alia, a sensor housing that defines an interior sensing chamber having a pressure port and an interior reference chamber positioned adjacent to a sensing electrode. The reference chamber is separated from the sensing chamber by a deflectable diaphragm made from Haynes 230 alloy, wherein the deflection of the diaphragm in response to an applied pressure in the sensing chamber corresponds to a change in capacitance value detected by the sensing electrode. | 01-07-2010 |
20100083767 | Dual purpose pressure sensor - A pressure transducer, particularly adapted to measure the pressure in a tire and to enable the tire to be filled includes a first housing, having an internal hollow. Positioned in the hollow of the first housing is a second housing, also having an internal hollow. The second housing is supported within the first housing so that a passageway for airflow exists between the housings. The second housing has a pressure port for monitoring the pressure of a tire. The first housing has an inlet port for receiving a source of pressure. The inlet port contains a valve which is selectively operated. The valve, when operated, permits air to flow into the hollow of the first housing and to flow about the periphery of the second housing to enter the pressure port associated with the second housing. The pressure port may, as indicated, be associated with a tire and the second housing contains a pressure sensing device which monitors the pressure in the tire via the pressure port. In this manner, the pressure in the tire can be monitored while additional air can be added through the valve which air flows around the second housing to enter the tire or other device coupled to the pressure transducer. | 04-08-2010 |
20100083768 | Thermal-based diagnostic system for process transmitter - A process transmitter for measuring a process variable in an industrial process comprises a sensor module, a heating device and transmitter circuitry. The sensor module has a sensor for sensing a process variable of an industrial process and generating a sensor signal. The heating device is connected to the sensor module for generating a heat pulse to influence generation of the sensor signal. The transmitter circuitry is connected to the sensor and the heating device. The transmitter circuitry verifies operation of the sensor by measuring a change in the sensor signal due to the heat pulse. In one embodiment of the invention, the heat pulse thermally expands a volume of a fill fluid within the process transmitter. In another embodiment, the heat pulse changes a physical property, such as dielectric, of a fill fluid within the process transmitter. | 04-08-2010 |
20100199778 | CAPACITIVE PRESSURE SENSOR - A pressure sensor includes a platform | 08-12-2010 |
20100218613 | SEMICONDUCTOR DEVICE INCLUDING A CAVITY - A semiconductor device includes a substrate including a cavity and a first material layer over at least a portion of sidewalls of the cavity. The semiconductor device includes an oxide layer over the substrate and at least a portion of the sidewalls of the cavity such that the oxide layer lifts off a top portion of the first material layer toward a center of the cavity. | 09-02-2010 |
20100242617 | AIR PRESSURE SENSOR WITH TEMPERATURE COMPENSATION - An air pressure sensor that has a first conductive membrane configured for deflection in response to pressure differences between air at a reference pressure and air at a pressure to be sensed. The sensor also has a second conductive membrane configured for deflection in response to a change in temperature to which the pressure sensor is exposed. The sensor uses a circuit in electrical communication with the first and second conductive membranes, that obtains a first signal and second signal from the first and second conductive membranes respectively. The first and second signals are indicative of the deflection of the first and second conductive membranes. The circuit adjusts the first signal by the second signal to generate an output signal indicative of the air pressure. | 09-30-2010 |
20100263452 | Pressure Sensor for Hydraulic Media in Motor Vehicle Brake Systems - Disclosed is a pressure sensor, especially for measuring pressures exceeding 100 bar, with a diaphragm ( | 10-21-2010 |
20100281993 | PRESSURE SENSOR PACKAGE - A semiconductor package ( | 11-11-2010 |
20100300208 | CAPACITIVE ELECTRO-MECHANICAL TRANSDUCER - A capacitive electro-mechanical transducer includes a cell, the cell including a first electrode and a second electrode that is disposed opposite the first electrode with a gap therebetween; and a pressure-adjusting unit for adjusting pressure in the gap. | 12-02-2010 |
20110000303 | MONOLITHIC VACUUM MANOMETER UTILIZING ELECTROSTATIC INTERFERENCE AS A MEANS OF DETECTION - A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output. | 01-06-2011 |
20110005325 | Design and fabrication method of a flexible capacitive pressure sensor - The invention relates to a capacitive pressure sensor and a method for fabricating thereof. The capacitive pressure sensor comprises a cover, a plurality of first electrode, a substrate and a plurality of second electrode. The cover owns an upper wall and a plurality of side walls. The plurality of first electrode is disposed on the inside of the upper wall of the cover. The side walls of the cover are connected to the substrate to form a space. The plurality of second electrode is disposed on the substrate. The plurality of first electrode and the plurality of second electrode are both in the space. In the invention, the material for cover, the plurality of first electrodes and the substrate are all flexible polymeric material. | 01-13-2011 |
