Furusho, JP
Akihisa Furusho, Tajimi-Shi JP
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20150377583 | RECOIL REDUCER WHEN SHOOTING BULLET FROM FIREARM - The present invention provides a recoil reducer that reduces the recoil when the bullet is shot from the firearm and the bolt in the machine part is moved backward. By reducing the reaction force applied to the bolt when the bullet is shot, a load applied to the shooter is reduced. Furthermore, hit accuracy is improved by stabilizing the sight, the performance of the firearm itself is not decreased. The recoil when the bullet is shot is reduced by providing a member moving in an opposite direction of a recoil direction of a bolt and providing a transmission mechanism that moves the member in the opposite direction of the recoil direction of the bolt when the bolt is moved in the recoil direction by a reaction force of shooting a bullet. | 12-31-2015 |
Hidetaka Furusho, Miyagi-Ken JP
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20090021354 | INPUT DEVICE - There are provided an input means | 01-22-2009 |
Hiroshi Furusho, Minakami-Machi Gunma JP
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20140093345 | CRAWLER-TYPE TRAVELING VEHICLE - A travel control section | 04-03-2014 |
Hitoshi Furusho, Funabashi-Shi JP
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20100019229 | Thiophene compound having phosphoric ester and process for producing the same - A thiophene compound having a phosphate group, for example, one represented by the formula [1]. The compound has high resistance to heat and oxidation and can be improved in solubility or dispersibility in various solvents. | 01-28-2010 |
20120318662 | METHOD FOR FORMING BOND BETWEEN DIFFERENT ELEMENTS - The present invention provides a doping technique that forms a stable amorphous silicon film and a stable polycrystalline silicon film at a low temperature and simultaneously that imparts conductivity in an atmospheric pressure environment. A method for producing a compound containing a bond between different elements belonging to Group 4 to Group 15 of the periodic table, the method included: applying, at a low frequency and atmospheric pressure, high voltage to an inside of an electric discharge tube obtained by attaching high-voltage electrodes to a metal tube or an insulator tube or between flat plate electrodes while passing an introduction gas, so as to convert molecules present in the electric discharge tube or between the flat plate electrodes into a plasma; and applying the plasma to substances to be irradiated, the substances to be irradiated being two or more elementary substances or compounds. | 12-20-2012 |
20130141719 | METAL PARTICLES FOR SURFACE-ENHANCED RAMAN SCATTERING AND MOLECULAR SENSING - There is provided a high-sensitive Raman scattering sensing by regulating in metal nanoparticles for enhanced Raman scattering, particularly the strength of the enhanced electric field by controlling the distance between the particles to impart very strong Raman scattering properties. A metal nanoparticle material for molecular sensing, the metal nanoparticle material comprising: a metal nanoparticle aggregate including three to ten metal nanoparticles connected to each other through an organic molecule so that adjacent metal nanoparticles are bonded and spaced apart a predetermined distance, the aggregate containing a Raman active molecule within a field applied to the aggregate, wherein the metal nanoparticle material emits enhanced Raman scattering light from the Raman active molecule in an enhanced electric field; a method for producing the metal nanoparticle material for molecular sensing; and a molecular sensing by use of the metal nanoparticle material for molecular sensing. | 06-06-2013 |
20130224396 | PLASMA ANNEALING METHOD AND DEVICE FOR THE SAME - There is provided a plasma annealing device that can change the crystal structure of a film by processing the film (coating) on a substrate and that has excellent productivity. A method for producing a film includes step (A) irradiating a film on a substrate with atmospheric pressure plasma, wherein the crystal structure of a constituent of the film is changed. The step (A) may include generating plasma under atmospheric pressure by energization at a frequency of 10 hertz to 100 megahertz and a voltage of 60 volts to 1,000,000 volts, and directly irradiating the film on the substrate with the generated plasma. A method for changing a crystal structure of a constituent of a film includes step (A). A plasma generation device used in step (A). An electronic device produced through step (A). | 08-29-2013 |
Hitoshi Furusho, Chiba JP
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20090030176 | Aminoquinoxaline Compound, Polyaminoquinoxaline Compound, and Use Thereof - An aminoquinoxaline compound represented by the following formula (1a), and a polyaminoquinoxaline compound obtained by polymerizing the aminoquinoxaline compound, | 01-29-2009 |
