Entries |
Document | Title | Date |
20080273209 | SYSTEMS AND METHODS FOR HIGH-PRECISION LENGTH MEASUREMENT - Provided are systems and methods for performing high-precision length measurement. One such system includes: an optical receiver, configure to receive a reflected optical pulse from a target; an optical combiner, configured to generate a combined optical pulse using the reflected optical pulse and a reference optical pulse; and a signal analyzer configured to determine a distance to the target using a depth of modulation value of the combined signal. A method as disclosed herein includes the steps of determining a first length component of a combined optical signal using a depth of modulation value and determining a second length component of the combined optical signal using a modulation period value. | 11-06-2008 |
20080278731 | COMPOSITE SENSOR MEMBRANE - A sensor may include a membrane to deflect in response to a change in surface stress, where a layer on the membrane is to couple one or more probe molecules with the membrane. The membrane may deflect when a target molecule reacts with one or more probe molecules. | 11-13-2008 |
20080316496 | Method and Apparatus For Studying Surface Vibrations by Moving Speckle Interferometer - A method of studying a surface using an interferometer, in which there is relative motion between the surface and the interferometer, the motion having a total velocity V | 12-25-2008 |
20080316497 | TRACKING TYPE LASER INTERFEROMETER AND METHOD FOR RESETTING THE SAME - A tracking type laser interferometer that detects displacement of a retroreflector | 12-25-2008 |
20090033945 | METHOD AND MEASURING DEVICE FOR MEASURING AN ABSOLUTE DISTANCE - In a method and a measuring device ( | 02-05-2009 |
20090040528 | POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - A positioning apparatus comprises a first measuring device measuring a position of the stage in a first measuring range, a second measuring device measuring a position of the stage in a second measuring range having an overlapping range overlapping the first measuring range, a third measuring device measuring a position of the stage in the overlapping range, and a controller controlling the first measuring device to take over the measurement value obtained by the second measuring device in the overlapping range in moving the stage from the second measuring range to the first measuring range, thereby switching from measurement by the second measuring device to measurement by the first measuring device. The controller performs correction processing based on the measurement by the third measuring device so as to reduce an error of the measurement value obtained by the first measuring device after the switching. | 02-12-2009 |
20090046297 | Atmosphere-density-fluctuation monitors for interferometer beams, and atmosphere-supplying systems comprising same - Systems are disclosed for providing a controlled atmosphere. In an exemplary system an atmosphere-release device delivers a flow of the atmosphere to a propagation pathway. A density-fluctuation monitor includes multiple interferometer beams propagating in a direction in the pathway. The number of beams is sufficient for determining position of a member along the direction and for producing a mutual signal fluctuation that is a function of atmosphere-density fluctuations in the beams in the pathway. A controller coupled to the density-fluctuation monitor receives respective signals from the interferometers, determines the mutual signal fluctuation from the interferometer signals, and produces respective control commands from the mutual signal fluctuation. A treatment device coupled to the atmosphere-release device receives the control commands from the controller and changes, based on the control commands, at least one parameter of the atmosphere being delivered by the treatment device to the atmosphere-release device. | 02-19-2009 |
20090059239 | Method of Determining the Depth Profile of a Surface Structure and System for Determining the Depth Profile of a Surface Structure - According to one embodiment of the present invention, a method of determining the depth profile of a surface structure includes: irradiating the surface structure with irradiation light including light components of different wavelengths; and determining the depth profile of the surface structure in dependence on interferometric effects caused by the reflection of the irradiation light at the surface structure. | 03-05-2009 |
20090073457 | Method and its apparatus for measuring displacement of a specimen - In measuring the displacement of an object using the phase-shifting light interference, since three beam splitters were used for generating the four phase-shifting optical paths, an interferometer was increased in size, whereby the application objects were limited. Also, to solve an essential problem that if there is a disturbance such as a temperature distribution, a humidity distribution, an air pressure distribution, a density distribution or an air flow change on the phase-shifting optical paths, a measurement error occurs, the four phase-shifting optical paths are produced spatially in parallel by combining a four division prism with a photonic crystal λ/4 element and a photonic crystal polarizing element arranged like an array, constructing a small light interference displacement sensor in the invention, whereby the application objects are expanded, and the microscopic displacement or surface roughness of the object can be measured at a resolution of sub nanometer or less and with high reproducibility without influence of the disturbance. | 03-19-2009 |
20090103104 | OPTICAL LENS SYSTEM AND POSTION MEASUREMENT SYSTEM USING THE SAME - An optical lens system includes a lens surface capable of forming concentric interference patterns on an object as if light emitted from a single light source were virtually emitted from two or more light sources within a plane containing an optical axis of the single light source. | 04-23-2009 |
20090116034 | INTERFEROMETER - An interferometer includes a laser beam source, a light wave dividing and synthesizing portion for 2-demultiplexing and irradiating a laser beam irradiated from the laser beam source on a measuring target and synthesizing a light having each displacement information, a multiphase interference light generating portion for generating, from a synthesized laser beam, a first interference light having a first phase, a second interference light having a second phase which is different from the first phase by 180 degrees, a third interference light having a third phase which is different from the first phase by 90 degrees, and a fourth interference light having a fourth phase which is different from the first phase by 270 degrees, a 3-phase signal generating portion for generating a 3-phase signal having a phase difference of 90 degrees on the basis of first to fourth interference signals based on the first to fourth interference lights, and a 2-phase signal generating portion for carrying out a vector synthesis over the 3-phase signal having a phase difference of 90 degrees, thereby generating a 2-phase signal having a phase difference of 90 degrees. | 05-07-2009 |
20090128828 | Device for measuring the position of at least one structure on a substrate - A device for measuring the position of at least one structure on a substrate is disclosed. The substrate to be measured is positioned in a mirror body. A flat insert is provided in the mirror body and is formed such that the substrate and the insert together always have the same optical thickness, irrespective of the mechanical thickness of the substrate. | 05-21-2009 |
20090207418 | Absolute distance measurement method and system using optical frequency generator - The present invention relates to absolute distance measurement method and system using an optical frequency generator. The absolute distance measurement method using the optical frequency generator includes (a) generating a plurality of different stabilized wavelengths by using the optical frequency generator; (b) obtaining an initial estimation value of a distance to be measured by using a frequency sweeping interferometer; (c) analyzing an uncertainty range of the obtained initial estimation value; (d) measuring excess fraction parts of the different wavelengths by analyzing interference signals for each of the wavelengths; (e) determining integer parts for each of the different wavelengths within the uncertainty range of the initial estimation value; and (f) measuring an absolute distance to be measured by using the excess fraction part and the integer parts for each of the different wavelengths. | 08-20-2009 |
