Class / Patent application number | Description | Number of patent applications / Date published |
702097000 | Length, distance, or thickness | 43 |
20080249733 | PLASMA INSENSITIVE HEIGHT SENSING - A method for determining a distance between a first piece and a second piece includes measuring, at the first or second piece, a first signal at a first frequency, and measuring, at the first or second piece, a second signal at a second frequency. The second frequency is different from the first frequency. The distance is determined based on the measured first and second signals. | 10-09-2008 |
20080281543 | INSPECTION SYSTEM AND METHODS WITH AUTOCOMPENSATION FOR EDGE BREAK GAUGING ORIENTATION - A method for inspecting a feature of a part is provided. The method includes obtaining a profile corresponding to the feature using a sensor and projecting the profile onto a compensation plane normal to the feature for generating an updated profile. The method also includes using the updated profile for reducing a measurement error caused by an orientation of the sensor. An inspection system is also provided. The inspection system includes a sensor configured to capture a fringe image of a feature on a part. The inspection system further includes a processor configured to process the fringe image to obtain an initial profile of the feature and to project the initial profile onto a compensation plane normal to the feature. | 11-13-2008 |
20080319696 | Method and Its System for Calibrating Measured Data Between Different Measuring Tools - The present invention relates to a method and its system for calibrating measured data between different measuring tools. A method of calibrating measured data between different measuring tools includes the steps of: measuring the CD average dimension and roughness of an object to be measured using a CD-SEM tool; calculating the number of the cross section measurement points required for calibration by statistically processing the roughness; measuring the cross section of the object to be measured using the cross section measuring tool to satisfy the number of the cross section measurement points, thereby calculating the CD average dimension of the cross section measurement height specified in the obtained cross section measurement result; and calculating a calibration correction value being a difference between the CD average dimension of the object and the CD average dimension of the cross section measurement height of the object. | 12-25-2008 |
20090076757 | Methods of calibrating a measuring device - A measuring device is provided with a laser source, a beam redirection member, a beam receptor, and a system controller. The measuring device is calibrated by providing a set-up piece having at least one known dimension and positioning the beam redirection member in beam transmitting relationship to the known dimension of the set-up piece. A beam is transmitted from the laser source to the set-up piece via the beam redirection member, which beam is reflected back to the beam receptor via the beam redirection member. The return beam is converted into data, which is transmitted to the system controller. The data is used to calculate a measured dimension, and a compensation factor based on the measured dimension and the known dimension of the set-up piece is then calculated. | 03-19-2009 |
20090076758 | SYSTEM AND METHOD FOR DETERMINING RANGE IN 3D IMAGING SYSTEMS - A system and method of imaging an object. An array of detectors is mounted in an image plane. Each detector in the array of detectors is connected to a timing circuit having an interpolator, wherein the interpolator includes a first circuit which charges a first capacitor at a different rate than it discharges. An optical pulse is transmitted toward an object so that a portion of the optical pulse is reflected from the object as a reflected pulse and a first value representative of when the optical pulse was transmitted toward the object is recorded. The reflected pulse is detected at one or more detectors and a pulse characteristic of the pulse and a second value representative of when the reflected pulse arrived at the detector are recorded. Range to the object is then calculated as a function of the first and second values and the reflected pulse characteristic. | 03-19-2009 |
20090093982 | External Optical Modulator With Domain Inversion For Providing Constant Chirp Versus Frequency - The invention relates to an external optical modulator comprising a Mach-Zehnder having a signal electrode including at least four sections of unequal length to one another positioned over an alternating domain structure in an electrooptic substrate, and including a center section, or center pair of sections disposed asymmetrically between pairs surrounding sections. The surrounding pairs, comprise the two sections adjacent the center section or pair of sections, and each two sections adjacent the previous pair of sections, moving outwardly from the center to the final outermost pair, L | 04-09-2009 |
20090150109 | CALIBRATION PROCEDURE FOR RIVET HEIGHT GAGES - A method, apparatus, and computer usable program product for calibrating rivet height gages. In one embodiment, the process calculates a size of sphere required to create a sphere-based ring gage to simulate a contact point between a rivet height gage and a sharp edge of a specified sharp-edged ring gage. The process identifies an expected protrusion height from a top of the rivet height gage to a reference surface formed by tops of a set of spheres of the size of sphere required to simulate the contact point. | 06-11-2009 |