20110056302 | ELECTRONIC CIRCUIT FOR CONTROLLING A CAPACITIVE PRESSURE SENSOR AND CAPACITIVE PRESSURE SENSOR SYSTEM - An electronic circuit ( | 03-10-2011 |
20110120228 | CAPACITIVE PRESSURE SENSOR - A capacitive pressure sensor array is made of two conductive layers, wherein each conductive layer is formed with a plurality of elongated conductors disposed in a substantially parallel manner between an upper and a lower insulating sheet, wherein the upper and lower insulating sheets are bonded to each other between adjacent conductors. | 05-26-2011 |
20110154905 | CAPACITIVE SENSOR AND MANUFACTURING METHOD THEREOF - A capacitive sensor includes a substrate, at least one first electrode, at least one second electrode, a sensing device, at least one anchor base, at least one movable frame, and a plurality of spring members. The first and second electrodes are disposed on the substrate, and the anchor base surrounds the first and second electrodes and is disposed on the substrate. The movable frame surrounds the sensing device. Some of the spring members connect the movable frame and the sensing device, and the other spring members connect the movable frame and the anchor base. The sensing device and the first electrode are both sensing electrodes. The movable frame is disposed above the second electrode, and cooperates with the second electrode to act as a capacitive driver. | 06-30-2011 |
20110209554 | COMBINED TYPE PRESSURE GAUGE, AND MANUFACTURING METHOD OF COMBINED TYPE PRESSURE GAUGE - The present invention allows manufacturing of a capacitive diaphragm pressure gauge and a Pirani pressure gauge on a single silicon substrate, which makes it possible to reduce the manufacturing cost by the miniaturization of products and mass production. According to an embodiment of the present invention, the manufacturing method of a combined type pressure gauge is a manufacturing method of a combined type pressure gauge including a capacitive diaphragm pressure gauge and a Pirani pressure gauge, the method including a groove-forming step of forming a first groove portion and a second groove portion on a first surface side of a silicon substrate by etching, and a bonding step to bond a glass substrate to the silicon substrate so as to cover the first groove portion and the second groove portion on the first surface side of the silicon substrate. | 09-01-2011 |
20110239773 | RESONANT FREQUENCY BASED PRESSURE SENSOR - A pressure sensor for sensing a pressure of a process fluid includes a sensor body exposed to the pressure of the process fluid. The sensor body deforms in response to the pressure. A diaphragm suspended from the sensor body has a tension which changes in response to deformation of the sensor body. A resonate frequency of the diaphragm is measured. The measured resonant frequency is indicative of the line pressure of the process fluid and integrity of the isolation fill fluid system. In addition to measuring the resonant frequency, the oscillation mode itself can be used as a diagnostic tool to assess sensor health. | 10-06-2011 |
20110290031 | CAPACITANCE TYPE PRESSURE SENSOR - The present invention is adapted to prevent a diaphragm from being deformed by a thermal stress caused by thermal expansion coefficients of a sensor main unit and a fixing member and includes a sensor main unit to which a fixed electrode is fixed, a diaphragm structure that forms a sealed space between the diaphragm structure and the sensor main unit and a fixing member that is jointed to the diaphragm structure in a manner of surrounding a pressure receiving part of the diaphragm structure so as to lead a fluid to the pressure receiving part, wherein the diaphragm structure includes a flat plane diaphragm main unit and first and second ring members each having a known thermal expansion coefficient that are respectively provided on both sides of a circumference of the diaphragm main unit. | 12-01-2011 |
20120017690 | Pressure Sensor - A pressure sensor, comprising: a monocrystalline membrane body, which includes a measuring membrane and an edge region surrounding the measuring membrane. The edge region has a greater material thickness than the measuring membrane and the edge region has a first mounting surface, whose surface normal is given by a first principal crystal axis. A monocrystalline substrate, which, with respect to crystal structure, comprises the same semiconductor material as the membrane body, the substrate has a second mounting surface, whose surface normal extends parallel to the first principal crystal axis. The membrane body is tightly connected to the substrate by joining the first mounting surface to the second mounting surface. The orientations of other principal crystal axes of the membrane body and the substrate are, in each case, oriented parallel relative to one another. | 01-26-2012 |
