Patent application number | Description | Published |
20080211207 | MOUNTING STRUCTURE FOR AIRBAG APPARATUS - In a mounting structure for an airbag apparatus ( | 09-04-2008 |
20090037067 | TRAVEL SPEED LIMITTING APPARATUS - A travel speed limiting apparatus including: a travel speed measurement device which measures a travel speed of a vehicle; a speed limit memory device which stores a speed limit set by an operator; a first driving force limit value calculation device which calculates a first driving force limit value based on a deviation of the travel speed from the speed limit; a requested driving force calculation device which calculates a requested driving force based on an operator's acceleration operation; and a second driving force limit value calculation device which calculates a second driving force limit value based on the requested driving force, wherein the driving force limiting device sets an eventual driving force limit value to the smaller of the first driving force limit value and the second driving force limit value, and controls the driving force of the vehicle to be less than the eventual driving force limit value. | 02-05-2009 |
20090201514 | POSITION DETECTION METHOD, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - This invention discloses a position detection method for detecting the focus position of an optical position detection apparatus including an image sensor and an optical system which forms an image of a target object on the image sensing surface of the image sensor. In this method, the relationship between the position of the target object in the optical-axis direction of the optical system and the evaluation value of the signal output from the image sensor is measured, and the position of a peak close to a reference focus position, which is selected if the evaluation value has a plurality of peaks in the measured relationship, is detected as the focus position. | 08-13-2009 |
20100097595 | EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD - An apparatus includes a stage configured to move a substrate, an optical system configured to project an image of a pattern on an original onto the substrate, an alignment detection system configured to detect an image of an alignment mark formed on the substrate and measure a position of the alignment mark, and a focus detection system having an index mark and configured to measure a height of the substrate by projecting an image of the index mark onto the substrate. The stage includes an alignment measurement mark and a focus measurement mark that has a positional relationship with the alignment measurement mark. The alignment detection system measures a position of the alignment measurement mark. The focus detection system measures a position of the image of the index mark by projecting the image of the index mark onto the focus measurement mark. | 04-22-2010 |
20100233377 | IMPRINT APPARATUS AND METHOD - An imprint apparatus which includes an imprint head configured to hold a mold, and performs an imprint process including dispensing of a resin to a shot region on a substrate and pressing of the mold and the dispensed resin with each other, comprises a controller configured to control an order of the imprint process for a plurality of selected shot regions on the substrate, and a first dispenser and a second dispenser configured to dispense the resin, wherein the first dispenser is arranged on a side of a first direction with respect to the imprint head, and the second dispenser is arranged on a side of a second direction opposite to the first direction with respect to the imprint head. | 09-16-2010 |
20100268416 | VEHICLE GRADIENT ESTIMATING DEVICE AND VEHICLE TRAVELING CONTROL DEVICE - A vehicle gradient estimating device includes: a vehicle speed sensor which detects a traveling speed of a subject vehicle; an acceleration calculating unit which calculates an acceleration of the subject vehicle on the basis of the traveling speed; an engine load deceleration calculating unit which calculates a deceleration due to an engine load of the subject vehicle; an acceleration correcting unit which corrects the acceleration by using the deceleration; a brake fluid pressure detecting unit which detects a brake fluid pressure of the subject vehicle; and a first gradient estimating unit which estimates a gradient of a road being traveled of the subject vehicle, wherein the first gradient estimating unit estimates the gradient on the basis of a ratio between the brake fluid pressure and the acceleration corrected by the acceleration correcting unit. | 10-21-2010 |
20110141489 | MARK POSITION DETECTOR, IMPRINT APPARATUS, AND ARTICLE MANUFACTURING METHOD - A detector for detecting a position of a mark comprises: an image sensing device; an optical system which projects the mark onto an image sensing surface of the image sensing device; a pattern located in a position between the image sensing surface and an optical element located closest to a plane on which the mark is to be located, among optical elements forming the optical system, the position being optically conjugated with the plane; and a processor which calculates a position of the mark with respect to one of a position of the pattern and a position already known from the position of the pattern, based on a moire pattern formed on the image sensing surface by the mark and the pattern. | 06-16-2011 |
20110147970 | IMPRINT APPARATUS AND PATTERN TRANSFER METHOD - An imprint apparatus comprises a scope which observes a mark formed in each shot of a substrate and a mark formed on a mold and a controller. The controller performs observation by the scope, detects an amount of displacement of the shot with respect to the mold based on the observation result, and, if the detected displacement amount falls outside an allowable range, executes at least one of remeasuring a baseline amount and reexecuting a global alignment process. | 06-23-2011 |
20110177249 | IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - An imprint apparatus for coating a substrate with a resin by a coating mechanism, and curing the resin while pressing at least one of the substrate and a mold against the other, includes a measurement device configured to detect a position of the coating mechanism, a substrate stage configured to hold a substrate, a positioning system configured to position the substrate stage, and a controller configured to control positioning of the substrate stage by the positioning system, based on the measurement result. | 07-21-2011 |