20090257067 | Dynamic Air Turbulence Compensation for Laser Measurement Apparatus - Measurement apparatus comprising a laser measuring system an acoustic system is described. The apparatus provides a feedback control signal that can be used in the feedback control system of an associated machine. To allow real time, dynamic, operation the laser measurements are compensated using a compensation value derived from a plurality of laser measurements and at least one acoustic time of flight value. | 10-15-2009 |
20090268211 | Optical Interferometric Sensor - Embodiments of environmental stimulus sensors comprising multiple sources and detectors for interrogating one or more optically resonant cavities that are responsive to one or more environmental stimuli are disclosed. Such sensors have, among other advantages, improved immunity to source and/or detector noise. | 10-29-2009 |
20090284750 | INTERFEROMETER - An interferometer of the present invention includes a PBS | 11-19-2009 |
20090310142 | Position measurement system - A position measurement system for measuring positional coordinates of a point under measurement includes a first noise removal unit, a parameter determination unit and a second noise removal unit. The first noise removal unit removes noise from the measured positional coordinates to acquire first positional coordinate values. The parameter determination unit determines a noise removal parameter on a basis of the first positional coordinate values. The second noise removal unit again removes noise from the first positional coordinate values with using the noise removal parameter, to acquire second positional coordinate values. | 12-17-2009 |
20100014097 | ALGORITHM CORRECTING FOR CORRECTION OF INTERFEROMETER FLUCTUATION - An exemplary interferometer system includes an interferometer producing data from at least one interferometer beam. A source of gently flowing gas or gas mixture (atmosphere) produces a gas flow substantially normal to the beam pathway. A perturbation source (e.g., resistance heater) upstream of the beam pathway produces, in a repetitively pulsed manner, perturbed loci in the flowing atmosphere in selected locations upstream of the beam pathway. The perturbed loci flow to the interferometer beam(s). Data from the interferometer are received by a processor programmed with an algorithm that calculates, based on the data obtained during a perturbation pulse, the effect of the perturbed loci on the at least one interferometer beam as the loci pass through the interferometer beam. The processor also updates the algorithm based on data obtained from the interferometer during a subsequent perturbation pulse, compared to a previous perturbation pulse. | 01-21-2010 |
20100073683 | REFLECTIVE PHOTOELECTRIC SENSOR AND OBJECT DETECTING METHOD - To reduce the probability of incorrect determination to detect an object reliably. A reflective photoelectric sensor is provided with: a light projecting device for emitting light; a light receiving device for receiving the optical feedback of the light that is emitted from the light projecting device; a determining portion for determining whether or not an object exists in the direction in which the light is emitted from the light projecting device, based on the optical feedback; and a reflection preventing plate of a moth-eye structure, disposed at a position that is on the optical path of the light that is emitted from the light projecting device at a position that is more distant than the location wherein the object is anticipated to appear. | 03-25-2010 |
20100085575 | METHOD FOR DETERMINING VIBRATION DISPLACEMENT AND VIBRATING FREQUENCY AND APPARATUS USING THE SAME - A exemplary method for determining vibration displacement in interferometric scanning, in which two optical signals having a phase difference with each other of a high-coherence interferogram corresponding to a tested surface is detected for determining a shifting displacement between the reference plane of interferometric apparatus and the tested surface. In one embodiment, a series of the shifting displacements with respect to a time interval are measured for determining the vibrating frequency of the tested surface by spectrum analysis. Meanwhile, an exemplary interferometric apparatus is also disclosed for calculating the relative position between the tested surface and the reference plane of interferometric apparatus whereby the interferometric apparatus is capable of compensating influences of vibration caused by the environment or the tested surface itself so as to obtain the surface profile and vibration frequency of the tested surface. | 04-08-2010 |
20100110444 | MEASUREMENT APPARATUS - The present invention provides a measurement apparatus which measures a distance between a reference surface fixed on a fiducial surface and a test surface located on a test object, the apparatus including an optical frequency comb generation unit configured to generate a light beam with a plurality of optical frequency components, which have equal optical frequency separations therebetween, a detection unit configured to, for at least two of the plurality of optical frequency components, detect an interference signal between a light beam reflected by the reference surface and a light beam reflected by the test surface to detect a phase corresponding to an optical path length between the reference surface and the test surface, and a calculation unit configured to calculate a geometric distance between the reference surface and the test surface based on the phases detected by the detection unit. | 05-06-2010 |
20100134803 | LASER SENSOR FOR SELF-MIXING INTERFEROMETRY WITH INCREASED DETECTION RANGE - The present invention relates to a laser sensor for self-mixing interferometry. The laser sensor comprises at least one semiconductor laser light source emitting laser radiation and at least one photodetector ( | 06-03-2010 |
20100182610 | OPTICAL TOMOGRAPHIC IMAGING APPARATUS - In an optical tomographic imaging apparatus in which a tomographic image is acquired using an interference light between a return beam of a first measuring beam and a first reference beam traveling on a beam path having first beam path length changing unit thereon, an optical interferometer detects movement of the inspection object by using an interference light between a return beam of a second measuring beam from a movement detection position and a second reference beam traveling on a beam path having second beam path length changing unit thereon; and positional misplacement correcting unit changes the beam path length of the first reference beam based on the moving amount detected by the optical interferometer, wherein the beam path lengths of the two reference beams can be changed by a mechanism, thus further reducing deformation of an acquired image in an eye ball depth direction caused by a back and forth motion. | 07-22-2010 |
20100182611 | DISPLACEMENT MEASURING APPARATUS AND DISPLACEMENT MEASURING METHOD - A displacement measuring apparatus | 07-22-2010 |
20100195112 | INTERFEROMETER WITH SCAN MOTION DETECTION - An apparatus includes an interferometer configured to generate an interference pattern by combining test light from a test object with reference light reflected from a reference object, the interferometer being further configured to direct at least a first part of a monitor test beam to the test object at a first incident angle and at least a second part of a monitor reference beam to the reference object at a second incident angle, and recombine the first part and the second part of the monitor beams after they reflect from the test and reference surfaces to interfere with one another and form a monitor pattern, where the first and second angles cause the monitor pattern to have spatial interference fringes, and wherein a change in the position of the interference fringes is indicative of a change in a relative position between the test and reference objects. | 08-05-2010 |