20120017691 | ELECTROSTATIC CAPACITIVE PRESSURE SENSOR - In an electrostatic capacitance pressure sensor provided with a pressure sensor chip of a diaphragm structure for detecting an electrostatic capacitance in accordance with a pressure of a medium to be measured, one face of a sensor diaphragm of the pressure sensor is a pressure introduction chamber side wherein the medium to be measured is introduced, and the other face is a capacitor chamber side wherein a capacitor portion is formed, where, in the sensor diaphragm, the rigidity is lower towards a center portion from a peripheral edge portion that is a boundary of diaphragm securing portions on the capacitor chamber side. | 01-26-2012 |
20120024075 | CAPACITANCE PRESSURE SENSOR - The present invention provides a capacitance pressure sensor having a traces structure which can stably measure a pressure. A capacitance pressure sensor according to an embodiment of the present invention includes: a substrate having a first insulation layer to a third insulation layer; a diaphragm placed to face the substrate so that a reference chamber is formed between the diaphragm and the substrate; a first electrode on the substrate 1, facing to the diaphragm; a second electrode on the diaphragm, which is disposed so as to face the first electrode; a trace connected to the first electrode, for electrically connecting the first electrode to the outside; and a second trace connected to the second electrode, for electrically connecting the second electrode to the outside. The traces penetrate the first insulation layer from the reference chamber side of the substrate toward the side opposing to the reference chamber of the substrate, and also are bent between each of the insulation layers. | 02-02-2012 |
20120118067 | Capacitive Pressure Sensor with Improved Electrode Structure - An improved capacitive manometer comprises a diaphragm that is constrained relative to an electrode structure spaced from the diaphragm. An electrode support structure is arranged to support the electrode structure and comprises a compliant ring including at least three flexures integrally formed in the ring and angularly spaced around the alignment axis. The electrode support is clamped in place relative to the diaphragm at the locations of the compliant ring flexures. | 05-17-2012 |
20120132006 | CAPACTIVE PRESSURE SENSOR INCORPORATING A TEMPERATURE MEASUREMENT AND COMPATIBLE WITH HOT ENVIRONMENTS - A capacitive measurement device including first measurement device designed to carry out a first measurement function in relation to a nearby object, the first measurement device including a body and, a capacity electrode, both of a substantially conductive material, and a guard electrode placed between the body and the capacitive electrode and insulated from the body on the one hand and from the capacitive electrode on the other hand by dielectric elements; an excitation apparatus which maintains the capacitive electrode and the guard electrode to a desired AC electrical potential; a first electronic apparatus, connected to the capacitive and guard electrodes, for measuring the capacitance between the capacitive electrode and the object; and a second measurement device designed to carry out a second measurement function, which are located in the vicinity of either the capacitive or guard electrode, and maintained by the excitation apparatus to a desired AC electrical potential. | 05-31-2012 |
20120137784 | Relative Pressure Sensor - A relative pressure sensor includes: a pressure measuring transducer having a measuring membrane of a semiconductor chip and a platform, wherein, between both of these, a reference pressure chamber is formed; a support body, connected with the platform by means of a pressure-bearing adhesion, wherein a reference pressure path extends through the two former elements into the reference pressure chamber; and a sensor outer body, in which a transducer chamber with a first opening and a second opening is formed. The pressure measuring transducer is brought into the transducer chamber through the first opening, and is held therein by means of the support body. The support body pressure-tightly seals the first opening, and a side of the measuring membrane facing away from the reference pressure chamber is contactable with the media pressure through the second opening. The reference pressure path has a gas-filled, sealed section, which extends from the reference pressure chamber at least through the pressure bearing adhesion, and wherein the sealed section is gas-tightly sealed by means of a flexible, metallized plastic foil. | 06-07-2012 |
20120174681 | CAPACITIVE CERAMIC PRESSURE MEASURING CELL AND PRESSURE SENSOR WITH SUCH A PRESSURE MEASURING CELL - A capacitive pressure measuring cell, including a ceramic platform and a ceramic measuring membrane, which are connected pressure tightly along a joint to form a reference pressure chamber between them. The measuring membrane has a first electrode facing the platform, and the platform has at least a second electrode facing the measuring membrane. The capacitance between the first and second electrodes depends on the difference between a pressure externally acting on the measuring membrane and a pressure reigning in the reference pressure chamber, wherein the joint has a thickness d, which defines an equilibrium distance between the measuring membrane and the front side of the platform. On the front side of the platform, a support layer is arranged, which comprises an inorganic insulator, wherein the support layer has a thickness of at least 0.2, and wherein the second electrode is arranged on the support layer. | 07-12-2012 |
