Patent application number | Description | Published |
20130015469 | METHOD FOR MANUFACTURING DIODE, AND DIODE - A semiconductor substrate having a first side and a second side made of single crystal silicon carbide is prepared. A mask layer having a plurality of openings and made of silicon oxide is formed on the second side. The plurality of openings expose a plurality of regions included in the second side, respectively. A plurality of diamond portions are formed by epitaxial growth on the plurality of regions, respectively. The epitaxial growth is stopped before the plurality of diamond portions come into contact with each other. A Schottky electrode is formed on each of the plurality of diamond portions. An ohmic electrode is formed on the first side. | 01-17-2013 |
20130017675 | METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A through portion is formed on a semiconductor substrate. Into the semiconductor substrate, a first ion implantation is performed via the through portion. The through portion is at least partially removed in the thickness direction from a region of at least a portion of the through portion when viewed in a plan view. A second ion implantation is performed into the semiconductor substrate at the region of at least the portion thereof. An implantation energy for the first ion implantation is equal to an implantation energy for the second ion implantation. | 01-17-2013 |
20130032823 | SILICON CARBIDE SEMICONDUCTOR DEVICE - A first layer has a first conductivity type. A second layer is provided on the first layer such that a part of the first layer is exposed, and it has a second conductivity type. First to third impurity regions penetrate the second layer and reach the first layer. Each of the first and second impurity regions has the first conductivity type. | 02-07-2013 |
20130032824 | SILICON CARBIDE SEMICONDUCTOR DEVICE - First, second, fourth, and fifth impurity regions have a first conductivity type, and a third impurity region has a second conductivity type. The first to third impurity regions reach a first layer having the first conductivity type. The fourth and fifth impurity regions are provided on a second layer. First to fifth electrodes are provided on the first to fifth impurity regions, respectively. Electrical connection is established between the first and fifth electrodes, and between the third and fourth electrodes. A sixth electrode is provided on a gate insulating film covering a portion between the fourth and fifth impurity regions. | 02-07-2013 |
20130037824 | POWER SEMICONDUCTOR DEVICE - Cell electrodes are provided respectively for cell structures on a semiconductor substrate. The cell electrodes are divided into groups each including two or more cell electrodes. Conductive members are respectively electrically connected to the groups. The conductive members have a used portion and an unused portion. The used portion has two or more conductive members electrically connected to each other. The unused portion has at least one of the conductive members and is electrically insulated from the used portion. | 02-14-2013 |
20130112993 | SEMICONDUCTOR DEVICE AND WIRING SUBSTRATE - A semiconductor device according to one embodiment of the present invention includes an insulating substrate, a wiring layer formed on a first main surface of the insulating substrate and having a conductive property, and a semiconductor element mounted on the wiring layer. In the semiconductor device, the insulating substrate is composed of cBN or diamond. | 05-09-2013 |
20130140583 | SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - First, third, and fourth regions have a first conductivity type, and a second region has a second conductivity type. The second region is provided with a plurality of through holes exposing the first region. The third region includes a contact portion, a connecting portion, and a filling portion. The contact portion is in contact with a first portion of the second region. The connecting portion extends from the contact portion to each of the plurality of through holes in the second region. The filling portion fills each of the plurality of through holes in the second region. The fourth region, is provided on the first portion of the second region. | 06-06-2013 |
20130207124 | SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - A first region of a silicon carbide layer constitutes a first surface, and is of a first conductivity type. A second region is provided on the first region, and is of a second conductivity type. A third region is provided on the second region, and is of the first conductivity type. A fourth region is provided in the first region, located away from each of the first surface and the second region, and is of the second conductivity type. A gate insulation film is provided on the second region so as to connect the first region with the third region. A gate electrode is provided on the gate insulation film. A first electrode is provided on the first region. A second electrode is provided on the third region. | 08-15-2013 |
20130210208 | METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - A first layer constituting a first surface of a silicon carbide layer and of a first conductivity type is prepared. An internal trench is formed at a face opposite to the first surface of the first layer. Impurities are implanted such that the conductivity type of the first layer is inverted on the sidewall of the internal trench. By the implantation of impurities, there are formed from the first layer an implantation region located on the sidewall of the internal trench and of a second conductivity type, and a non-implantation region of the first conductivity type. A second layer of the first conductivity type is formed, filling the internal trench, and constituting the first region together with the non-implantation region. | 08-15-2013 |
