Class / Patent application number | Description | Number of patent applications / Date published |
850019000 | CALIBRATION ASPECT, E.G., CALIBRATION OF PROBES | 8 |
20100115672 | SCANNING PROBE EPITAXY - A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip. | 05-06-2010 |
20100192266 | SYSTEM AND METHOD FOR IMPROVING THE PRECISION OF NANOSCALE FORCE AND DISPLACEMENT MEASUREMENTS - A self-calibrating apparatus comprises a primary device and a test structure fabricated on an integrated circuit chip. The primary device and the test structure have at least one unknown property due to a fabrication process of the integrated circuit chip. An electrical measurand sensor is configured to measure an electrical measurand of the test structure. A controller coupled to the primary device and electrical measurand sensor. The controller is configured to calculate the at least one unknown property of the test structure based on the measured electrical measurand and use the calculated at least one unknown property to calibrate the primary device. | 07-29-2010 |
20100223697 | Systems for assessing and enhancing the performance of scanning probe microscopes by quantifying and enforcing symmetries and periodicities in two dimensions - Scanning probe microscope (SPM) images are enhanced by enforcing one or more symmetries that can be selected based on suitable Fourier coefficient amplitude or phase angle residuals, and/or geometric Akaike information criteria, and/or cross correlation techniques. Alternatively, this selection can be based on prior knowledge of specimen characteristics. In addition, a scanning microscope point spread function is obtained based on the evaluation of a calibration image by enforcing at least one symmetry and can be applied to other image acquisitions. | 09-02-2010 |
20110185458 | FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE - Force, pressure, or stiffness measurement or calibration can be provided, such as by using a graphene or other sheet membrane, which can provide a specified number of monolayers suspended over a substantially circular well. In an example, the apparatus can include a substrate, including a substantially circular well. A deformable sheet membrane can be suspended over the well. The membrane can be configured to include a specified integer number of one or more monolayers. A storage medium can comprise accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure. | 07-28-2011 |
20120317684 | USING OPTICAL DEFLECTION OF CANTILEVERS FOR ALIGNMENT - A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference. | 12-13-2012 |
20150293145 | CALIBRATION OF A MECHANICAL PROPERTY OF SPM CANTILEVERS - A method is presented for calibrating a cantilever, such as a scanning probe microscope cantilever (SPM cantilever). The cantilever to be calibrated comprises at least a first and a second layer having a mutually different thermal expansion coefficient, the method comprising the steps of: controllably causing a temperature distribution along the cantilever, measuring a spatial state of the cantilever, computing a mechanical property from the observed spatial state caused by controllably changing the temperature. Also a calibration arrangement and a scanning probe microscope provided with the calibration arrangement are presented. | 10-15-2015 |
20160025772 | ATOMIC FORCE MICROSCOPY OF SCANNING AND IMAGE PROCESSING - Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output. | 01-28-2016 |
20100115672 | SCANNING PROBE EPITAXY - A dual tip probe for scanning probe epitaxy and a method of forming the dual tip probe are disclosed. The dual tip probe includes first and second tips disposed on a cantilever arm. The first and second tips can be a reader tip and a synthesis tip, respectively. The first tip can remain in contact with a substrate during writing and provide in situ characterization of the substrate and or structures written, while the second tip can perform in non-contact mode to write and synthesis nanostructures. This feature can allow the dual tip probe to detect errors in a printed pattern using the first tip and correct the errors using the second tip. | 05-06-2010 |
20100192266 | SYSTEM AND METHOD FOR IMPROVING THE PRECISION OF NANOSCALE FORCE AND DISPLACEMENT MEASUREMENTS - A self-calibrating apparatus comprises a primary device and a test structure fabricated on an integrated circuit chip. The primary device and the test structure have at least one unknown property due to a fabrication process of the integrated circuit chip. An electrical measurand sensor is configured to measure an electrical measurand of the test structure. A controller coupled to the primary device and electrical measurand sensor. The controller is configured to calculate the at least one unknown property of the test structure based on the measured electrical measurand and use the calculated at least one unknown property to calibrate the primary device. | 07-29-2010 |