20120186354 | CAPACITANCE TYPE PRESSURE SENSOR AND METHOD FOR MANUFACTURING A CAPACITANCE TYPE PRESSURE SENSOR - A capacitance type pressure sensor includes a semiconductor substrate having a reference pressure compartment formed therein, a diaphragm formed of a portion of the semiconductor substrate and formed in a surface layer portion of the semiconductor substrate to define the reference pressure compartment, the diaphragm having a through-hole communicating with the reference pressure compartment, fillers arranged within the through-hole, and an isolation insulating layer surrounding the diaphragm to isolate the diaphragm from the remaining portion of the semiconductor substrate. | 07-26-2012 |
20120204652 | PRESSURE SENSOR STRUCTURE AND ASSOCIATED METHOD OF MAKING A PRESSURE SENSOR - A pressure sensor can include a diaphragm plate of an electrically conductive material, the diaphragm plate including substantially planar opposed first and second surfaces. A layer of a dielectric material can be provided at the first surface of the diaphragm plate along a periphery thereof such that a flexion region of the first surface is substantially free of the dielectric material. The dielectric layer can be configured to engage a fixed structure within a housing to support the flexion region as to enable deflection thereof relative to the fixed structure that changes an electrical characteristic of the pressure sensor in response to application of force at the second surface of the diaphragm plate. | 08-16-2012 |
20120247218 | Absolute Capacitive Micro Pressure Sensor - An absolute capacitive micro pressure sensor including a pressure sensor element with a mechanically fixed electrode and a deflectable pressure sensor membrane separated from the fixed electrode by a predetermined distance. A packaging defining a chamber is formed by a cover assembled to a base plate with an opening defined therein. The chamber is filed with a fluid and/or a gas at substantially constant pressure. Within, the chamber, the pressure sensor element is mounted to the base plate to define an open cavity therebetween substantially aligned with the opening defined in the base plate. A gel is disposed in the open cavity in contact with an exposed surface of the deflectable membrane. | 10-04-2012 |
20130008256 | METHOD FOR REDUCING CONTENT OF FOREIGN MOLECULES DISSOLVED IN A PRESSURE TRANSFER LIQUID OF A PRESSURE MEASURING TRANSDUCER - A method for reducing the content of foreign molecules in gaseous or liquid form dissolved in a pressure transfer liquid of a pressure measuring transducer. A pressure receiving chamber is closed by an isolating diaphragm. A pressure measuring chamber is connected to the pressure receiving chamber, and a pressure sensor arranged in the pressure measuring chamber, in which the liquid serves to fill an inner space of the pressure measuring transducer formed by the pressure receiving chamber is provided. The pressure measuring chamber is connected therewith, and transfers an external pressure acting on the isolating diaphragm to the pressure sensor in measurement operation. The liquid is brought into contact with at least one adsorptive body, and foreign molecules dissolved in the liquid are bound to the adsorptive bodies by adsorption. | 01-10-2013 |
20130042693 | CANNULA ASSEMBLIES AND AMBULATORY INFUSION SYSTEMS WITH PRESSURE SENSORS MADE OF STACKED COPLANAR LAYERS - Cannula assemblies with pressure sensors made of stacked coplanar layers and ambulatory infusion systems comprising the same are disclosed. The cannula assemblies include a hub and an infusion cannula. The hub includes a pressure sensor and a fluid channel fluidly coupled to the infusion cannula. The pressure sensor is formed from a stack of coplanar layers including a top layer, a base layer an electrode layer and a counter electrode layer. The fluid channel is positioned between the top layer and the base layer. The electrode layer is positioned between the top layer and the base layer and coupled to the fluid channel. The counter-electrode layer is positioned between the top layer and the electrode layer. A spacer layer having a through cut-out defining an electrode cavity is disposed between the top layer and the base layer such that the electrode layer extends across the electrode cavity. | 02-21-2013 |
20130118265 | MEMS CAPACITIVE PRESSURE SENSOR, OPERATING METHOD AND MANUFACTURING METHOD - A MEMS pressure sensor wherein at least one of the electrode arrangements comprises an inner electrode and an outer electrode arranged around the inner electrode. The capacitances associated with the inner electrode and the outer electrode are independently measured and can be differentially measured. This arrangement enables various different read out schemes to be implemented and also enables improved compensation for variations between devices or changes in device characteristics over time. | 05-16-2013 |
20130152694 | SENSOR WITH VACUUM CAVITY AND METHOD OF FABRICATION - A MEMS pressure sensor device comprises a sensor element positioned on top of a carrier and a cavity. The sensor element hermetically seals the cavity. An electrode is coupled to the cavity that forms a pressure transducer together with the sensor element. The cavity is created by a density changing material. | 06-20-2013 |