20090157343 | METHOD OF CORRECTING SYSTEMATIC ERROR IN A METROLOGY SYSTEM - A method for correcting systematic errors in an optical measurement tool in which a first diffraction spectrum is measured from a standard substrate including a layer having a known refractive index and a known extinction coefficient by exposing the standard substrate to a spectrum of electromagnetic energy. A tool-perfect diffraction spectrum is calculated for the standard substrate. A hardware systematic error is calculated by comparing the measured diffraction spectrum to the calculated tool-perfect diffraction spectrum. A second diffraction spectrum from a workpiece is measured by exposing the workpiece to the spectrum of electromagnetic energy, and the measured second diffraction spectrum is corrected based on the calculated hardware systematic error to obtain a corrected diffraction spectrum. | 06-18-2009 |
20090198468 | Calibration of Optical Line Shortening Measurements - A system and method of calibrating optical line shortening measurements, and lithography mask for same. The lithography mask comprises a plurality of gratings, with a calibration marker disposed within each grating. The mask is used to pattern resist on a semiconductor wafer for purposes of measuring and calibrating line shortening. The pattern on the wafer is measured and compared to measurements made of the pattern on the mask. The difference gives the amount of line shortening due to flare, and may be used to calibrate line shortening measurements made using optical measurement tools. | 08-06-2009 |
20090222229 | CALIBRATION DEVICE AND CALIBRATION METHOD FOR RANGE IMAGE SENSOR - A calibration device for calibrating a range image sensor, detecting a distance of each direction within a detection range and generating a range image data, in a state where the range image sensor is attached at a mobile body, the calibration device includes a data receiving portion for receiving a calibration-subject data including a calibration target, which is set within the detection range and includes a first plane surface and a second plane surface, from the range image sensor, a plane surface specifying portion for specifying each of the first and second plane surfaces in a three-dimensional reference coordinate system, a normal vector calculating portion for three-dimensionally calculating a normal vector of each of the first and second plane surfaces, and a rotation calculating portion for three-dimensionally calculating a rotation of the range image sensor on the basis of an already-recognized posture information and the normal vector. | 09-03-2009 |
20090306923 | Method for Measuring the Thickness of Multi-Layer Films - The invention relates to a method for determining the thickness of multi-layer films ( | 12-10-2009 |
20100076710 | Machine sensor calibration system - A sensor calibration system for a mobile machine is disclosed. The sensor calibration system may have a first machine mounted sensor configured to sense a characteristic of an offboard object and to generate a corresponding signal, and a second machine mounted sensor configured to sense the characteristic of the offboard object and to generate a corresponding signal. The sensor calibration system may also have a controller in communication with the first and second machine mounted sensors. The controller may be configured to compare the characteristic of the offboard object as sensed by the first machine mounted sensor to the characteristic of the offboard object as sensed by the second machine mounted sensor, and to correct subsequent signals received from the first machine mounted sensor based on the comparison. | 03-25-2010 |
20100145650 | ON-SITE CALIBRATION METHOD AND OBJECT FOR CHROMATIC POINT SENSORS - A chromatic point sensor (CPS) calibration object and characterizing data are provided. The calibration object comprises a flat base plane with steps extending from it. Step measurement points provided by the steps and base plane measurement points provided by portions of the base plane are intermingled along a measurement track. The characterizing data characterizes known heights of the measurement points. A calibration method acquires measurement data such that some base plane measurement points should be at nearly the same measurement distance and therefore have the same common mode errors relative to known base plane measurement point heights. If such base plane measurement points exhibit minimal error variations, then measurements for those and proximate measurement points may provide reliable calibration data. In contrast, error variations outside an expected range indicate unreliable measurements that should be screened or replaced by new calibration measurements. | 06-10-2010 |
20100235128 | MEASURING DEVICE, IN PARTICULAR DISTANCE MEASURING DEVICE - The invention is based on a measuring device, in particular a distance measuring device, having a transmission unit ( | 09-16-2010 |
