Patent application number | Description | Published |
20100263999 | LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH - A radio frequency (RF) micro-electro-mechanical systems (MEMS) switch and high yield manufacturing method. The switch can be fabricated with very high yield despite the high variability of the manufacturing process parameters. The switch is fabricated with monocrystalline material, e.g., silicon, as the moving portion. The switch fabrication process is compatible with CMOS electronics fabricated on Silicon-on-Insulator (SOI) substrates. The switch comprises a movable portion having conductive portion selectively positioned with a bias voltage to conductively bridge a gap in a signal line. | 10-21-2010 |
20110241802 | TUNABLE EVANESCENT-MODE CAVITY FILTER - A tunable filter having an electronically tunable center frequency and dynamic bandwidth control over a large tuning range. High-Q continuously tunable evanescent-mode cavity resonators and filters using reliable RF MEMS actuators. One embodiment is a 3.4-6.2 GHz (1.8:1 tuning ratio) continuously tunable electrostatic MEMS resonator with quality factor of 460-530, with a volume of 18×30×4 mm including the actuation scheme and biasing lines. A tunable resonators is also disclosed with a 2.8:1 (5.0-1.9 GHz) tuning ratio, and Q of 300-650. | 10-06-2011 |
20120318650 | LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH - A radio frequency (RF) micro-electro-mechanical systems (MEMS) switch and high yield manufacturing method. The switch can be fabricated with very high yield despite the high variability of the manufacturing process parameters. The switch is fabricated with monocrystalline material, e.g., silicon, as the moving portion. The switch fabrication process is compatible with CMOS electronics fabricated on Silicon-on-Insulator (SOI) substrates. The switch comprises a movable portion having conductive portion selectively positioned with a bias voltage to conductively bridge a gap in a signal line. | 12-20-2012 |
20130202012 | Highly-Reliable Micro-Electromechanical System Temperature Sensor - A micro-electromechanical system-type (MEMS) sensor arrangement for wirelessly measuring temperatures is disclosed. The MEMS sensor arrangement includes a multimorph sensor, a sensor coil coupled to the multimorph sensor, and a readout coil configured to be magnetically coupled to the sensor coil to i) energize the sensor coil, and ii) provide a readout of the natural frequency of the multimorph sensor, the sensor coil and the readout coil. | 08-08-2013 |
20130335173 | TUNABLE CAVITY RESONATOR - A tunable cavity resonator includes a housing, a post, and a controllably variable capacitive coupling. The housing defines an interior and has at least one side wall, a first end, and a second end. The post is located within the interior and extends from the first end to the second end. The post and the housing define a resonating cavity. The controllably variable capacitive coupling is disposed in the housing. | 12-19-2013 |
20140202837 | LOW-COST PROCESS-INDEPENDENT RF MEMS SWITCH - A MEMS switch includes a semiconductor substrate, a movable cantilever and a cantilever anchor. The semiconductor substrate includes a device layer and a handle. The movable cantilever is formed in the semiconductor substrate, and is disposed over a void in the handle. The cantilever anchor is formed in the semiconductor substrate and defines a side wall of the void. A metal portion is formed on at least a portion of the movable cantilever. A metal contact is formed proximate an end of the movable cantilever. A biasing metal contact is formed adjacent the cantilever. The biasing metal contact is electrically disconnected from the metal contact. | 07-24-2014 |
20140203896 | Tunable Cavity Resonator Including A Plurality of MEMS Beams - A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator. | 07-24-2014 |
20140204976 | Highly-Reliable Micro-Electromechanical System Temperature Sensor - A sensor arrangement for wirelessly measuring temperature and vibration is disclosed. The sensor arrangement includes a sensor element and a sensor coil affixed on the device. A readout coil is configured to be magnetically coupled to the sensor coil configured to energize the sensor coil with an energizing signal, configured to provide the natural frequency of the sensor element, the sensor coil, and the readout coil, and configured to provide amplitude modulations of the energizing signal, the amplitude modulations being induced by changes in the coupling factor of the readout coil and the sensor coil. An energizing circuit is configured to energize the readout coil with the energizing signal. A readout circuit is configured to store or display information regarding the natural frequency and the amplitude modulations. | 07-24-2014 |
20140353920 | Wireless Sensor for Rotating Elements - A system for measuring a physical characteristic of mechanical face seal includes a permanent magnet and a magnetic sensor. The permanent magnet is affixed to a structure proximate to a bearing surface of the mechanical face seal. The permanent magnet has a magnetic field that decreases as a function of temperature. The magnetic sensor is mounted on the mechanical face seal in a magnetic field sensing relationship with the permanent magnet. The magnetic sensor is configured to generate a voltage signal corresponding to a sensed magnetic field. | 12-04-2014 |
20140355644 | Wireless Sensor for Rotating Elements - A system for measuring a physical characteristic of a bearing includes a permanent magnet and a magnetic sensor. The permanent magnetic is coupled to at least a portion of a bearing, and has a magnetic field that changes as a function of the physical characteristic. For example, the permanent magnet has a magnetic characteristic that changes as a function of temperature. The magnetic sensor is operably disposed in a magnetic field sensing relationship with the permanent magnet, and is configured to generate a voltage signal and/or current signal corresponding to a sensed magnetic field. | 12-04-2014 |