20090127491 | THIOPHENE COMPOUND HAVING SULFONYL GROUP AND PROCESS FOR PRODUCING THE SAME - A thiophene compound having sulfonyl groups which is represented by the formula [1]. It has high heat resistance and high unsusceptibility to oxidation and can improve solubility and dispersibility in various solvents. | 05-21-2009 |
20090154059 | COMPOSITION COMPRISING A CONDUCTIVE POLYMER IN COLLOIDAL FORM AND CARBON - The present invention relates to compositions capable of forming a coating and comprising a mixture of a conductive polymer in colloidal form and carbon, methods for their manufacture and use for high-capacity electrical double layer capacitors to be utilized in various electronic apparatuses, power supplies and the like. | 06-18-2009 |
Hitoshi Furusho, Funabashi JP
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20150252152 | METHOD FOR FORMING BOND BETWEEN DIFFERENT ELEMENTS - Described is a doping technique that forms a stable amorphous silicon film and a stable polycrystalline silicon film at a low temperature and simultaneously that imparts conductivity in an atmospheric pressure environment. A method for producing a compound containing a bond between different elements belonging to Group 4 to Group 15 of the periodic table, the method including: applying, at a low frequency and atmospheric pressure, high voltage to an inside of an electric discharge tube obtained by attaching high-voltage electrodes to a metal tube or an insulator tube or between flat plate electrodes while passing an introduction gas, so as to convert molecules present in the electric discharge tube or between the flat plate electrodes into a plasma; and applying the plasma to substances to be irradiated, the substances to be irradiated being two or more elementary substances or compounds. | 09-10-2015 |
Kazuhiro Furusho, Sakai-Shi JP
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20130011290 | ROTARY COMPRESSOR - A rotary compressor includes a cylinder having an annular cylinder space, a piston eccentrically disposed relative to the cylinder, and a drive shaft ( | 01-10-2013 |
20140311177 | REFRIGERATION APPARATUS - A refrigeration apparatus includes a multistage compression mechanism, switching mechanisms, intercoolers, oil separators, and a control unit. The multistage compression mechanism has one high-stage-side compression mechanism and a plurality of low-stage-side compression mechanisms connected in series. The switching mechanisms are connected to blow-out pipes of the low-stage-side compression mechanisms. The switching mechanisms switch between cooling and heating operation cycles. The intercoolers cool refrigerant blown out from the low-stage-side compression mechanisms during the cooling cycle. The oil separators are disposed between the switching mechanisms and the intercoolers. The oil separators separate lubricating oil from refrigerant blown out from the low-stage-side compression mechanisms during the cooling cycle. The control unit controls the multi-stage compression mechanism and the switching mechanisms. Refrigerant from the low-stage-side compression mechanisms passes through the oil separators and intercoolers during the cooling cycle, not during the heating cycle. | 10-23-2014 |
20150052927 | REFRIGERATION APPARATUS - A refrigeration apparatus includes a multistage compression mechanism, a heat-source-side main heat exchanger, at least one heat-source-side sub heat exchanger, a usage-side heat exchanger, a switching mechanism, an expansion mechanism and a refrigerant piping group. The refrigerant piping group connects the multistage compression mechanism, the switching mechanism, the heat-source-side main heat exchanger, the heat-source-side sub heat exchanger, the expansion mechanism and the usage-side heat exchanger so that during the heating operation, the heat-source-side main heat exchanger and the heat-source-side sub heat exchanger are connected in series. | 02-26-2015 |
Kazuki Furusho, Himeji-Shi JP
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20150255820 | HALF CELL FOR SOLID OXIDE FUEL CELL, AND SOLID OXIDE FUEL CELL - A SOFC half cell of the present invention includes: an anode functional layer ( | 09-10-2015 |
Keitaro Furusho, Fukaya-Shi JP
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20140036197 | Liquid Crystal Module and Liquid Crystal Display Device - A liquid crystal module includes a liquid crystal cell, support members, a chassis, and joining members. The liquid crystal cell is substantially rectangular in external form. The support members are provided for at least three of four sides of an outer peripheral edge portion of a rear surface of the liquid crystal cell. Each support member extends from near one end portion of the corresponding side to near the other end portion. The support members are bonded or adhered to the outer peripheral portion. The chassis includes a bottom portion and walls. The bottom portion is substantially rectangular in external form. The walls surround the bottom portion. Each joining member is joined to the corresponding support member. Each joining member is joined to the corresponding wall of the chassis from near one end portion of the corresponding wall in its longitudinal direction to near the other end portion. | 02-06-2014 |