20100235129 | CALIBRATION OF MULTI-SENSOR SYSTEM - A method for preprocessing sensor data applicable to sensor fusion for one or more sensors mounted on a vehicle is presented. The method comprises obtaining sensor data relating to common obstacles between the vision sensors and a lidar sensor, calculating range and azimuth values for the common obstacles from the lidar sensor data, and calculating range and azimuth values for the common obstacles from the vision sensor data. Then the method correlates the lidar sensor data pertaining to the common obstacles with the vision sensors pixels, formulates translations between the range values of the common obstacles and the one or more sensor tilt parameters, and performs recursive least squares to estimate an estimated sensor tilt for the vision sensors that can reduce range errors in the vision sensors. | 09-16-2010 |
20110125442 | METHOD FOR CALIBRATING A THICKNESS GAUGE - A method for calibrating a thickness gauge, wherein the thickness gauge measures the thickness of a measurement object in a predefinable measuring direction (Z), comprising at least one displacement sensor ( | 05-26-2011 |
20110161036 | Method For Measuring The Thickness Of Multi-Layer Films - The invention relates to a method for determining the thickness of multi-layer films ( | 06-30-2011 |
20110246116 | SIGNAL PROCESSING APPARATUS USED FOR OPERATIONS FOR RANGE FINDING AND SCANNING RANGEFINDER - A signal processing apparatus includes a differential processing unit to differentiate a reflection signal corresponding to a pulse measurement beam that is periodically scanned in a polarized manner; an arithmetic unit to obtain, with a rising time of a first-order-differential reflection signal as a reference, a barycentric position of the first order differential reflection signal as a detection time of a reflected beam, and to calculate a distance to a measured object based on a time difference between an output time of the measurement beam and the detection time of the reflected beam; and a waveform determining unit to determine whether the reflected beam includes a plurality of overlapping reflected beams from a plurality of measured objects, based on rising and falling characteristics of the first-order-differential reflection signal and based on a rising characteristic of a second-order-differential reflection signal obtained by the second order differential of the reflection signal. | 10-06-2011 |
20110270563 | Electro-Optical Distance Measuring Method And Electro-Optical Distance Measuring Device - The present invention provides an electro-optical distance measurement, wherein a light from a light source ( | 11-03-2011 |
20110307206 | Calibrating method for calibrating measured distance of a measured object measured by a distance-measuring device according to ambient temperature and related device - A calibrating method of calibrating a measured distance of a measured object measured by a distance-measuring device according to an ambient temperature includes providing a temperature sensor for measuring the ambient temperature of the distance-measuring device, calculating a calibrated imaging location of the measured object according to the ambient temperature and an imaging location of the measured object, and calibrating the measured distance according to the calibrated imaging location. In this way, when the distance-measuring device measures the measured object, the error due to the variation of the ambient temperature is avoided according to the calibrating method. | 12-15-2011 |
20120065916 | Method and apparatus for human height measurement - A method for measuring the height of a person is provided. A person is positioned in a room having a floor and a ceiling, and the method comprises the steps of: i) providing a measuring device; ii) calibrating the measuring device to determine a first distance from the floor to the ceiling; iii) placing the measuring device on the person's head; iv) measuring a second distance from the person's head to the ceiling; and v) subtracting the second distance from the first distance to calculate the person's height. An apparatus for performing the measurement is also included. | 03-15-2012 |
20120101763 | POSITIONING APPARATUS, POSITIONING METHOD AND STORAGE MEDIUM FOR POSITIONING OF PEDESTRIAN BY AUTONOMOUS NAVIGATION - Disclosed is a positioning apparatus including: an autonomous navigation sensor which is held by a pedestrian and which outputs periodic oscillation and direction information; a step length data storage section which stores step length data; a movement distance calculating section which calculates movement distance; a traveling direction calculating section which calculates a traveling direction; and a movement direction calculating section which calculates a movement direction for each step, wherein the movement distance calculating section includes a taken step angle calculating section which calculates a taken step angle from the movement direction for each step with respect to the traveling direction; and the movement distance calculating section corrects a value of the step length data so that the step length is larger as the taken step angle becomes larger to calculate a movement distance for each step. | 04-26-2012 |
20120173184 | DEPTH SENSOR, DEFECT CORRECTION METHOD THEREOF, AND SIGNAL PROCESSING SYSTEM INCLUDING THE DEPTH SENSOR - The defect correction method includes arranging a plurality of neighbor depth pixel information values of respective neighbor depth pixels, comparing a depth pixel information value of a depth pixel with a reference value, which is one of the arranged neighbor depth pixel information values, and correcting the depth pixel information value according to a comparison result. | 07-05-2012 |