20100245839 | DETECTOR ELEMENT MATRIX FOR AN OPTICAL POSITION MEASURING INSTRUMENT - A detector element array for an optical position measuring instrument, by way of such array a fringe pattern resulting in a detector plane can be converted into electrical scanning signals. The detector element array includes a plurality of light-sensitive detector elements disposed in matrix-like fashion in rows and columns. The plurality of light-sensitive detector elements include a first detector element in a first column of the columns, a second detector element in the first column that is adjacent to the first detector element and a third detector element in a second column of the columns that is adjacent to the first column, wherein the third detector element is diagonally adjacent to the first detector element. The detector element array includes a first switch that selectively directly connects the first detector element with the second detector element and a second switch that selectively directly connects the first detector element with the third detector element. The detector element array includes a memory element associated with the first detector element, wherein memory element information is stored in the memory element that indicates which of the second and third detector elements is connected to the first detector element in an established scanning configuration, wherein no more than the first and second switches are associated with the memory element. | 09-30-2010 |
20100277744 | METHOD AND APPARATUS FOR RESONANT FREQUENCY IDENTIFICATION THROUGH OUT-OF-PLANE DISPLACEMENT DETECTION - A method for out-of-plane displacement detection is disclosed. The out-of-plane displacement is detected by analyzing all the fringe density indexes calculated using the frequency-domain information extracted from a series of interference images of the sample vibrating at different frequencies. The present invention further discloses a method and an apparatus for resonant frequency identification by detecting the peak value of all the fringe indexes calculated at different scanning frequencies. With the identified resonant frequency, the full-field vibratory surface profile of the sample in various resonance modes can be reconstructed. | 11-04-2010 |
20100309479 | INTERFERENCE MEASURING DEVICE - An interference measuring device | 12-09-2010 |
20100315650 | SPECTRALLY CONTROLLABLE LIGHT SOURCES IN INTERFEROMETRY - The time delay (and therefore the OPD) between object and reference beams in an interferometer is manipulated by changing the spectral properties of the source. The spectral distribution is tuned to produce a modulation peak at a value of OPD equal to the optical distance between the object and reference arms of a Fizeau interferometer, thereby enabling the use of its common-axis configuration to carry out white-light measurements free of coherence noise. Unwanted interferences from other reflections in the optical path are also removed by illuminating the object with appropriate spectral characteristics. OPD scanning is implemented without mechanical means by altering the source spectrum over time so as to shift the peak location by a predetermined scanning step between acquisition frames. Finally, the spectrum is controlled on a pixel-by-pixel basis to create a virtual surface that matches the profile of a particular sample surface. | 12-16-2010 |
20100328675 | OPTICAL MEASURING ELEMENT HAVING A SINGLE-PIECE STRUCTURE - An optical measuring element measures forces in at least one direction. The measuring element has a single-piece structure. There is an outside wall with notches introduced therein. Each notch defines parallel edges, and the notches define more or less elastically flexible zones in the structure and constitute the only connection between a first region and a second region of the structure. For optical distance measurements between the two regions of the structure, one or more optical fibers are each attached with one end thereof to a region of the structure such that reflective surfaces are located close to the ends. The reflective surfaces are firmly connected to another region. The optical fibers are disposed on the outside wall. | 12-30-2010 |
20110007322 | METHOD AND ARRANGEMENT FOR DISPLACEMENT - A method and apparatus operable for displacing an image, which is transmitted by electromagnetic radiation, perpendicular to the direction of radiation by use of a rotatably disposed radiation-refracting body, located in the path of an imaging beam, having a refractive index that differs from the surrounding medium with regard to the radiation used. The method allows for precise image displacement. The rotation of the radiation-refracting body causing the displacement is measured, and the change of the optical path length caused by the angular change in a further electromagnetic beam utilized for the measurement is determined by evaluating the superimposition of the radiation reflected by a planar reflecting surface with the incident electromagnetic radiation. Part of the electromagnetic measurement beam, which is reflected on the surface of the radiation-refracting body, strikes a measurement unit, which supplies an electrical signal as a function of the incident position of the electromagnetic radiation. | 01-13-2011 |
20110013196 | MEASUREMENT APPARATUS AND METHOD OF MANUFACTURING OPTICAL SYSTEM - The present invention provides a measurement apparatus which measures a wavefront of light traveling from a member to be measured, the apparatus including a first reference surface, a second reference surface configured to function as a reference surface for the first reference surface, an optical system configured to form a first interference pattern of light traveling from the member to be measured and light traveling from the first reference surface, and a second interference pattern of light traveling from the first reference surface and light traveling from the second reference surface, a detection unit configured to detect the first interference pattern and the second interference pattern, respectively, and a calculation unit configured to calculate a wavefront of light traveling from the member to be measured based on the first interference pattern and the second interference pattern detected by the detection unit. | 01-20-2011 |
20110032534 | SYSTEM AND A METHOD FOR BROADBAND INTERFEROMETRY - A method and a system for determining a depth of a space, the system includes: a scanner for scanning, by a single broadband light beam, the structural element and the area of the surface of the object, wherein the area at least partially surrounds the structural element; a sensor for detecting interference patterns generated when the single broadband light beam concurrently illuminates a portion of the area and at least a portion of the structural element; and an analyzer for analyzing the interference patterns to determine the height difference between the area and the structural element. | 02-10-2011 |
20110063622 | OPTICAL ENCODER FOR OBTAINING DISPLACEMENT INFORMATION OF OBJECT - An optical encoder includes a light source | 03-17-2011 |
20110141480 | POSITION-MEASURING DEVICE - A position-measuring device, for ascertaining the position of two objects which are disposed in a manner allowing movement relative to each other in at least one measuring direction, includes a light source, as well as a splitting device by which a light beam, provided by the light source, is split into two or more partial beams of rays. The partial beams of rays traverse at least two partial-beam paths. Interfering partial beams of rays from the partial-beam paths strike a plurality of opto-electronic detector elements, so that displacement-dependent position signals are ascertainable via the detector elements. The light source takes the form of a semiconductor laser having a fiber-grating feedback device. | 06-16-2011 |
20110170116 | EFPI SENSOR - An apparatus for estimating a property, the apparatus includes: a hollow core tube having a first opening and a second opening; a first optical waveguide disposed within the first opening; and a second optical waveguide disposed within the second opening and spaced a distance from the first optical waveguide, the distance being related to the property; wherein a portion of at least one of the optical waveguides within the tube is perimetrically isolated from the tube. | 07-14-2011 |
