Patent application number | Description | Published |
20110053368 | Arrangement for solder bump formation on wafers - An apparatus and a process for the manufacture of a solder-bump adhered wafer substrate for use in the semiconductor industry, comprising one or more of the following steps including: arranging a first compressive member and a second compressive member in an opposed, compressibly displaceable, spaced-apart relationship, with a pattern plate disposed therebetween with the pattern plate having a plurality of aligned through-holes arranged thereon; filling the through-holes with a molten solder; compressing the solder and the pattern plate between the first and second opposed compressive members to compact the solder therein and cleans the pattern plate of excess solder; chilling the pattern plate to solidify the molten solder in the through-holes; and removing the pattern plate from the spaced-apart compressive members to produce a wafer with solder bumps thereon. | 03-03-2011 |
20110198388 | Flux-free chip to wafer joint serial thermal processor arrangement - A serial thermal processing arrangement for treating a pre-assembled chip/wafer assembly of semiconductor material in a rotary processor, through a series of intermittent, rotatively advanced, movements into independent, temperature and pressure controlled, circumferentially disposed chambers, | 08-18-2011 |
20110215483 | Flux-free chip to substrate joint serial linear thermal processor arrangement - A linear, serial chip/substrate assembly processing machine for stepwise advancing a pre-assembled chip/die substrate on a support plate through a series of sealable chambers beginning at a loading station and ending up at an unloading station after various melting and vacuuming of chip/substrate components has been stepwise indexed through those various chambers to the final joining thereof. | 09-08-2011 |
20120289042 | Arrangement for solder bump formation on wafers - An apparatus and a process for the manufacture of a solder-bump adhered wafer substrate for use in the semiconductor industry, comprising one or more of the following steps including: arranging a first compressive member and a second compressive member in an opposed, compressibly displaceable, spaced-apart relationship, with a pattern plate disposed therebetween with the pattern plate having a plurality of aligned through-holes arranged thereon; filling the through-holes with a molten solder; compressing the solder and the pattern plate between the first and second opposed compressive members to compact the solder therein and cleans the pattern plate of excess solder; chilling the pattern plate to solidify the molten solder in the through-holes; and removing the pattern plate from the spaced-apart compressive members to produce a wafer with solder bumps thereon. | 11-15-2012 |
20130098700 | Foldable cart with tracking arrangement - A foldable cart assembly having a user tracking arrangement so as to follow movement of the user during motion over a field. The cart assembly has a plurality of ultrasound and RF sensors in communication with corresponding sensors in a remote handset transmission device carried by the user. The sensors provide timing, direction and distance information to a central processor on the cart for instructing individual electrical motors empowering the respective direction and speed of rotation of the cart's wheels. | 04-25-2013 |
20130103245 | Tracking foldable cart - A foldable cart assembly which is arranged to provide trackable transportation to a product or a person. The cart contains sensors and computer-controlled drive wheels to enable that cart assembly, when fully opened, to follow a safe path as directed by received electronic signals. That cart assembly is also tri-foldably collapsible, so as to have multiple portions pivoted into nesting configuration with one another thus containable in a minimal volume and even carried by an individual. | 04-25-2013 |
20130175323 | Serial thermal linear processor arrangement - A linear, serial chip/substrate assembly processing machine for stepwise advancing a pre-assembled chip/die substrate on a support plate through a series of sealable chambers having displacable bottom processing portions. The process begins at a loading station and ends up at an unloading station after various melting and vacuuming of chip/substrate components supported on a device tray through those various chambers to the final joining thereof. | 07-11-2013 |
20150034699 | Reflow treating unit & substrate treating apparatus - Provided are a semiconductor substrate manufacturing apparatus and a substrate treating method, and more particularly, an apparatus and method for performing a reflow treating process on a semiconductor wafer. The apparatus treating apparatus includes a load port on which a carrier accommodating a substrate is seated, a substrate treating module including one reflow treating unit or a plurality of reflow treating units for performing a reflow process on the substrate, and a substrate transfer module disposed between the load port and the substrate treating module. The substrate transfer module includes a transfer robot transferring the substrate among the load port, the substrate treating module, and a cleaning unit. The reflow treating unit includes a process chamber having a treating space therein, a support member disposed within the treating space, an exhaust member connected to a top surface of the process chamber to exhaust a fluid within the treating space, and an absorption prevention plate spaced apart from an upper portion of the support member, the absorption prevention plate having a flat plate shape with a predetermined thickness. | 02-05-2015 |
20150034700 | Reflow treating unit & substrate treating apparatus - Provided are a semiconductor substrate manufacturing apparatus and a substrate treating method, and more particularly, an apparatus and method for performing a reflow treating process on a semiconductor wafer. The apparatus treating apparatus includes a load port on which a carrier accommodating a substrate is seated, a substrate treating module including one reflow treating unit or a plurality of reflow treating units for performing a reflow process on the substrate, and a substrate transfer module including a transfer robot transferring the substrate between the load port and the substrate treating module, the substrate transfer module being disposed between the load port and the substrate treating module. The reflow treating unit includes a process chamber having a treating space therein and an exhaust member exhausting a fluid within the process chamber. The exhaust member includes a plurality of individual exhaust lines connecting a plurality of process chambers to each other and a common exhaust line connected to the plurality of individual exhaust lines to exhaust the fluid to the outside of the substrate treating module. | 02-05-2015 |
20150034702 | Apparatus & method for treating substrate - Provided are a semiconductor substrate manufacturing apparatus and a substrate treating method, and more particularly, an apparatus and method for performing a reflow treating process on a semiconductor wafer. The apparatus treating apparatus includes a load port on which a carrier accommodating a substrate is seated, a substrate treating module including one process chamber or a plurality of process chambers having a treating space in which a reflow process with respect to the substrate is performed, a cleaning unit cleaning the substrate, and a substrate transfer module disposed between the load port and the substrate treating module. The substrate transfer module includes a transfer robot transferring the substrate among the load port, the substrate treating module, and the cleaning unit. | 02-05-2015 |