Kenji Furusho, Ooita JP
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20140055761 | LIQUID IMMERSION EXPOSURE APPARATUS - Provided is a liquid immersion exposure apparatus which is configured to include a table, a plate, an illumination unit, an exposure position movement unit, and relative position change units. A substrate is mounted on the table. An opening portion surrounding a circumferential edge portion of the substrate mounted on the table is installed in the plate. The illumination unit forms a liquid immersion area filled with liquid immersion water at an exposure position of the substrate mounted on the table, and the illumination unit illuminates an exposure light beam on the exposure position through the liquid immersion area. The exposure position movement unit moves the exposure position. The relative position change units change a relative position between the table and the plate. | 02-27-2014 |
Kenji Furusho, Oita JP
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20110189438 | TEMPLATE, METHOD OF MANUFACTURING TEMPLATE, AND PATTERN FORMING METHOD - According to one embodiment, first convex patterns and second convex patterns are provided in a mesa region of a template. The second convex patterns are provided spaced apart from the first convex patterns to have the height of bases equal to that of the first convex patterns. The height of the second convex patterns is different from that of the first convex patterns. | 08-04-2011 |
Kenji Furusho, Oita-Ken JP
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20110290759 | PATTERN FORMATION METHOD - A pattern is formed by: forming a first imprint mask layer on a processed member; forming a first imprint pattern of the first imprint mask layer using a first template; forming a second imprint mask layer made of a material having a different etching rate from the first imprint mask layer on the first imprint pattern; forming a second imprint pattern of the second imprint mask layer using a second template different from the first template; and etching the processed member using as a mask the second imprint mask layer on which the second imprint pattern is formed and the first imprint mask layer on which the first imprint pattern is formed. | 12-01-2011 |
Kentaro Furusho, Kanagawa JP
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20150233091 | SHOVEL AND SWIVELING SPEED REDUCER - Provided is a shovel including a swiveling motor, and a swiveling speed reducer that reduces the rotational speed of an output shaft of the swiveling motor. The swiveling speed reducer includes a first gear mechanism; a first gear case that houses the first gear mechanism; a first oil check pipe that is disposed in the first gear case; a first communication portion that allows an inside of the first gear case and the first oil check pipe to communicate with each other; and a second communication portion that connects a position of the first gear case higher than a position where the first communication portion is connected, and a high position of the first oil check pipe. | 08-20-2015 |
20150276044 | SHOVEL - A shovel includes: a speed reducer configured by stacking a plurality of gear speed reducers each having a sun gear, a planetary gear, an internal gear, and a carrier member supporting the planetary gear provided in a case, in a direction of an axis of rotation of an upper turning body; and a movement restriction section which is provided between the sun gear of one gear speed reducer among the gear speed reducers stacked in a plurality and another gear speed reducer stacked so as to face the sun gear and restricts movement of the sun gear of the one gear speed reducer toward the other gear speed reducer, wherein the movement restriction section is provided at the case. | 10-01-2015 |
Masaru Furusho, Osaka-Shi JP
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20120231615 | SEMICONDUCTOR THIN-FILM MANUFACTURING METHOD, SEMICONDUCTOR THIN-FILM MANUFACTURING APPARATUS, SUSCEPTOR, AND SUSCEPTOR HOLDER - Substrates are mounted on a plurality of susceptors respectively. The plurality of susceptors on which respective substrates are mounted are placed on a rotational mechanism so that the susceptors are vertically spaced at a predetermined interval. The rotational mechanism on which the plurality of susceptors are placed is rotated. The plurality of susceptors on which the substrates are mounted respectively are heated. Semiconductor thin-films are deposited by supplying a source gas to each of the susceptors that are heated while being rotated, the source gas having been heated while passing through gas flow paths of respective path lengths substantially equal to each other. | 09-13-2012 |