20110216326 | LIGHTWAVE INTERFERENCE MEASUREMENT APPARATUS USED TO MEASURE OPTICAL PATH LENGTH OR DISTANCE - A lightwave interference measurement apparatus includes a phase detector configured to detect a phase of a signal of an interference between light from a distance-measurement light source and reflected on a reference surface and light from the distance-measurement light source and reflected on a target surface, an intensity detector configured to detect an intensity of light from a non-distance-measurement light source having a wavelength different from that of the distance-measurement light source and reflected on the reference surface and an intensity of light from the non-distance-measurement light source and reflected on the target surface, and an analyzer configured to calculate a geometric distance based on an optical path length calculated from the phase and a wavelength of the distance-measurement light source, and an average value of a vapor pressure distribution between the target surface and the reference surface calculated from intensity information of the light from the non-distance-measurement light source. | 09-08-2011 |
20110292403 | INTERFEROMETRIC DISTANCE MEASURING METHOD WITH SPECTRALLY SEPARABLE DOUBLE CHIRP AND DEVICE - In a distance-measuring method, chirped laser radiation with two separable radiation components is emitted to at least one target to be surveyed and via a local oscillator path, the radiation components having an opposite chirp as a time dependency of the modulated wavelengths (λ | 12-01-2011 |
20110292404 | METHOD FOR MACHINE MEASUREMENT - A method for machine measurement for an NC processing machine is provided. The processing machine has a machine head, for example, a fork head and an associated mechanical and electrical spindle changing interface for holding a motor spindle. A laser interferometer with a beam generator and a beam detector is also provided and at least one measurement optic which interacts with the laser interferometer, for example, in the form of a reflector, and laser interference measurements, which are directed at a measurement optic, in particular distance measurements, carried out for machine measurement. The laser interferometer has an interface which corresponds to the spindle changing interface, and the laser interferometer is substituted for the motor spindle via the spindle changing interface for machine measurement, and is aligned by means of the machine axes for the laser interference measurements. | 12-01-2011 |
20110299092 | Imaging Optical System for Producing Control Information Regarding Lateral Movement of An Image Plane or An Object Plane - A new and useful concept is provided by which control information for an imaging optical system such as a lithographic imaging optical system can be generated. A system and method are disclosed that are designed to detect changes in the lateral position of an image plane or object plane in an imaging optical system, particularly a lithographic imaging optical system. | 12-08-2011 |
20110299093 | INTERFEROMETER - An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas. | 12-08-2011 |
20110310396 | DISPLACEMENT DETECTING DEVICE - A displacement detecting device has a diffraction grating, grating interferometers, and relative position information output sections. The grating interferometers have a light source, reflectors, a beam splitter, and light receiving sections. The reflectors reflect 1st-order diffracted lights diffracted by the diffraction grating, and cause the reflected 1st-order diffracted lights to be incident at a position substantially identical to the position at which the light from the light source is irradiated. Furthermore, the reflectors cause the 1st-order diffracted lights to be incident on the diffraction grating at an angle different to either the incidence angle of the light from the light source incident on the diffraction grating or the angle at which the 1st-order diffracted lights are transmitted through or reflected by the diffraction grating. | 12-22-2011 |
20120002214 | OPTICAL TOMOGRAPHIC IMAGING APPARATUS AND CONTROL METHOD THEREFOR - There are provided an optical tomographic imaging apparatus which detects an amount of movement of an object during imaging to reduce a deformation or a displacement in a depth direction in an acquired image. The apparatus using interference beams obtained by combining each return beam with each reference beam, the return beams being obtained by scanning the object with measuring beams, including: a unit adapted to scan the object with the measuring beams; a unit adapted to irradiate the object with the measuring beams such that regions of the object irradiated with each measuring beams are partially overlapped; a unit adapted to calculate a positional difference in a depth direction between obtained tomographic images of the overlapped parts of the regions; and a unit adapted to compute an amount of movement of the object based on the calculated positional difference in the depth direction. | 01-05-2012 |
20120044500 | OPTICAL INTERFEROMETER - An optical interferometer including, an analyzer configured to calculate an air dispersion ratio of air in the dispersion measurement interferometer excluding the component gas on the basis of a detection result of a first partial pressure detector, to calculate dispersion of air in a distance measurement interferometer from the calculated air dispersion ratio and a detection result of a second partial pressure detector, and to calculate a geometrical distance of the optical path length difference between a reference surface and a target surface. | 02-23-2012 |
20120099114 | Optical Interferometric Sensor - Embodiments of environmental stimulus sensors comprising multiple sources and detectors for interrogating one or more optically resonant cavities that are responsive to one or more environmental stimuli are disclosed. Such sensors have, among other advantages, improved immunity to source and/or detector noise. | 04-26-2012 |
20120113434 | MEASUREMENT APPARATUS - A measurement apparatus which measures a distance between a reference surface and a test surface, comprises a light source unit including a plurality of light sources each corresponding to one of a plurality of wavelength scanning ranges and each continuously scans a wavelength of generated light in the corresponding wavelength scanning range, an interferometer unit which splits light emitted by each of the plurality of light sources into reference light and test light, and detects, as an interference signal, an interference fringe formed by the reference light and the test light, and a processor which determines a slope of a phase of the interference signal with respect to wave number of the light based on the interference signal detected by the interferometer unit for each of the plurality of wavelength scanning ranges, and determines the distance from the slope of the phase. | 05-10-2012 |
20120127477 | INTERFEROMETER AND DISTANCE CALCULATION METHOD THEREFOR - A method of calculating a geometrical distance of a test optical path on the basis of interfering a test beam and a reference beam includes an optical-path-length calculating step of calculating an optical path length of the test optical paths having different wavelengths by using the interfering beam having mutually different wavelengths, a refractive-index calculating step of calculating the refractive index of the test optical path on the basis of the optical path length of the test optical path calculated by the optical-path-length calculating step, a smoothing step of smoothing a plurality of refractive indices acquired by repeating the optical-path-length calculating step and the refractive-index calculating step to calculate a smoothed refractive index, and a geometrical distance calculating step of calculating the geometrical distance of the test optical path on the basis of the smoothed refractive index calculated by the smoothing step. | 05-24-2012 |
20120127478 | REFLECTOR, OPTICAL ELEMENT, INTERFEROMETER SYSTEM, STAGE DEVICE, EXPOSURE APPARATUS, AND DEVICE FABRICATING METHOD - A reflecting member has: a first reflecting surface, which extends in a second direction that includes a first direction component; a second reflecting surface, which extends in a third direction that includes the first direction component, that is substantially symmetric to the first reflecting surface; and a third reflecting surface, which extends in a fourth direction, that is substantially orthogonal to the first direction. | 05-24-2012 |