20100223697 | Systems for assessing and enhancing the performance of scanning probe microscopes by quantifying and enforcing symmetries and periodicities in two dimensions - Scanning probe microscope (SPM) images are enhanced by enforcing one or more symmetries that can be selected based on suitable Fourier coefficient amplitude or phase angle residuals, and/or geometric Akaike information criteria, and/or cross correlation techniques. Alternatively, this selection can be based on prior knowledge of specimen characteristics. In addition, a scanning microscope point spread function is obtained based on the evaluation of a calibration image by enforcing at least one symmetry and can be applied to other image acquisitions. | 09-02-2010 |
20110185458 | FORCE, PRESSURE, OR STIFFNESS MEASUREMENT OR CALIBRATION USING GRAPHENE OR OTHER SHEET MEMBRANE - Force, pressure, or stiffness measurement or calibration can be provided, such as by using a graphene or other sheet membrane, which can provide a specified number of monolayers suspended over a substantially circular well. In an example, the apparatus can include a substrate, including a substantially circular well. A deformable sheet membrane can be suspended over the well. The membrane can be configured to include a specified integer number of one or more monolayers. A storage medium can comprise accompanying information about the suspended membrane or the substrate that, with a deflection displacement response of the suspended membrane to an applied force or pressure, provides a measurement of the applied force or pressure. | 07-28-2011 |
20120317684 | USING OPTICAL DEFLECTION OF CANTILEVERS FOR ALIGNMENT - A calibration leveling system and method are provided which improve printing and imaging at the nanoscale including improved tip-based deposition and nanolithography. The system can include a scanning probe instrument having a video camera with an adjustable lens. The scanner can be coupled to a one or two dimensional array of cantilevers comprising cantilever tips for imaging or printing. The scanning probe instrument has one or more motors for controlling the scanner in the z-axis. The z-axis motors position the scanner so that the cantilever tips are in a level orientation relative to the surface of a substrate. Once the cantilever tips are level with the substrate, the positions of the z-axis motors can be recorded for future reference. | 12-13-2012 |
20150293145 | CALIBRATION OF A MECHANICAL PROPERTY OF SPM CANTILEVERS - A method is presented for calibrating a cantilever, such as a scanning probe microscope cantilever (SPM cantilever). The cantilever to be calibrated comprises at least a first and a second layer having a mutually different thermal expansion coefficient, the method comprising the steps of: controllably causing a temperature distribution along the cantilever, measuring a spatial state of the cantilever, computing a mechanical property from the observed spatial state caused by controllably changing the temperature. Also a calibration arrangement and a scanning probe microscope provided with the calibration arrangement are presented. | 10-15-2015 |
20160025772 | ATOMIC FORCE MICROSCOPY OF SCANNING AND IMAGE PROCESSING - Apparatus and associated method that contemplates performing a first atomic force microscope (AFM) scan of a first region of a sample centered at a first position at a first angle to produce a first scan image, the first AFM scan including a first component scan at a first speed and a second component scan at a second speed; performing a second AFM scan of the first region of the sample at a second angle to produce a second scan image, the second AFM scan including performing a third component scan at the first speed and a fourth component scan at the second speed; and correcting a first error in the first scan image based on the second scan image to produce a corrected image output. | 01-28-2016 |
850020000 | Calibration standards and methods of fabrication thereof | 1 |
20140317791 | NANOMETER STANDARD PROTOTYPE AND METHOD FOR MANUFACTURING NANOMETER STANDARD PROTOTYPE - A standard sample ( | 10-23-2014 |
20140317791 | NANOMETER STANDARD PROTOTYPE AND METHOD FOR MANUFACTURING NANOMETER STANDARD PROTOTYPE - A standard sample ( | 10-23-2014 |