20130233086 | MEMS CAPACITIVE PRESSURE SENSOR - A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure. | 09-12-2013 |
20130319125 | PRESSURE SENSOR, OSCILLATOR, ULTRASONIC WAVE SENSOR AND MEASURING METHOD THEREOF - The present invention relates to a pressure sensor, which may include a first electrode plate, a second electrode plate, a third electrode plate, a fourth electrode plate and a fifth electrode plate, which are successively laminated on a substrate, wherein the first electrode plate, the third electrode plate and the fourth electrode plate are fixed to the substrate, the first electrode plate and the second electrode plate are disposed opposite to each other and have a gap formed therebetween, the second electrode plate is suspended over the first electrode plate to constitute a first capacitor; the second electrode plate and the third electrode plate are disposed opposite to each other and have a gap formed therebetween, to constitute a second capacitor; and the fifth electrode plate is suspended over the fourth electrode plate to constitute a third capacitor, and can move along a direction perpendicular to the substrate. | 12-05-2013 |
20140033824 | PRESSURE DETECTION MODULE AND PRESSURE SENSOR DEVICE HAVING SUCH A PRESSURE DETECTION MODULE - A pressure detection module of a pressure sensor device includes a receptacle part for receiving a carrier substrate. The carrier substrate is located on a first side with a pressure detection unit, and is inserted into the receptacle part with a second side facing away from the first side. The carrier substrate is fixed with its second side on a base of a receptacle groove. In order to construct the pressure detection module as small as possible, and to manufacture it in a cost-effective way, the receptacle part, the receptacle groove and a peripheral flange around the receptacle groove are, for example, provided with a plate-shaped design. The base has a contacting opening, through which contact surfaces of the carrier substrate, which are exposed at the contacting opening, are electrically contactable. | 02-06-2014 |
20140069198 | CAPACITIVE PRESSURE SENSOR - High temperature pressure sensing devices and methods are disclosed. In some embodiments, a high temperature pressure sensor including intrinsic zero output and span correction versus temperature is disclosed. In addition, ways in which to improve high temperature performance through the use of intermediate circuits located towards the distal end of the high temperature pressure sensor as well as configurations to reduce thermally induced stresses within the pressure sensor are disclosed. The disclosed embodiments also detail ways in which to reduce signal loss due to various stray capacitances within the pressure sensor to improve signal fidelity and sensitivity. | 03-13-2014 |
20140069199 | CAPACITIVE PRESSURE SENSOR - High temperature pressure sensing devices and methods are disclosed. In some embodiments, a high temperature pressure sensor including intrinsic zero output and span correction versus temperature is disclosed. In addition, ways in which to improve high temperature performance through the use of intermediate circuits located towards the distal end of the high temperature pressure sensor as well as configurations to reduce thermally induced stresses within the pressure sensor are disclosed. The disclosed embodiments also detail ways in which to reduce signal loss due to various stray capacitances within the pressure sensor to improve signal fidelity and sensitivity. | 03-13-2014 |
20140174189 | DROPLET-BASED CAPACITIVE PRESSURE SENSOR - A pressure sensing apparatus which utilizes an electrolytic droplet retained between a first and second sensing electrode within a housing. Contact between the electrolyte droplet and the electrodes form electric double layers (EDL) having interfacial EDL capacitance proportional to interface contact area which varies in response to mechanical pressure applied to deform exterior portions of the housing. The electrolyte contains a sufficient percentage of glycerol to prevent evaporative effects. Preferably, the sensing electrodes are modified with depressions, hydrophilic and/or hydrophobic portions to increase central anchoring of the electrolyte droplet within the housing. The inventive pressure sensor provides high sensitivity and resolution which is beneficial to numerous applications, and is particularly well-suited for medical sensing applications. | 06-26-2014 |
20140202254 | Integrity Monitor for Reference Cavity of Capacitance Diaphragm Gauge - A system and method detect the presence of an unacceptable quantity of gas molecules in the reference vacuum cavity of a capacitance diaphragm gauge (CDG). An independent pressure transducer has an active portion exposed to the reference vacuum cavity. The transducer includes a ring anode, a cylindrical inner wall surface that forms at least one cathode, and a magnet positioned with respect to the ring anode such that the magnetic flux of the magnet is generally aligned with the central axis of the ring anode. A high voltage source applies a voltage between the ring anode and the cathode. A current sensor senses a magnitude of any current flowing between the ring anode and the cathode via ionized gas molecules. A monitoring unit monitors the magnitude of the current sensed by the current sensor and activates an alarm when the magnitude of the current exceeds an acceptable magnitude. | 07-24-2014 |