20110236579 | IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE - An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold. | 09-29-2011 |
20110246042 | VEHICLE RUNNING CONTROL DEVICE - A vehicle running control device including: a vehicle speed sensor which detects an actual vehicle speed; a target vehicle speed setting unit; a target drive force calculation unit; a drive force control unit; a vehicle speed lowering allowance value setting unit; and a target drive force upper limit calculation unit. If the actual vehicle speed lowering amount with respect to the target vehicle speed is within the lowering allowance value, the target drive force calculation unit limits the target drive force to be not greater than the target drive force upper limit and the drive force control unit executes drive force control in accordance with the limited target drive force. | 10-06-2011 |
20110278768 | IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE - An imprint apparatus includes a detector and an adjusting device. A second mark formed on a substrate includes a grating pattern having grating pitches in first and second directions which are respectively parallel to first and second axes which are parallel to a pattern surface of a mold and orthogonal to each other. A first mark formed on the mold includes a grating pattern having a grating pitch in the first direction. The first and second marks have different grating pitches in the first direction. The detector includes an image sensor, and an optical system which forms a moire fringe on an image sensing surface of the image sensor. The adjusting device adjusts, in a plane including the second axis and a third axis that is perpendicular to the first and second axes, an angle between the optical axis of the detector and the third axis. | 11-17-2011 |
20120141659 | IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit. | 06-07-2012 |
20120188536 | IMPRINT APPARATUS, DETECTION METHOD, ARTICLE MANUFACTURING METHOD, AND FOREIGN PARTICLE DETECTION APPARATUS - The present invention provides an imprint apparatus for performing an imprint process of transferring a pattern onto a substrate by curing a resin on the substrate while the resin is in contact with a mold, and removing the mold from the cured resin, including a detection unit configured to detect a foreign particle existing on the substrate, wherein the detection unit includes an obtaining unit configured to irradiate a surface of the substrate with light, and obtain light from the surface of the substrate, and a specification unit configured to specify a shot region where a foreign particle existing on the substrate is positioned, based on the light obtained by the obtaining unit. | 07-26-2012 |
20120200005 | MOLD, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE - A surface of a mold for an imprint apparatus on a side of a substrate includes a central region having the pattern, and a pair of first peripheral regions. The central region includes a pair of boundaries parallel to a first direction. The pair of first peripheral regions are located outside the pair of boundaries parallel to the first direction. The pair of first peripheral regions include first regions in which mold-side marks are formed and second regions in which no mold-side marks are formed. A gap between the first regions and the substrate is not filled with a resin upon an imprint process. A gap between the second regions and the substrate is filled with the resin upon an imprint process. The first regions and the second regions are opposed to each other on opposite sides of the central region. | 08-09-2012 |
20120286443 | DETECTION APPARATUS, DETECTION METHOD, AND IMPRINT APPARATUS - A detection apparatus determines an amount of relative rotational deviation between two different objects. Each of the objects has a respective grating mark which together form a pair of grating marks. The detection apparatus includes a detector that detects interference fringes produced by an overlap between the pair of grating marks. The detection apparatus also includes a calculation unit that determines the amount of relative rotational deviation between the two different objects from inclination of the interference fringes detected by the detector. The detection apparatus can be applied, for example, in controlling transfer of a pattern formed on a mold to a transfer material applied to a substrate. | 11-15-2012 |
20130134616 | IMPRINT APPARATUS, IMPRINT METHOD, AND ARTICLE MANUFACTURING METHOD - The present invention provides an imprint apparatus for performing an imprint process by which an imprint material on a substrate is molded by using a mold having a pattern region on which a pattern is formed, thereby transferring the pattern onto the substrate, including a detector configured to detect marks formed in each of a plurality of shot regions on the substrate, a deformation unit configured to deform the pattern region, and a controller configured to control the imprint process. | 05-30-2013 |
20140013037 | ELECTRONIC CONTROL APPARATUS AND DATA REWRITING SYSTEM - An electronic control apparatus includes: a plurality of processing devices that have a rewritable non-volatile memory and that execute a predetermined process in accordance with stored data that is stored in the non-volatile memory, wherein each of the processing devices extracts individual rewriting data included within a dedicated address range that is individually allocated in advance for each of the processing devices, out of rewriting data transmitted from an external rewriting apparatus, and rewrites the stored data that is stored in the non-volatile memory of each of the processing devices by using the individual rewriting data. | 01-09-2014 |
20140070455 | MOLD, IMPRINT METHOD, AND METHOD OF MANUFACTURING ARTICLE - A surface of a mold for an imprint apparatus on a side of a substrate includes a central region having the pattern, and a pair of first peripheral regions. The central region includes a pair of boundaries parallel to a first direction. The pair of first peripheral regions are located outside the pair of boundaries parallel to the first direction. The pair of first peripheral regions include first regions in which mold-side marks are formed and second regions in which no mold-side marks are formed. A gap between the first regions and the substrate is not filled with a resin upon an imprint process. A gap between the second regions and the substrate is filled with the resin upon an imprint process. The first regions and the second regions are opposed to each other on opposite sides of the central region. | 03-13-2014 |