Rikia Furusho, Kanagawa JP
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20150344749 | THERMALLY-CONDUCTIVE, ELECTRICALLY-CONDUCTIVE ADHESIVE COMPOSITION - The invention relates to a thermally conductive, electrically conductive adhesive composition including: | 12-03-2015 |
Rikia Furusho, Hiratsuka-Shi JP
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20140311779 | PHOTOCURABLE ELECTROCONDUCTIVE INK COMPOSITION - Disclosed is a photocurable electroconductive ink composition including: (A) an oligomer of urethane acrylates, (B) three types of acrylates composed of either tetrafunctional acrylates or trifunctional acrylates, difunctional acrylates and monofunctional acrylates, (C) an electroconductive filler, (D) two or more types of photopolymerization initiators and (E) a polymeric dispersing agent, wherein the amount of the electroconductive filler (C) to be mixed is from 77 to 85% by mass based on the total mass of the photocurable electroconductive ink composition, and 80% by mass or more of the electroconductive filler (C) is a scaly, foil-like or flakey silver powder having a particle size corresponding to a particle size distribution at 50% of more than 5 μm. | 10-23-2014 |
Shinichi Furusho, Kumamoto-Shi JP
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20100225427 | ELECTROMAGNETIC RELAY AND METHOD OF MAKING THE SAME - A electromagnetic relay in which bad electrical contact and failure of operation are prevented even when shavings are produced while an iron core is press-fitted into and mounted on a base. The electromagnetic relay includes an electromagnetic block supported by press-fitting both ends of an iron core of the electromagnetic block into an upper surface of a base and open or close a contact by a movable iron piece rotated by magnetization or demagnetization of the iron core with a coil, where shaving receptacles are made by forming separating ribs adjacent to at least one side of press-fit projections that are formed in press-fit concave portions provided on the upper surface of the base. | 09-09-2010 |
20100225428 | ELECTROMAGNETIC RELAY - An electromagnetic relay having a high positioning accuracy of a movable iron piece and little variation in operating characteristics. A pair of upper and lower rotating shaft convex portions are provided at one end of a movable iron piece along the same shaft center. The pair of upper and lower rotating shaft convex portions are rotatably supported by a base and a spool of an electromagnetic block mounted on the base respectively. A movable contact piece is driven by the movable iron piece rotated by magnetization or demagnetization of the electromagnetic block to open or close a contact. One end of the spool has a shaft hole in which the upper rotating shaft convex portion of the movable iron piece is inserted. | 09-09-2010 |
20140055223 | ELECTROMAGNET DEVICE, METHOD OF ASSEMBLING THE SAME, AND ELECTROMAGNETIC RELAY USING THE SAME - The present invention provides an electromagnet device which can obtain a desirable attraction force (retention force) between an iron core and a movable iron piece, a method of assembling the electromagnet device and an electromagnetic relay using the electromagnet device, the electromagnet device including an electromagnet block having the iron core being wound by a coil and an auxiliary yoke fixed to one end portion of the iron core, a yoke connected to the one end portion of the iron core via a permanent magnet, the movable iron piece pivotably supported on a pivoting shaft center (serving as a fulcrum) located in an end face edge portion of the yoke so that the movable iron piece pivots on a basis of magnetization and demagnetization of the electromagnet block, where the permanent magnet is located on an extension line of an axial center of the iron core and is interposed between the auxiliary yoke and the yoke. | 02-27-2014 |
Shinichi Furusho, Kyoto JP
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20090267715 | ELECTROMAGNETIC RELAY - An electromagnetic relay capable of smoothly rotating a movable iron member by eliminating the effect of foreign matters produced on the contact surface of the movable iron piece on a core even if the drive voltage of an electromagnetic block is small. The attracting surface ( | 10-29-2009 |
Shinichi Furusho, Kumamoto JP