20140208860 | DIAPHRAGM-TYPE PRESSURE GAUGE - A diaphragm-type pressure gauge which is attached to a vessel to be measured and measures a pressure by introducing a gas inside the vessel includes a housing into which the gas is introduced, and a sensor unit which is arranged in the housing, and includes a diaphragm electrode, a measurement surface of which is arranged parallel to an introduction direction of the gas. When the housing is attached to the vessel, the measurement surface of the diaphragm electrode is arranged parallel to a direction of gravitational force. | 07-31-2014 |
20140260647 | PRESSURE SENSOR STABILIZATION - A pressure sensor is provided which produces a measurement of the displacement and a measurement of a natural frequency of the diaphragm which are then combined to produce a compensated measurement of the displacement of the diaphragm, thereby substantially eliminating the dependence of the compensated displacement measurement on strain. | 09-18-2014 |
20140352446 | PRESSURE SENSOR STRUCTURE - A microelectromechanical pressure sensor structure that comprises a planar base and side walls and a diaphragm plate. The side walls extend circumferentially away from the planar base to a top surface of the side walls. The planar base, the side walls and the diaphragm plate are attached to each other to form a hermetically closed gap in a reference pressure, and a top edge of the inner surfaces of the side walls forms a periphery of a diaphragm. The diaphragm plate comprises one or more planar material layers of which a first planar material layer spans over the periphery of the diaphragm. The top surface of the side walls comprises at least one isolation area that is not covered by the first planar material layer. | 12-04-2014 |
20150040674 | ELECTROSTATIC CAPACITIVE PRESSURE SENSOR - An electrostatic capacitive pressure sensor includes: a housing having an inlet portion for a fluid; a sensor chip that detects, as a change in electrostatic capacitance, a change in a diaphragm that flexes upon receipt of a pressure of the fluid, which has entered through the inlet portion; and a baffle that prevents deposition, onto the diaphragm, of a contaminating substance included in the fluid, provided within a flow path of the fluid that is subject to measurement between the inlet portion and the diaphragm. The baffle has a cylindrical structure that is closed on one end, disposed with the direction that is perpendicular to a pressure-bearing surface of the diaphragm as the axial direction. A plurality of flow paths, in which the fluid passes between the inner peripheral surface and the outer peripheral surface of the cylindrical structure, is provided in multiple layers in the axial direction. | 02-12-2015 |
20150068314 | MEMS DEVICE - According to one embodiment, a MEMS device is disclosed. The device includes a substrate, a first and second MEMS elements on the substrate. Each of the first and second MEMS elements includes a fixed electrode on the substrate, a movable electrode above the fixed electrode, a first insulating film, the first insulating film and the substrate defining a cavity in which the fixed and movable electrodes are contained, and a first anchor on a surface of the first insulating film inside the cavity and configured to connect the movable electrode to the first insulating film. The cavity of the first MEMS element is closed. The cavity of the second MEMS element is opened by a through hole. | 03-12-2015 |
20150101415 | Measuring arrangement with a ceramic measuring cell - A measuring arrangement with a ceramic measuring cell and a metal process connection for connecting the measuring cell to a measuring environment, with the measuring cell being fastened in the process connection without gaskets and in a diffusion-resistant fashion, with the measuring cell being fastened at a ceramic ring, which is arranged at a metal ring for fastening in the process connection. | 04-16-2015 |
20150122040 | Pressure Measuring Device - A pressure measuring device, comprising: a pressure measuring cell having a measuring membrane, at least one platform and a pressure chamber formed therebetween. An electrical transducer for transducing a deflection of the measuring membrane into a pressure dependent, primary signal; a cylindrical housing having a measuring cell chamber, in which the pressure measuring cell is arranged, and an end face pressure receipt opening in communication with the pressure duct; and an electronic circuit in the housing for operating the electrical transducer, and for processing the primary signal, and for outputting a measurement signal. The cylinder axis of the pressure measuring cell forms with the cylinder axis of the housing an angle, which amounts to not less than 80°, and which is especially preferably a right angle. | 05-07-2015 |