20120133951 | Method and Apparatus for Measuring Spacings Between Optical Surfaces of an Optical System - A method for measuring spacings between optical surfaces of a multi-lens optical system includes detecting the centring state of the optical system by taking into consideration all optical surfaces of the optical system. Then the optical system is adjusted in such a way, taking the centring state into consideration, that the optical axis of the optical system is aligned as far as possible with a reference axis. In a next step the spacings between the optical surfaces are determined with the aid of a short-coherence interferometer. The measuring-light ray directed onto the optical system for this purpose runs likewise along the reference axis. | 05-31-2012 |
20120170050 | Reflective Diffractometric Hydrogel Sensor for Biological and Chemical Detection - A reflective diffractometric hydrogel sensor includes an upper layer, including a microfluidic chamber formed from a substantially transparent material and configured to contain a solution, a reflective diffraction grating positioned within the microfluidic chamber, the diffraction grating including a plurality of hydrogel strips configured to change in dimension in response to a stimulus, each hydrogel strip having a top surface coated with a reflective material and a bottom surface in contact with the upper layer substrate, and a reflective surface below the reflective diffraction grating wherein when a coherent light is incident upon and reflected from the upper layer at an angle substantially normal to the upper layer an interference diffraction pattern results, including a first diffraction mode, a light intensity of which indicates the relative distance between the top surfaces of the plurality of hydrogel strips and the reflective surface. | 07-05-2012 |
20120212745 | WIDE DYNAMIC RANGE INTERFEROMETRIC TRANSDUCER WITH DIVERGENT BEAM - An apparatus and method for estimating a parameter of interest using values of a beam property from two or more electromagnetic beams that both pass through at least part of an optical displacement device. The apparatus may include a Fabry-Perot interferometer, a collimated light source, and a detection array. At least one mirror of the interferometer may be operably coupled to an element receiving an external stimulus, such as pressure, force, and/or acceleration. The method includes using the apparatus. | 08-23-2012 |
20120212746 | INTERFEROMETER AND MEASUREMENT METHOD - The present invention provides an interferometer that measures a distance between a reference object and a measurement object, the interferometer including a light splitting element configured to split light from a light source into two light beams and cause one of the light beams to enter the reference object and the other light beam to enter the measurement object, a detection unit configured to detect interference light between light reflected by the reference object and light reflected by the measurement object and output a signal of the interference light, and a processing unit configured to perform processing for obtaining the distance. | 08-23-2012 |
20120250030 | ALIGNMENT OF AN INTERFEROMETER MODULE FOR USE IN AN EXPOSURE TOOL - The invention relates to alignment of an interferometer module for use in an exposure tool. An alignment method is provided for aligning an interferometer to the tool while outside of the too. Furthermore, the invention provides a dual interferometer module, an alignment frame use in the alignment method, and an exposure tool provided with first mounting surfaces for cooperative engagement with second mounting surfaces of an interferometer module. | 10-04-2012 |
20120281238 | Optical Position-Measuring Device - An optical position-measuring device for detecting the relative position of two objects includes a measuring standard connected to one object, and a scanning unit connected to the other object and including a light source, one or more grating(s), and a detector system. The detector system includes a plurality of detector element groups arranged in a detection plane, via which a plurality of position-dependent, phase-shifted scanning signals is able to be generated by scanning a periodic fringe pattern that results in the detection plane, the detector elements that have in-phase scanning signals forming a group in each case. The sum of the areas and the centroid of the detector elements of a group is identical to the sum of the areas and the centroid, respectively, of the detector elements of each other group. Periodic diaphragm structures are arranged in front of the light-sensitive areas of the detector elements. | 11-08-2012 |
20120327424 | DOUBLE PASS INTERFEROMETER WITH TILTED MIRRORS - An interferometer of the present invention includes a PBS | 12-27-2012 |
20130057872 | Device for Determining Distance Interferometrically - A device for interferometrically determining the distance between two plates disposed substantially in parallel, includes a light source, beam-splitter element(s), reflector element(s), deflection elements, retroreflectors, and a detection unit. A beam of rays emitted by the light source falls on the first plate and splits into a reflected reference beam of rays and a transmitted measuring beam of rays. The measuring beam strikes a reflector on the second plate and undergoes a first reflection back toward the first plate. The reference beam traverses a first deflection element, and the measuring beam traverses a second deflection element. Both beams pass through a retroreflector. The reference beam is reflected at the first plate, and the measuring beam undergoes a second reflection at a reflector of the second plate, so that both beams propagate collinearly interferingly toward the detection unit, where a plurality of phase-shifted distance signals are generated. | 03-07-2013 |
20130070256 | MEASURING APPARATUS - A measuring apparatus includes a light source unit configured to continuously scan wavelengths of a plurality of types of beams at different speeds in a plurality of discrete wavelength scanning ranges, a beam synthesizer, an interferometer unit configured to detect as an interference signal an interference fringe formed by a reference beam reflected on a reference surface and a target beam reflected on a target surface, and a processor configured to determine the absolute distance based upon the interference signal detected by the interferometer unit. The interferometer unit includes a single optical detector. The processor obtains the absolute distance for each of the plurality of types of beams through a frequency analysis of a synthesized interference signal, and outputs one absolute distance by operating a plurality of absolute distances that have been obtained. | 03-21-2013 |
20130088723 | SYSTEMS AND METHODS FOR SUPPRESSING COHERENT STRUCTURED ILLUMINATION ARTIFACTS - Methods and systems are provided for suppressing speckle and/or diffraction artifacts in coherent structured illumination sensing systems. A coherent radiation pattern forms an interference pattern at an illumination image plane and illuminates an object. Radiation scattered or otherwise emitted by the object is detected to produce a signal, which is integrated in time. Coherent artifact suppression is attained by using a spatial modulator, such as an acousto-optic device, to vary a phase gradient at the illumination image plane during the signal integration time. Various embodiments are provided for purposes including without limitation: preserving the depth of field of the coherent illumination; using the same acousto-optic device for pattern generation and coherent artifact suppression; electronically controlling the effective spatial coherence of the illumination system; and reducing errors due to coherent artifacts in a laser-based three dimensional imaging system. | 04-11-2013 |
20130120759 | APPARATUS FOR MEASURING A DISTANCE - The invention relates to an apparatus for measuring a distance. A self-mixing interference (SMI) unit ( | 05-16-2013 |