20120221275 | RADIATION INSPECTION APPARATUS - A radiation inspection apparatus may include a radiation source that irradiates linear radiation, which is parallel to an inspection direction set on an inspection target, to the inspection target, a line type detector that detects the radiation transmitted through the inspection target, a correction detector that is disposed in at least one of a position between the radiation source and the inspection target and a position between the inspection target and the line type detector, the correction detector moving along the inspection direction to detect the radiation, which has been irradiated from the radiation source, at each of a plurality of inspection positions along the inspection direction, and a correction device that corrects the detection result of the line type detector by using the detection result of the correction detector. | 08-30-2012 |
20130090879 | METHOD FOR PREDICTION AND CONTROL OF HARMONIC COMPONENTS OF TIRE UNIFORMITY PARAMETERS - Improved and more easily implemented methods for predicting high speed radial force variation and uneven mass distribution utilize other measurements such as radial nm out and other parameters. The prediction model for high speed radial force variation uses a speed-dependent calibration term for predicting higher harmonic components, while the same or other models can be used for the first harmonic. The uneven mass distribution prediction model accounts for deformation of the tire along multiple tracks, thus employing a more realistic model of crown deformation that accounts for changing tire stiffness levels across different harmonic components of the measured and predicted parameters. | 04-11-2013 |
20130166240 | Pattern Dimension Measurement Method Using Electron Microscope, Pattern Dimension Measurement System, and Method for Monitoring Changes in Electron Microscope Equipment Over Time - Beforehand, the device characteristic patterns of each critical dimension SEM are measured, a sectional shape of an object to undergo dimension measurement is presumed by a model base library (MBL) matching system, dimension measurements are carried out by generating signal waveforms through SEM simulation by inputting the presumed sectional shapes and the device characteristic parameters, and differences in the dimension measurement results are registered as machine differences. In actual measurements, from the dimension measurement results in each critical dimension SEM, machine differences are corrected by subtracting the registered machine differences. Furthermore, changes in critical dimension SEM's over time are monitored by periodically measuring the above-mentioned device characteristic parameters and predicting the above-mentioned dimension measurement results. According to the present invention, actual measurements of machine differences, which require considerable time and effort, are unnecessary. In addition, the influence of changes in samples over time, which is problematic in monitoring changes in devices over time, can be eliminated. | 06-27-2013 |
20130197846 | THICKNESS MEASUREMENT APPARATUS AND METHOD THEREOF - A thickness measurement apparatus and method thereof being possible to measure an object to be inspected with required sensitivity stability and accuracy is provided. | 08-01-2013 |
20130211765 | METHOD FOR MEASURING THICKNESS OF FILM ON WAFER EDGE - A method for measuring a film thickness of a film on an edge of a wafer, comprising: off-line detecting a film at a detection point on the wafer by a four-point probe method to obtain a real film thickness of the film at the detection point, and detecting a distance from the detection point to a center of the wafer using a length measurement, in which the detection point is located between the center of the wafer and a edge point of the wafer; detecting the film at the detection point using an eddy current transducer to obtain a detected film thickness of the film at the detection point; determining a film thickness measuring correction factor according to the real film thickness, the detected film thickness at the detection point and the distance from the detection point to the center of the wafer; and measuring the film on an edge of the wafer using the eddy current transducer to obtain a measured film thickness of the film on the edge of the wafer and correcting the measured film thickness of the film on an edge of the wafer according to the film thickness measuring correction factor to obtain a real film thickness of the film on the edge of the wafer. | 08-15-2013 |
20130211766 | Methods for Locating and Sensing the Position, Orientation, and Contour of A Work Object in A Robotic System - Methods and apparatus enable a robotic system to detect and determine the location, orientation, surface contours, and features of an object that are not otherwise accurately known in order to allow the robotic system to accurately place a pulse/echo layer thickness-gauge ultrasonic transducer gauge onto the surface of the object. The robotic system uses one or more distance measurement sensors to determine the position, orientation, local contour, and other features of the surface in relation to the robot. Another method calibrates an inaccurate distance sensor. Yet another method maintains overall system functionality in a system with multiple distance sensors in the event that one or more of the distance sensors fails. The robotic system may also determine when maintenance is required. | 08-15-2013 |