20130214290 | METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE AND SILICON CARBIDE SEMICONDUCTOR DEVICE - A silicon carbide layer having a first surface and a second surface includes a first region constituting the first surface and of a first conductivity type, a second region provided on the first region and of said second conductivity type, and a third region provided on the second region and of the first conductivity type. At the second surface is formed a gate electrode having a bottom and sidewall, passing through the third region and the second region up to the first region. An additional trench is formed, extending from the bottom of the gate trench in the thickness direction. A fourth region of the second conductivity type is formed to fill the additional trench. | 08-22-2013 |
20130264582 | SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A trench having a sidewall is provided on a first face of a silicon carbide substrate of a first conductivity type. A first region of a second conductivity type is provided on the first face. A second region is provided on the first region, and is separated from the silicon carbide substrate by the first region. The second region is of the first conductivity type. A charge compensation region is provided on the sidewall of the trench. The charge compensation region is of the second conductivity type. A gate insulation film is provided on the first face and above the first region. A first main electrode is provided on the first region. A second main electrode is provided on a second face of the silicon carbide substrate. | 10-10-2013 |
20130264583 | POWER SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME - A first region is interposed between a drain electrode and a source electrode in a thickness direction, and has first conductivity type. The first region includes a drift layer and a channel layer. The drift layer faces the drain electrode. The channel layer is provided on the drift layer and faces the source electrode. The drift layer has an impurity concentration higher than that of the channel layer. A second region has second conductivity type different from the first conductivity type. The second region has a charge compensation portion and a gate portion. The drift layer is interposed in the charge compensation portion in an in-plane direction that crosses the thickness direction. The channel layer is interposed in the gate portion in the in-plane direction. | 10-10-2013 |
20130313568 | SILICON CARBIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME - A silicon carbide substrate has a first conductivity type. The silicon carbide substrate has a first surface provided with a first electrode and a second surface provided with first trenches arranged to be spaced from one another. A gate layer covers an inner surface of each of the first trenches. The gate layer has a second conductivity type different from the first conductivity type. A filling portion fills each of the first trenches covered with the gate layer. A second electrode is separated from the gate layer and provided on the second surface of the silicon carbide substrate. A gate electrode is electrically insulated from the silicon carbide substrate and electrically connected to the gate layer. Thereby, a silicon carbide semiconductor device capable of being easily manufactured can be provided. | 11-28-2013 |
20130341645 | SILICON CARBIDE SEMICONDUCTOR DEVICE - A collector layer is made of silicon carbide having a first conductivity type. A switching element is provided on the collector layer. The switching element includes a junction gate for controlling a channel having a second conductivity type different from the first conductivity type. | 12-26-2013 |
20140070233 | SILICON CARBIDE SEMICONDUCTOR DEVICE - A gate insulating film is provided on a trench. The gate insulating film has a trench insulating film and a bottom insulating film. The trench insulating film covers each of a side wall and a bottom portion. The bottom insulating film is provided on the bottom portion with a trench insulating film being interposed therebetween. The bottom insulating film has a carbon atom concentration lower than that of the trench insulating film. The gate electrode is in contact with a portion of the trench insulating film on the side wall. Accordingly, a low threshold voltage and a large breakdown voltage can be attained. | 03-13-2014 |
20140073101 | METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - A trench having a side wall and a bottom portion is formed in a silicon carbide substrate. A trench insulating film is formed to cover the bottom portion and the side wall. A silicon film is formed to fill the trench with the trench insulating film being interposed therebetween. The silicon film is etched so as to leave a portion of the silicon film that is disposed on the bottom portion with the trench insulating film being interposed therebetween. The trench insulating film is removed from the side wall. By oxidizing the silicon film, a bottom insulating film is formed. A side wall insulating film is formed on the side wall. | 03-13-2014 |
20140073116 | METHOD FOR MANUFACTURING SILICON CARBIDE SEMICONDUCTOR DEVICE - A silicon carbide substrate including a first layer having first conductivity type, a second layer having second conductivity type, and a third layer having the first conductivity type is formed. A trench provided with an inner surface having a side wall surface and a bottom surface is formed, the side wall surface extending through the third layer and the second layer and reaching the first layer, the bottom surface being formed of the first layer. A silicon film is formed to cover the bottom surface. A gate oxide film is formed on the inner surface by oxidation in the trench. The gate oxide film includes a first portion formed by oxidation of the silicon carbide substrate, and a second portion formed by oxidation of the silicon film on the bottom surface. Accordingly, a method for manufacturing a silicon carbide semiconductor device having a high breakdown voltage is provided. | 03-13-2014 |