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20140055220 | ELECTROMAGNET DEVICE - The present invention provides an electromagnet device including a horizontal portion of a yoke arranged near one end portion of an iron core, a movable iron piece which pivotably supported on a leading end edge portion of a vertical portion of the yoke which serves as a fulcrum, an end portion of the movable iron piece adapted to be attracted to a magnetic pole portion by a main magnetic circuit, the magnetic pole portion is arranged in the other end portion of the iron core. The main magnetic circuit is formed by applying a voltage to a coil wound around a periphery of the iron core and an auxiliary magnetic circuit formed in parallel with the main magnetic circuit, the auxiliary circuit including a permanent magnet is arranged near the one end portion of the iron core and a magnetic resistance portion, in which a magnetic flux of the permanent magnet is magnetically saturated. | 02-27-2014 |
Takashi Furusho, Saitama JP
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20110214135 | DATA PROCESSING DEVICE - There is provided a data processing device able to surely eject a recording medium out of a main body of the device even when the recording medium is received in a case while a locking member having adherence and elasticity of the case is locked with a center hole of the recording medium. | 09-01-2011 |
Takeshi Furusho, Tokyo JP
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20110047396 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD AND PROGRAM - An information processing apparatus including (a) a storage section storing AC adapter capacity identification, (b) a first section for outputting the AC adapter capacity information, (c) a setting section for setting threshold values used to control power consumption of the apparatus, (d) a detection section for detecting the power consumption of the apparatus, and (e) a control section for controlling power consumption based on whether the power consumption exceeds one of the thresholds. | 02-24-2011 |
20110307732 | INFORMATION PROCESSING APPARATUS AND POWER SUPPLY CONTROL METHOD - There is provided an apparatus including an information processing apparatus including an internal system which consumes electric power, an AC adaptor identification unit which identifies a rating of an AC adaptor connected, and a battery charge control unit which controls charge of a battery storing electric power, the electric power being used for operation of the internal system, where the AC adaptor identification unit identifies a rating of the AC adaptor connected and switches a power supply path to the battery charge control unit and/or the internal system into a proper state according to the identification results. | 12-15-2011 |
Tomoaki Furusho, Tokyo JP
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20130099253 | EPITAXIAL WAFER AND SEMICONDUCTOR DEVICE - A semiconductor device that can suppress deterioration in crystal quality caused by a lattice mismatch between a substrate and an epitaxial layer and that also can ensure a voltage sustaining performance, and a wafer for forming the semiconductor device. An epitaxial wafer of silicon carbide (SiC), which is used for manufacturing a semiconductor device, includes a low resistance substrate and an epitaxial layer provided thereon. The epitaxial layer is doped with the same dopant as a dopant doped into the substrate, and has a laminated structure including a low concentration layer and an ultrathin high concentration layer. A doping concentration in the low concentration layer is lower than that in the silicon carbide substrate. A doping concentration in the ultrathin high concentration layer is equal to that in the silicon carbide substrate. | 04-25-2013 |
20130126906 | SILICON CARBIDE EPITAXIAL WAFER AND MANUFACTURING METHOD THEREFOR, SILICON CARBIDE BULK SUBSTRATE FOR EPITAXIAL GROWTH AND MANUFACTURING METHOD THEREFOR AND HEAT TREATMENT APPARATUS - A method is provided in order to manufacture a silicon carbide epitaxial wafer whose surface flatness is very good and has a very low density of carrot defects and triangular defects arising after epitaxial growth. The silicon carbide epitaxial wafer is manufactured by a first step of annealing a silicon carbide bulk substrate that is tilted less than 5 degrees from <0001> face, in a reducing gas atmosphere at a first temperature T | 05-23-2013 |
Tomonobu Furusho, Hiratsuka-Shi JP
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20130344225 | COFFEE EXTRACT - The present invention pertains to a coffee extract rich in variety and in which the features of coffee are enhanced. A roasted product prepared by following a step for mixing and roasting coffee beans with at least one material selected from among oolong tea, pu'erh tea, red tea, roses, jasmine, hops, hibiscus, lemon grass, the berries of Japanese pepper, rosemary, vanilla, sugar beets, Kombu, Azuki beans, kidney beans, peas, soy beans, almonds, cashew nuts, chestnuts, pumpkin seeds, sweet chestnuts, walnuts, sesame, sunflower seeds, hazel nuts, pecan nuts, macadamia nuts, pine nuts, peanuts, rice, barley, malt, buckwheat grains, Job's tears, mandarin orange peels, orange peels, Kabosu peels, grapefruit peels, Sudachi peels, Yuzu peels, lime peels, lemon peels, blueberries, prunes, cherries, Japanese persimmons, pineapple, bananas, grapes, mangoes, peaches, apples, black peppers, chili peppers, sugar cane, ginger, garlic, onions, carrots, burdock roots, pumpkins, sweet potatoes, potatoes, and corn. | 12-26-2013 |