20130231884 | METHOD AND APPARATUS FOR MEASURING HARDENED SURFACE LAYER - A method comprises a calibration curve creation step in which a calibration curve is created on the basis of hardened surface layer depth. A destructive test is performed on one of two samples in pairs, and propagation time of a first peak of a first wave of waveform of a signal outputted with the other in pairs in a non-destructive test is determined, the samples in pairs being prepared such that carburization depth varies gradually from pair to pair. A waveform of a signal outputted with a to-be-inspected piece is obtained. The propagation time of a first peak of a first wave of the waveform of the signal output with the to-be-inspected piece is obtained, and the hardened surface layer depth of the to-be-inspected piece is obtained using the calibration curve, on the basis of the propagation time obtained with the to-be-inspected sample. | 09-05-2013 |
20130289918 | SYSTEM AND METHOD FOR CORRECTING CALIPER MEASUREMENTS OF SHEET PRODUCTS IN SHEET MANUFACTURING OR PROCESSING SYSTEMS - A method includes measuring a caliper of a sheet of material using a caliper sensor having first and second sensor modules. The method also includes adjusting the caliper measurement based on a transverse displacement between a first sensor component in the first sensor module and a second sensor component in the second sensor module to generate a corrected caliper measurement. Adjusting the caliper measurement can include applying a corrector function that adjusts the caliper measurement based on the measured transverse displacement. The corrector function can be identified by repeatedly creating misalignment between the first and second sensor components, measuring a known distance using the caliper sensor, and identifying an error between the measurement of the known distance and the known distance. | 10-31-2013 |
20130325387 | SHAPE SENSING DEVICE-SPECIFIC - A medical instrument, system and method for calibration are provided. The instrument includes a body ( | 12-05-2013 |
20140058694 | THICKNESS CALIBRATION OF AN EMBOSSING DIE - There is disclosed a computer program product for carrying out a method of calibrating a thickness of an embossing die, the embossing die being formed from a plurality of ink layers printed by an apparatus. According to the method, an average thickness of an ink layer printed by the apparatus may be calculated, and a target die thickness may be calculated as a function of the average ink layer thickness. A system for implementing a method of calibrating a thickness of an embossing die and a method of measuring a thickness of an embossing die are also disclosed. | 02-27-2014 |
20140074419 | THREE-DIMENSIONAL MAPPING USING SCANNING ELECTRON MICROSCOPE IMAGES - A method includes irradiating a surface of a sample, which is made-up of multiple types of materials, with a beam of primary electrons. Emitted electrons emitted from the irradiated sample are detected using multiple detectors that are positioned at respective different positions relative to the sample, so as to produce respective detector outputs. Calibration factors are computed to compensate for variations in emitted electron yield among the types of the materials, by identifying, for each material type, one or more horizontal regions on the surface that are made-up of the material type, and computing a calibration factor for the material type based on at least one of the detector outputs at the identified horizontal regions. The calibration factors are applied to the detector outputs. A three-dimensional topographical model of the surface is calculated based on the detector outputs to which the calibration factors are applied. | 03-13-2014 |
20140195187 | COATING THICKNESS MEASURING INSTRUMENT AND METHODS - A coating thickness measuring instrument has a probe for measuring the thickness of a coating applied to a substrate and producing an output relating to the measured thickness; a memory storing calibration data; and a processor arranged to process the output produced by the probe, together with calibration data stored by the memory, and produce a coating thickness measurement. The memory stores at least two sets of calibration data, each set associated with a different surface profile value and a user may select the set of calibration data to be used by the processor according to the surface profile of the substrate on which a measurement is to be made. This enables a user to make coating thickness measurements on substrates with at least two different, known, surface profiles without having to calibrate the instrument specifically for those surfaces. | 07-10-2014 |