20130148129 | APPARATUS AND METHOD FOR MEASURING DISTANCE - A method of tracking the position of an object, comprising using reference interference data from first output beam, reference interference data from a second output beam, measurement interference data from the first output beam, measurement interference data from the second output beam, and knowledge of the difference between the absolute phase offset of the first output beam and the absolute phase offset of the second output beam for both a reference interferometer ( | 06-13-2013 |
20130194582 | MULTIWAVELENGTH INTERFEROMETER - A multiwavelength interferometer ( | 08-01-2013 |
20130194583 | INTERFEROMETER DEVICES FOR DETERMINING INITIAL POSITION OF A STAGE OR THE LIKE - An exemplary device has a stationary portion and a movable portion. The stationary portion has a first corner-cube, an optical system including a beamsplitter, and a light detector. The movable portion comprises a second corner-cube mountable on an object that is displaceable in a principal direction relative to the stationary portion. The beamsplitter splits a beam of collimated broadband light into a reference beam and a measurement beam that are directed by the optical system to make multiple roundtrip passes from the optical system to the respective corner cubes and back. The reference beam and measurement beam interfere with each other to produce a coherence envelope sensed by the detector, wherein a detected displacement of the coherence envelope corresponds to a respective position of the object in the principal direction. | 08-01-2013 |
20130194584 | Position-Measuring Device and System Having a Plurality of Position-Measuring Devices - In position-measuring devices and a systems having a plurality of position-measuring devices for determining the position of an object in several spatial degrees of freedom, the plurality of optical position-measuring devices scan the object from a single probing direction, and the probing direction coincides with one of the two main axes of motion. | 08-01-2013 |
20130250307 | Displacement Detecting Device - A displacement detecting device includes a light source, a beam splitting section, a diffraction grating, a reflecting section, a beam combining section, a light receiving section, and a relative position information output section. The diffraction grating is adapted to diffract a first beam reflected by a surface-to-be-measured of a member-to-be-measured, and cause the diffracted first beam to be incident again on the surface-to-be-measured. The reflecting section is adapted to reflect a second beam split by the beam splitting section to the beam splitting section. The light receiving section is adapted to receive interfering light of the first beam and the second beam. The relative position information output section is adapted to output displacement information of the surface-to-be-measured in the height direction based on intensity of the received interfering light. | 09-26-2013 |
20130265586 | INTERFEROMETER WITH CONTINUOUSLY VARYING NUMBER OF WAVELENGTHS TO THE REFERENCE MIRROR - An interferometer in which the path length of the reference beam, measured in wavelengths, is continuously changing in sinusoidal fashion and the interference signal created by combining the measurement beam and the reference beam is processed in real time to obtain the physical distance along the measurement beam between the measured surface and a spatial reference frame such as the beam splitter. The processing involves analyzing the Fourier series of the intensity signal at one or more optical detectors in real time and using the time-domain multi-frequency harmonic signals to extract the phase information independently at each pixel position of one or more optical detectors and converting the phase information to distance information. | 10-10-2013 |
20130335746 | DEVICE FOR DISTANCE MEASUREMENT - A device for interferential distance measurement that includes a measurement reflector having a surface and a light source emitting a beam parallel to the surface. The device includes a splitter element including a splitter grating that is disposed perpendicular to the surface, wherein the splitter grating receives the beam and splits the beam into a measurement beam and a reference beam, wherein the measurement beam acts at least twice upon the measurement reflector along a path of the measurement beam. The device including a combining element, at which the measurement beam and the reference beam enter into interferential superposition to form interfering measurement and reference beams. The device further includes a detector arrangement, by way of which a scanning signal pertaining to a distance between the measurement reflector and a component of said device in a measuring direction can be generated from the interfering measurement and reference beams. | 12-19-2013 |
20140043618 | Coherence Gated Doppler Motion Sensor and Medical Applications - A motion sensor applicable to medical procedures includes a source of light with a wavelength bandwidth and an optical detector. A first optical coupler terminates in a first probe tip and couples the light into the first probe tip. A second optical coupler terminates in a second probe tip and directs onto the detector scattered light returning through the second probe tip. A presentation device outputs a signal that indicates motion in a target volume of a sample in a vicinity of the probe tips based on a Doppler shift of the scattered light. The volume depends on coherence distance determined by the bandwidth. In variations, the first and second tips are the same tip, a multimode fiber is included, the bandwidth is between 0.1% and 5% of a center wavelength, or the presentation device is a speaker, or some combination. | 02-13-2014 |
20140071457 | Method and System for Tilt and Height Control of a Substrate Surface in an Inspection System - A system for substrate tilt and focus control in an inspection system includes a dynamically actuatable substrate stage assembly including a substrate stage for securing a substrate; a tilt-height detection system including: a height detection sub-system and a tilt detection sub-system. The system further includes a first actuator configured to selectably actuate the substrate along a direction perpendicular to the surface of the substrate at a location of the substrate stage assembly; and an additional actuator configured to selectably actuate the substrate along a direction substantially perpendicular to the surface of the substrate at an additional location of the substrate stage assembly; and a MIMO tilt-focus controller communicatively coupled to the height detection sub-system, the tilt detection sub-system, the first actuator and the additional actuator. | 03-13-2014 |
20140098375 | POSITION MONITORING SYSTEM WITH REDUCED NOISE - An interferometry system for monitoring changes in the position of an object, the system includes a spectrally broadband light source, a sensor module having an interferometer that direct portions of the light received from the source along separate paths. The system includes an intensity monitor having a detector configured to measure the intensity of additional light derived from the source and to produce a monitor output signal. The system includes an electronic processing module to process a sensor output signal based on the monitor output signal to account for intensity fluctuations in light output by the source, and determine information about the changes in the position of the object. The intensity monitor is configured to characterize the intensity fluctuations as a function of wavelength or intensity fluctuations that are spectrally correlated. | 04-10-2014 |
20140152998 | MEASUREMENT METHOD AND MEASUREMENT APPARATUS - A shape of a surface is measured using a measurement signal based on an interfering light of reference light of first light reflected by a reference surface and test light of second light reflected by the surface to be measured. The method includes detecting the measurement signal and a reference signal based on interfering light of the first light not incident on the reference surface and the second light not incident on the surface to be measured, obtaining a sine multiplied signal and a cosine multiplied signal of the measurement signal, correcting the sine multiplied signal and the cosine multiplied signal by a sine signal and a cosine signal of the error component; obtaining a phase by calculating an arctangent of the corrected sine multiplied signal and the corrected cosine multiplied signal and obtaining the shape based on the phase. | 06-05-2014 |