Toshinobu Furusho, Kumamoto JP
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20140097147 | PROCESSING LIQUID SUPPLY METHOD, PROCESSING LIQUID SUPPLY APPARATUS AND STORAGE MEDIUM - Disclosed are an apparatus and a method for reducing a processing liquid consumed for removing bubbles from a new filter unit, and shortening a start-up time when the filter unit is attached in a processing liquid supply passage. The method includes: filling the processing liquid into a new filter unit, decompressing inside of the filter unit into a first pressure atmosphere in order to remove bubbles from the filter unit, boosting a pressure of the inside of the filter unit, flowing the processing liquid into the filter unit from a primary side of the filter unit, and supplying the processing liquid flowing from the filter unit to an object to be processed through a nozzle thereby performing a liquid processing and quickly removing the bubbles. | 04-10-2014 |
20150092167 | PROCESSING LIQUID SUPPLYING APPARATUS AND PROCESSING LIQUID SUPPLYING METHOD - Disclosed is a processing liquid supplying apparatus. The apparatus includes: a processing liquid supply source configured to supply a processing liquid for processing a substrate to be processed; an ejection unit configured to eject the processing liquid to the substrate to be processed; a filter device configured to remove foreign matters in the processing liquid; a supply pump and an ejection pump which are provided in the supply path at a primary side and a secondary side of the filter device, respectively; and a control unit configured to output a control signal to decompress and degas the processing liquid supplied from the processing liquid supply source by using one of the supply pump and the ejection pump, and subsequently, pass the degassed processing liquid through the filter device beginning from the primary side to the secondary side of the filter device by using the supply pump and the ejection pump. | 04-02-2015 |
20150367266 | PROCESSING LIQUID SUPPLY METHOD, PROCESSING LIQUID SUPPLY APPARATUS AND STORAGE MEDIUM - Disclosed are an apparatus and a method for reducing a processing liquid consumed for removing bubbles from a new filter unit, and shortening a start-up time when the filter unit is attached in a processing liquid supply passage. The method includes: filling the processing liquid into a new filter unit, decompressing inside of the filter unit into a first pressure atmosphere in order to remove bubbles from the filter unit, boosting a pressure of the inside of the filter unit, flowing the processing liquid into the filter unit from a primary side of the filter unit, and supplying the processing liquid flowing from the filter unit to an object to be processed through a nozzle thereby performing a liquid processing and quickly removing the bubbles. | 12-24-2015 |
Toshinobu Furusho, Koshi-Shi JP
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20130068324 | CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING THE SAME, AND COATING AND DEVELOPING SYSTEM INCORPORATING THE SAME APPARATUS - A chemical supply system comprises: a first container and a second container for storing a chemical solution; a first pump, located on a first pipe connecting the first and second containers, for directing the solution stored in the first container to the second container; and a first filter, located in the first pipe, for filtering the solution flowing through the first pipe from the first container toward the second container. The system further includes: a second pipe for connecting the first container and the second container; and a second pump, located on the second pipe, for directing the solution stored in the second container to the first container. | 03-21-2013 |
20140174475 | LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND STORAGE MEDIUM FOR LIQUID PROCESS - A filtration efficiency, which is similar to the filtration efficiency obtained when a plurality of filters are provided, can be obtained by one filter, and decrease in throughput can be prevented. Based on a control signal from a control unit | 06-26-2014 |