20140234467 | IMPRINT APPARATUS AND METHOD OF MANUFACTURING ARTICLE - An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold. | 08-21-2014 |
20140246799 | IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD - The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit. | 09-04-2014 |
20140300016 | IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE AND ALIGNMENT APPARATUS - The present invention provides an imprint apparatus comprising at least one first detector configured to detect a first number of first marks among a plurality of marks formed in the plurality of shot regions, a second detector having a field of view wider than that of the first detector, and configured to detect a second number of second marks different from the first marks among the plurality of marks, the second number being larger than the first number, and a controller configured to align the plurality of shot regions and the mold by using a detection result from the second detector. | 10-09-2014 |
20140320842 | IMPRINT METHOD, IMPRINT APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides an imprint method comprising a deformation step of deforming a pattern surface of a mold so that the mold is gradually brought into contact with the imprint material outward from a central portion of the pattern surface, an obtaining step of obtaining a shift amount indicating how much a mark on the mold shifts in a direction parallel to a substrate surface due to deformation of the pattern surface, a detection step of detecting the mark on the mold and a mark on the substrate while the pattern surface is deformed, and obtaining relative positions of the mold and the substrate from a detection result, and an alignment step of aligning the mold and the substrate using the shift amount and the relative positions while the pattern surface is deformed. | 10-30-2014 |
20140340661 | EXPOSURE APPARATUS AND METHOD OF MANUFACTURING ARTICLE - The present invention provides an exposure apparatus which exposes a substrate, comprising a substrate stage configured to be movable while holding the substrate, a measurement unit configured to measure a height of the substrate by irradiating the substrate with light and detecting the light reflected by the substrate, and a control unit configured to control the measurement unit, wherein the control unit obtains a velocity profile of the substrate stage and decides, based on the velocity profile, a plurality of timings to perform measurement by the measurement unit to equally space a plurality of measurement portions on the substrate measured by the measurement unit in a state in which an acceleration of the substrate stage is nonzero. | 11-20-2014 |
20140346700 | IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING METHOD - An imprinting method of this disclosure includes supplying an imprint material on a substrate having a pattern including a mark on the substrate formed thereon; bringing a mold having a pattern including a mark on the mold into contact with the imprint material; curing the imprint material in a state in which the mold is in contact therewith; and forming a pattern including the mark on the imprint material, and characterized in that an optical system configured to form an image of the mark on the imprint material and an image of the mark on the substrate are used to detect the mark on the imprint material and the mark on the substrate after the space between the substrate and the mold has been increased until the mark on the mold is positioned out of a focal depth of the optical system, thereby obtaining a relative positional deviation between the pattern on the substrate and the pattern on the imprint material. | 11-27-2014 |
20150028506 | IMPRINTING METHOD, IMPRINTING APPARATUS, AND DEVICE MANUFACTURING METHOD - Arrangement information regarding shot areas is obtained in an imprinting method. When a pattern is sequentially formed in the shot areas, the attraction force of a first attraction area is reduced to less than that of the second attraction area. After the pattern is formed in the shot area corresponding to the first attraction area, the attraction forces of the first and second attraction areas are changed. The position information regarding the shot area corresponding to the second attraction area is obtained, which is compared with the position information regarding the shot area corresponding to the second attraction area based on the arrangement information. If the difference between the compared position information is a threshold value or less, positioning of a substrate and a mold is achieved using the arrangement information. If the difference is greater than the threshold value, the arrangement information regarding the shot areas is obtained again. | 01-29-2015 |
20150035310 | VEHICLE DOOR - A vehicle door for use on a vehicle includes a pocket having a side wall assembly that defines a space in the pocket. The side wall assembly includes an inner wall member disposed in a transverse inward direction of the vehicle. A hand grip is bendable with respect to the inner wall member by a bendable web. The hand grip has a front tooth including a support that extends through a front hole, and a locking hook that extends from the support and engages with a lower surface of a front wall of the inner wall member. A front support wall is mounted on the inner wall member for keeping the front tooth from being removed out of the front hole. | 02-05-2015 |
20150076724 | IMPRINT APPARATUS, IMPRINT METHOD, DETECTING METHOD, AND METHOD OF MANUFACTURING DEVICE - This disclosure provides an imprint apparatus configured to form a pattern with an imprint material by bringing the imprint material on a substrate and a pattern of the mold into contact with each other including a drive unit to bring part of the pattern of the mold into contact with the imprint material, and bring the pattern into contact with the imprint material so a contact surface area between the pattern of the mold and the imprint material increases, an interference fringe detecting unit to detect an interference fringe generated by reflected light from the pattern of the mold and reflected light from the substrate, and a state detecting unit to detect a contact state between the pattern of the mold and the imprint material on the basis of the interference fringe. | 03-19-2015 |