20140268170 | APPARATUS AND METHOD FOR ESTIMATING DEPTH OF BURIED DEFECT IN SUBSTRATE - Provided are an apparatus and a method for estimating a depth of a buried defect in a substrate. The apparatus for estimating a depth of a buried defect in a substrate includes a light source providing a source of light, an aperture through which only a part of the source of light passes, a reflecting mirror receiving and reflecting the source of light that has passed through the aperture as a first light, a lens receiving and condensing the first light, the substrate receiving and reflecting the condensed first light as a second light, a light sensor receiving the second light and sensing a brightness of the second light, and a position adjustment portion adjusting a distance between the lens and the substrate. | 09-18-2014 |
20140300903 | ANGLE MEASURING METHOD AND ANGLE MEASURING SYSTEM - An angle measuring system including: a rotary encoder including an encoder main body and a rotating shaft which is freely rotatable with respect to the encoder main body, the rotary encoder which detects a relative rotation angle of the rotating shaft with respect to the encoder main body; a regulation member which regulates an absolute rotation angle of the encoder main body about the rotating shaft within a fixed range; an absolute angle detecting device which detects the absolute rotation angle of the encoder main body about the rotating shaft concurrently with detection of the relative rotation angle by the rotary encoder; and a correction device which corrects the rotation angle detected by the rotary encoder based on the rotation angle detected by the absolute angle detecting device. | 10-09-2014 |
20140300904 | MEASUREMENT APPARATUS - The present invention provides a measurement apparatus including a first optical system configured to allow a first test light to pass, and a second optical system configured to allow a second test light to pass, wherein an optical power in the first optical system and an optical power in the second optical system are different, a distance between a focal point of the first test light on a side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the first test light, and a distance between a focal point of the second test light on the side of the surface to be measured and the surface to be measured changes in accordance with each of a plurality of wavelengths of the second test light. | 10-09-2014 |
20140307264 | LASER DIODE AS INTERFEROMETER-LASER BEAM SOURCE IN A LASER TRACKER - A laser tracker for continuous tracking of a reflecting target and for determining the distance to the target is provided. The laser tracker may include a base defining a standing axis, a beam steering unit for emission of a measuring radiation and for receiving at least a part of the measuring radiation reflected by the target. The beam steering unit is motorized to be pivotable relative to the base around the standing axis and a tilt axis extending substantially orthogonal to the standing axis. Furthermore, the tracker has a distance measuring unit configured as an interferometer for determining a change in distance to the target by means of interferometry, an interferometer laser beam source for generating the measuring radiation for the interferometer and an angle measurement functionality for determining an alignment of the beam steering unit relative to the base. The interferometer laser beam source may be configured as a laser diode. | 10-16-2014 |
20140313516 | Reducing Registration Error of Front and Back Wafer Surfaces Utilizing a See-Through Calibration Wafer - A calibration wafer and a method for calibrating an interferometer system are disclosed. The calibration method includes: determining locations of the holes defined in the calibration wafer based on two opposite intensity frame; comparing the locations of the holes against the locations measured utilizing an external measurement device; adjusting a first optical magnification or a second optical magnification at least partially based on the comparison result; defining a distortion map for each of the first and second intensity frames based on the comparison of the locations of the holes; generating an extended distortion map for each of the first and second intensity frames by map fitting the distortion map; and utilizing the extended distortion map for each of the first and second intensity frames to reduce at least one of: a registration error or an optical distortion in a subsequent measurement process. | 10-23-2014 |
20140347673 | LASER TRACKING INTERFEROMETER - A laser tracking interferometer has a carriage provided with a first displacement gauge outputting a displacement signal associated with a relative displacement from a reference sphere; a second retroreflector provided to the carriage; a laser interferometer provided to the carriage and outputting a displacement signal associated with a relative displacement between the first retroreflector and the second retroreflector; and a data processor calculating a displacement of the first retroreflector with reference to the reference sphere based on the displacement signal output from the first displacement gauge and the displacement signal output from the laser interferometer. | 11-27-2014 |
20150043007 | METHOD FOR DETERMINING A CHANGE IN DISTANCE BY MEANS OF INTERFEROMETRY - Embodiments of the invention relate to a method for determining a change in distance to a moving and reflective target. Embodiments of the invention can be performed by means of interferometry and may include the generation of laser radiation, the emission of the measurement radiation to the target, and the detection of at least part of the measurement radiation reflected at the target. In some embodiments, a superposition of the reflected measurement radiation with the reference radiation is generated and detected, an interferometer output variable is derived on the basis of the detected superposition, and/or a time-resolved output variable curve is produced from the derived interferometer output variable. In some embodiments, the output variable curve is continually checked in that the output variable curve is continually read out in a time-resolved manner. | 02-12-2015 |
20150085299 | LIGHT TRACING METHOD AND APPARATUS THEREOF - Disclosure is related to a light tracing method, and an apparatus thereof. According to one embodiment of the invention, the apparatus is such as an optical indexer. The method for determining a moving direction is performed based on an optical constructive or destructive interference pattern made by reflected lights received by a sensor chip. In particular, the coherent light may be preferably used in order to enhance the interference effect. In an exemplary embodiment, the method includes firstly the sensor pixels in the sensor chip receiving the reflected light, and calculating the energy. Next, within a time slot, the energy state of each sensor pixel can be calculated. A moving vector may be determined from a difference between the binary energy states of the adjacent sensor pixels. The binary energy state is based on a comparison between every sensor pixel and a statistic average within the sampling time slot. | 03-26-2015 |
20150292914 | ANGLE MEASURING METHOD AND ANGLE MEASURING SYSTEM - An angle measuring system including: a rotary encoder including an encoder main body and a rotating shaft which is freely rotatable with respect to the encoder main body, the rotary encoder which detects a relative rotation angle of the rotating shaft with respect to the encoder main body; a regulation member which regulates an absolute rotation angle of the encoder main body about the rotating shaft within a fixed range; an absolute angle detecting device which detects the absolute rotation angle of the encoder main body about the rotating shaft concurrently with detection of the relative rotation angle by the rotary encoder; and a correction device which corrects the rotation angle detected by the rotary encoder based on the rotation angle detected by the absolute angle detecting device. | 10-15-2015 |