20150125793 | PROCESSING LIQUID SUPPLYING APPARATUS AND METHOD OF SUPPLYING PROCESSING LIQUID - A processing liquid supplying apparatus performs an ejecting step in which a processing liquid suctioned into a pump passes through a filter device and is ejected from an ejecting part without returning the processing liquid back to the pump; a returning step in which the processing liquid suctioned into the pump is returned to a processing liquid source side of a mixing section; and a replenishing step in which the processing liquid returned to the processing liquid source side is suctioned into the pump together with the processing liquid replenished from the processing liquid source. The processing liquid passes through the filter device in at least one of the returning step and the replenishing step. The amount of the processing liquid returned to the processing liquid source side in the returning step is larger than the amount of the processing liquid ejected from the ejecting part in the ejecting step. | 05-07-2015 |
20150279702 | CHEMICAL SUPPLY SYSTEM, SUBSTRATE TREATMENT APPARATUS INCORPORATING THE SAME, AND COATING AND DEVELOPING SYSTEM INCORPORATING THE SAME APPARATUS - A chemical supply system comprises: a first container and a second container for storing a chemical solution; a first pump, located on a first pipe connecting the first and second containers, for directing the solution stored in the first container to the second container; and a first filter, located in the first pipe, for filtering the solution flowing through the first pipe from the first container toward the second container. The system further includes: a second pipe for connecting the first container and the second container; and a second pump, located on the second pipe, for directing the solution stored in the second container to the first container. | 10-01-2015 |
Toshinobu Furusho, Koshi City JP
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20120181239 | CHEMICAL LIQUID SUPPLY METHOD AND CHEMICAL LIQUID SUPPLY SYSTEM - There is provided a chemical liquid supply system configured to filter a chemical liquid by opening/closing operations of first and second opening/closing valves and a supply/exhaust operation. The chemical liquid supply system includes a pressure sensor, a flow meter, an electro-pneumatic regulator and a controller. The pressure sensor detects a pressure in the operation room when the first opening/closing valve is opened at a time of starting a replenishment of the chemical liquid into the chemical liquid pump. The flow rate sensor detects an exhaust flow rate exhausted from the operation room. The controller adjusts an exhaust pressure by controlling the electro-pneumatic regulator based on the detected pressure and the detected exhaust flow rate so as not to cause an excessive pressure change when the replenishment of the chemical liquid is started. | 07-19-2012 |
20130112628 | TREATMENT SOLUTION SUPPLY METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AND TREATMENT SOLUTION SUPPLY APPARATUS - A treatment solution supply method of the present invention is for supplying a treatment solution from a treatment solution supply source to a treatment solution supply unit supplying the treatment solution to a substrate, wherein a supply pipe connected to the treatment solution supply unit is provided with a filter collecting foreign matter in the treatment solution and not allowing the foreign matter to be released therefrom, and the treatment solution flowing in the supply pipe is caused to pass through the filter in a reciprocation manner at least one time and then supplied to the treatment solution supply unit, so that the foreign matter in the treatment solution can be sufficiently removed and the collected foreign matter never mixes again into the treatment solution. | 05-09-2013 |
20150090340 | PROCESSING-LIQUID SUPPLY APPARATUS AND PROCESSING-LIQUID SUPPLY METHOD - A processing-liquid supply apparatus includes a source, a discharge device, a supply channel connecting the source and discharge device, a filter device positioned in the channel to form first side having the source and second side having the discharge device, a pump device positioned in the channel, and a control device which controls suction and discharge by the pump device. The control device controls the pump device such that the liquid is discharged from the discharge device, that remaining of the liquid on the second side is suctioned to be returned to the first side and that the remaining of the liquid returned to the first side flows from the first toward second side together with refill of the liquid from the source, and the control device is set such that return amount of the liquid to the filter device is equal to or greater than amount of the discharge. | 04-02-2015 |
Yuko Furusho, Shinagawa-Ku JP
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20130080549 | INFORMATION PROVIDING APPARATUS, INFORMATION PROVIDING METHOD, INFORMATION PROVIDING PROGRAM, AND COMPUTER-READABLE RECORDING MEDIUM HAVING INFORMATION PROVIDING PROGRAM RECORDED THEREIN - The server | 03-28-2013 |
20130132491 | DATABASE MANAGEMENT DEVICE, DATABASE MANAGEMENT METHOD, DATABASE MANAGEMENT PROGRAM AND COMPUTER READABLE STORAGE MEDIUM THAT STORES SAID PROGRAM | 05-23-2013 |