20150051862 | METHOD AND APPARATUS FOR INSPECTING WORKPIECES - Methods are described for measuring series of nominally identical production workpieces on a dimensional measuring apparatus such as a coordinate measuring machine. One master workpiece of the series is calibrated, to provide correction values which are used to build an error map of the measuring apparatus. This map is used to correct measurements not only of subsequent nominally identical workpieces of the same series, but also of multiple different subsequent series of different workpieces. Each subsequent series also has a master workpiece which is calibrated and used to further build the error map. As this process is repeated over time, the error map becomes more and more densely populated. In due course, it becomes possible to dispense with the use of a calibrated master workpiece, because measurements can be corrected using error values which already exist in the error map. | 02-19-2015 |
20150088448 | CALIBRATION METHOD AND DISTANCE MEASUREMENT DEVICE THEREOF BASED ON PHASE MEASUREMENT OF DOUBLE-WAVELENGTH LASER TUBE - The invention is applicable to the field of phase type photoelectric distance measurement and provides a calibration method based on phase measurement of a double-wavelength laser tube and a distance measurement device of the double-wavelength laser tube. The method comprises the following steps of: 1, forming an external optical path; 2, forming an internal optical path; and 3, sequentially switching a first light-wave and a second light-wave of light-wave transmitting devices ( | 03-26-2015 |
20150120232 | SHAPE CALCULATION APPARATUS AND METHOD, MEASUREMENT APPARATUS, METHOD OF MANUFACTURING ARTICLE, STORAGE MEDIUM - A shape calculation apparatus obtains measurement data of a first shape of a first partial region on a surface to be measured, and obtains measurement data of a second shape of a second partial region partially overlapping the first partial region on the surface to be measured. The apparatus determines a first shape correction parameter and a second correction parameter so that the value of an evaluation function for evaluating shape data obtained by correcting the measurement data of the first and second shapes by the first shape correction parameter and the second correction parameter falls within a tolerance range. The apparatus generates shape data of an entire region including the first and second partial regions by respectively correcting the measurement data of the first and second shapes using the first shape correction parameter and the second correction parameter, and combining the corrected shape data. | 04-30-2015 |
20150127286 | Wearable Device Assembly Having Athletic Functionality - A wearable device has a carrier having an aperture. A device has a USB connection and a protrusion wherein the protrusion is received in the aperture to connect the device to a wristband. The device is a USB type device having athletic functionality. The device may further be configured to receive calibration data such that a measured distance may be converted to a known distance based on athletic activity performed by a user. | 05-07-2015 |
20160102975 | METHODS FOR IMPROVING THE ACCURACY OF DIMENSIONING-SYSTEM MEASUREMENTS - Methods to improve the accuracy of non-contact measurements of an object's dimensions using a dimensioning system are disclosed. The methods include a method for creating a mathematical model (i.e., error model) based on an observed correlation between errors in an estimated dimension and the characteristics of the measurement used to obtain the estimated dimension. These error models may be created for various dimensions and stored for future use. The methods also include a method for using the stored error models to reduce the error associated with a particular dimensioning-system measurement. Here an error model is used to create an estimated error. The estimated error is then removed from the estimate of the dimension to produce a final estimate of the dimension that is more accurate. | 04-14-2016 |
20160113634 | Phantom for Measuring Thickness of Thin Layer Using Ultrasonic Imaging Device and Method of Using Thereof - A phantom for measuring thickness of a thin layer and a method of using thereof. The phantom may include a non-scattering muscle mimicking material having a flat top surface; a plurality of soft tissue mimicking thin layers placed in a first area, which is at least a part of a top surface of the non-scattering muscle mimicking material, and having thicknesses different from each other; and an anechoic blood mimicking liquid material placed in an area other than the first area among an entire area of the top surface of the non-scattering muscle mimicking material and on a top surface of the plurality of soft tissue mimicking thin layers. | 04-28-2016 |
20160161602 | SENSOR CALIBRATION FOR AUTONOMOUS VEHICLES - Systems and methods for calibrating sensors for an autonomous vehicle are disclosed. A calibration guide disposed on the vehicle can indicate to a user the correct location for a calibration object to be placed for a calibration procedure. In one implementation, a laser guide can project an image indicating the correct location and orientation for the calibration object. In another implementation, an extendible arm disposed on the vehicle can suspend the calibration object at the correct location and orientation. In another implementation, an autonomous robot carrying the calibration object can autonomously bring the calibration object to the correct location. The calibration guide can be unobtrusively stored within the vehicle when not in use. | 06-09-2016 |
20160252343 | METHOD FOR THICKNESS MEASUREMENT ON MEASUREMENT OBJECTS AND DEVICE FOR APPLYING THE METHOD | 09-01-2016 |