20160003605 | DISPLACEMENT DETECTION APPARATUS - A first light flux serving as object light is caused to enter a member to be measured, and reflected light thereof is caused to enter again the member to be measured after being diffracted by a first diffraction grating. Then, the second-time reflected light of the first light flux by the member to be measured is diffracted by a second diffraction grating. By diffracting the first light flux by the second diffraction grating, a change of the optical path length caused by tilting of the member to be measured is cancelled. | 01-07-2016 |
20160025480 | INTERFEROMETRIC LEVEL SENSOR - Interferometer system and method for use in a level sensor of an exposure apparatus and autofocus system employing same. Operating either at a single or multiple wavelengths, the interferometric system employs two diffraction orders, formed by diffraction grating of the system, as reference and sample beams and is structured to ensure that only light contained in one of the two orders interacts with a wafer under test, thereby ensuring that no interference fringes are projected onto the sample. The diffraction grating is positioned such that its grooves are nominally perpendicular to the direction of wafer scan. Based on measurement data representing interference between reference and sample beams at the detector, a determination of change in position of the wafer in the sample arm is made with increased sensitivity and/or resolution. | 01-28-2016 |
20160033257 | Interferometer - An interferometer includes a light source, a beam splitter, a reference reflector, a measuring reflector, a detection unit, and at least two transparent plane-parallel plates. The beam splitter splits a beam of rays into at least one measuring beam and at least one reference beam. Until being recombined, the measuring beam propagates in a measuring arm, and the reference beam propagates in a reference arm. The reference beam falls at least three times on the reference reflector located in the reference arm. The measuring reflector is disposed in the measuring arm and is joined to an object to be measured, which is movable along a measuring direction relative to the reference reflector. The measuring beam falls at least three times on the measuring reflector. At least one distance signal with regard to the position of the object to be measured is ascertainable from the interfering measuring and reference beams via the detection unit. The plane-parallel plates are disposed parallel to each other in the beam path between the light source and the detection unit. At least the measuring reflector is movable relative to the plane-parallel plates along the measuring direction. The plane-parallel plates each include a plurality of optical elements that exert such an optical effect on the measuring beam and the reference beam that they propagate parallel to each other in the direction of the measuring reflector and reference reflector, respectively. | 02-04-2016 |
20160061587 | Device for Interferential Distance Measurement - A device for interferential distance measurement between two objects that are situated in a movable manner with respect to each other along at least one shifting direction includes at least one light source as well as at least one splitting element, which splits a beam of rays emitted by the light source at a splitting location into at least two partial beams that propagate onward at different angles. The device furthermore includes at least one deflecting element that effects a deflection of the incident partial beams in the direction of a merging location, where the split partial beams are superimposed in an interfering manner and the optical paths of the partial beams of rays between the splitting location and the merging location being arranged such that the traversed optical path lengths of the partial beams between the splitting location and the merging location are identical in the event of a change of distance between the two objects. Furthermore, at least one detector system is provided for detecting distance-dependent signals from the superimposed pair of interfering partial beams. | 03-03-2016 |
20160091372 | METHOD FOR DETECTING FOCAL PLANE BASED ON GRATING TALBOT EFFECT - The present disclosure relates to a method for detecting focal plane based on a grating Talbot effect, the function of which is to detect position of a silicon wafer in a photolithography machine in real time so as to implement an adjustment of leveling and foal plane of the silicon wafer in a high resolution. The detection system utilizes a phase change of “self-image” generated by a grating Talbot effect caused by defocusing of the silicon wafer, so as to accomplish the detecting for focal plane of the silicon wafer in the photolithography machine in a high resolution: if the silicon wafer is at a focal plane, the imaged wavefront by the grating is a planar wavefront; and when the silicon wafer is defocused, the imaged wavefront is a spherical wavefront. Such a detection system has a simple structure, a higher anti-interference capability and a perfect adaption of the process. | 03-31-2016 |
20160123718 | ACCURATE CHIRPED SYNTHETIC WAVELENGTH INTERFEROMETER - A system is provided for measuring distance or displacement, comprising: first and second laser sources configured to provide first and second laser outputs; a beam combiner configured to receive and combine at least part of the first and second laser outputs into a combined laser output; a signal calibrator configured to receive at least part of the first laser output, the second laser output, or the combined laser output, and output a calibration signal; a plurality of optical paths, including a first optical path, a second optical path, the plurality of optical paths being configured to direct at least part of the combined beam onto an optical detector to produce an interference signal; and a signal processor configured to receive the interference signal and determine a pathlength difference between the first and second optical paths. | 05-05-2016 |
20160123720 | LENGTH METROLOGY APPARATUS AND METHODS FOR SUPPRESSING PHASE NOISE-INDUCED DISTANCE MEASUREMENT ERRORS - Length metrology apparatuses and methods are disclosed for measuring both specular and non-specular surfaces with high accuracy and precision, and with suppressed phase induced distance errors. In one embodiment, a system includes a laser source exhibiting a first and second laser outputs with optical frequencies that are modulated linearly over large frequency ranges. The system further includes calibration and signal processing portions configured to determine a calibrated distance to at least one sample. | 05-05-2016 |
20160153838 | OPTICAL DEVICE FOR MEASURING A PHYSICAL PARAMETER AND ASSOCIATED METHOD | 06-02-2016 |
20160161730 | MEASUREMENT DEVICE USING OPTICAL INTERFEROMETRY AND MEASUREMENT METHOD USING OPTICAL INTERFEROMETRY - Provided are a measurement device using optical interferometry and a measurement method using optical interferometry that accurately measure the depth of a recess having a high aspect ratio. The measurement device is provided with a sensor for measuring distance using optical interferometry, an optical microscope having an optical axis in a fixed relationship with the optical axis of the sensor, a sample stage on which a sample to be measured is placed, a means for maintaining a fixed distance between a sensor head end of the sensor and a surface of the sample during measurement, and a tilt adjustment means for tilting the surface of the sample or the optical axis of the sensor so as to maximize the intensity of the sensor light reflected from the surface of the sample or the interference intensity of the sensor light reflected from the surface of the sample and the sensor head end. | 06-09-2016 |
20160178347 | DEVICE AND METHOD OF QUICK SUBPIXEL ABSOLUTE POSITIONING | 06-23-2016 |
20160202041 | OPTICAL POSITION-MEASURING DEVICE | 07-14-2016 |
20220136821 | DUAL LASER MEASUREMENT DEVICE AND ONLINE ORDERING SYSTEM USING THE SAME - A system and a method are disclosed including a dual laser measurement device (DLMD) coupled with a mobile computing device to measure dimensions of a building or other structure, calculate other quantities based on the measured dimensions, select building construction or finishing material, order the material, and save the list of the measured dimensions and ordered materials in a data storage device. All steps of this process from measurement to ordering material may be performed using a DLMD app running on the mobile computing device. | 05-05-2022 |