20150122041 | PRESSURE SENSOR - A pressure sensor comprises a first substrate and a cap attached to the first substrate. The cap includes a processing circuit, a cavity and a deformable membrane separating the cavity and a port open to an outside of the pressure sensor. Sensing means are provided for converting a response of the deformable membrane to pressure at the port into a signal capable of being processed by the processing circuit. The cap is attached to the first substrate such that the deformable membrane faces the first substrate and such that a gap is provided between the deformable membrane and the first substrate which gap contributes to the port. The first substrate comprises a support portion the cap is attached to, a contact portion for electrically connecting the pressure sensor to an external device, and one or more suspension elements for suspending the support portion from the contact portion. | 05-07-2015 |
20150135844 | Method for joining ceramic bodies by means of an active hard solder, or braze, assembly having at least two ceramic bodies joined with one another, especially a pressure measuring cell - An assembly, comprising two ceramic bodies, which are connected by means of a joint, which contains an active hard solder, or braze, wherein the active hard solder, or braze, has a continuous core volume, which is spaced from the ceramic bodies, in each case, by at least 1 μm, especially at least 2 μm, and wherein the joint has bounding layers, which border on the ceramic body. The the core volume, which includes at least 50% of the volume of the joint, is free of crystalline phases of size greater than 6 μm, especially greater than 4 μm, preferably greater than 2 μm. | 05-21-2015 |
20150292970 | PRESSURE SENSOR AND METHOD OF MANUFACTURING THE SAME - According to one embodiment, a pressure sensor includes a fixed electrode fixed on a substrate, a movable electrode provided above the fixed electrode, so as to be movable in vertical directions, a thin-film structure of a dome shape, forming, together with the substrate, a cavity to accommodate the fixed electrode and the movable electrode, the thin-film structure includes a communicating hole to communicate the cavity with an outside of the thin-film structure. A voltage is applied between the fixed electrode and the movable electrode to measure mechanical displacement of the movable electrode. | 10-15-2015 |
20150346044 | METHOD AND DEVICE FOR MEASURING A VACUUM PRESSURE USING A MEASURING CELL ARRANGEMENT - Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy. | 12-03-2015 |
20150377730 | PROCESS PRESSURE TRANSMITTER WITH SEAL HAVING DIAMOND LIKE CARBON COATING - A process pressure transmitter system includes a process pressure transmitter housing, a process pressure sensor in the process pressure transmitter housing, a flange face in the process pressure transmitter housing and an isolation diaphragm on the flange face. A first capillary passageway carries a first fill fluid from the isolation diaphragm to the process pressure sensor. A process seal diaphragm couples to a process fluid of the industrial process. A second capillary passageway carries a second fill fluid from the process seal diaphragm to the isolation diaphragm. A diamond like carbon (DLC) coating coats the process seal diaphragm. | 12-31-2015 |
20150377731 | Method for Soldering a Connecting Element - method for soldering a connection element to a connection point on an electrically conductive coating that is suitable for soft-soldering on an insulating surface of a base body using a soft-soldering method; as well as sensors manufactured using this method for which a spatial limitation of the wetting of the coating with soft-solder material, during the process of soft-soldering, is effected by providing a groove in the base body which at least partly surrounds the connection point on the outside. At least a part of the area of the external insulating surface of the base body including the connection point is coated with the coating, and soft-solder material is locally applied to the connection point and the connection element is soldered onto the connection point using the applied soft-solder material in a soft-soldering process. | 12-31-2015 |
20160025582 | Capacitive Pressure Transducer for Measuring the Pressure of a Medium Adjacent to the Measuring Cell - The invention relates a capacitive pressure transducer for measuring the pressure of a medium adjacent to the pressure transducer, which has a resilient measuring diaphragm, of which the first side is at least partially in contact with the medium and of which the second side, which faces away from the medium, comprises a measuring electrode and, for measuring the temperature, a resistance element made of a material having a temperature dependent resistance. Furthermore, the pressure transducer has a base body, which is arranged opposite the second side of the measuring diaphragm, with a counter electrode, which forms a measuring capacitance with the measuring electrode. According to the invention, the resistance element is formed as a resistive layer between the second side of the measuring diaphragm and the measuring electrode. | 01-28-2016 |
20160025583 | CMOS PRESSURE SENSOR WITH GETTER USING TI-W WIRE EMBEDDED IN MEMBRANE - Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material. | 01-28-2016 |
20160076961 | SEMICONDUCTOR PACKAGE WITH AIR PRESSURE SENSOR - A semiconductor package having an air pressure sensor and methods to form a semiconductor package having an air pressure sensor are described. For example, a semiconductor package includes a plurality of build-up layers. A cavity is disposed in one or more of the build-up layers. An air pressure sensor is disposed in the plurality of build-up layers and includes the cavity and an electrode disposed above the cavity. Also described are various approaches to fabricating a semiconductor package having a hermetically sealed region. | 03-17-2016 |
20160084723 | Pressure Sensor - A pressure sensor with a ceramic base body, a measuring membrane connected to the base body forming a measuring chamber, and an electromechanical converter that serves to convert a pressure-related deformation of the measuring membrane into a primary electrical signal. The pressure sensor is characterized by a low thermal measuring error, especially during temperature changes, due to the base body consisting of a ceramic material with high thermal conductivity, especially a thermal conductivity greater than or equal to 50 W/mK. | 03-24-2016 |
20160091380 | HIGH-TEMPERATURE PRESSURE SENSING - A pressure sensing system includes a hot zone electronics module, a cool zone electronics module and a plurality of conductors that connect the hot zone electronics to the cool zone electronics. The hot zone electronics module includes a capacitive pressure sensor and an oscillator that provides an oscillating signal to the capacitive pressure sensor. The hot zone electronics provides at least one DC sensor signal. The cool zone electronics module converts the at least one DC sensor signal into a pressure value and provides a DC power signal. The plurality of conductors convey the DC power signal to the hot zone electronics and convey the at least one DC sensor signal to the cool zone electronics. | 03-31-2016 |
20160097691 | CERAMIC PRESSURE MEASUREMENT CELL AND METHOD FOR PRODUCTION THEREOF - A pressure measurement cell, comprising: a ceramic measurement membrane and a ceramic counterpart. The measurement membrane is joined to the counterpart in a pressure-tight manner forming a pressure chamber between the measurement membrane and the counterpart by means of an active brazing solder. The pressure measurement cell furthermore has a solder stop layer on a surface of the measurement membrane and/or the counterpart, wherein the solder stop layer has a metal oxide or a reduced form of the metal oxide. The metal oxide has at least one oxidation stage, which, assuming an activity coefficient of R | 04-07-2016 |
20160103030 | CAPACITIVE PRESSURE SENSOR - Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode. | 04-14-2016 |
20160103031 | Ceramic Pressure Sensor and Method for its Production - A ceramic pressure sensor is described which is produced using an alternative production method and has a ceramic base body, a ceramic measuring membrane which is disposed on the base body and is to be charged with a pressure to be measured, and a pressure measuring chamber enclosed in the base body below the measuring membrane. A method to produce the pressure sensor by means of which, in particular, more complex shapes of the measuring membrane and/or the base body are producible with minimal pores wherein the base body and/or the measuring membrane have layers applied on each other in a 3-D printing method and produced by the selective laser melting of nanopowder layers. | 04-14-2016 |
20160116357 | DROPLET-BASED CAPACITIVE PRESSURE SENSOR - A pressure sensing apparatus which utilizes an electrolytic droplet retained between a first and second sensing electrode within a housing. Contact between the electrolyte droplet and the electrodes form electric double layers (EDL) having interfacial EDL capacitance proportional to interface contact area which varies in response to mechanical pressure applied to deform exterior portions of the housing. The electrolyte contains a sufficient percentage of glycerol to prevent evaporative effects. Preferably, the sensing electrodes are modified with depressions, hydrophilic and/or hydrophobic portions to increase central anchoring of the electrolyte droplet within the housing. The inventive pressure sensor provides high sensitivity and resolution which is beneficial to numerous applications, and is particularly well-suited for medical sensing applications. | 04-28-2016 |
20160169759 | CAPACITIVE PRESSURE SENSOR | 06-16-2016 |
20160187217 | POSITION INDICATOR - A position indicator includes a capacitor having a capacitance that changes in correspondence to a force applied to one end part of a housing. The capacitor is configured by a pressure detecting chip that includes a first electrode and a second electrode disposed opposite to the first electrode with a predetermined distance defined therebetween to have capacitance Cv formed between the first electrode and the second electrode. The capacitance Cv changes when the force applied to the one end part of the housing is transmitted to the first electrode to thereby change a relationship (e.g., the distance) between the two electrodes. A pressure transmitting member having predetermined elasticity is disposed on the first electrode such that the force applied to the one end part of the housing is transmitted to the first electrode of the semiconductor element via the pressure transmitting member. | 06-30-2016 |
20190145843 | METHOD AND APPARATUS FOR CANCELLING INTERCONNECTION CAPACITANCE | 05-16-2019 |