Kaspari
Christian Kaspari, Berlin DE
Patent application number | Description | Published |
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20130021610 | Method and apparatus for real-time determination of spherical and non-spherical curvature of a surface - The present invention provides for an apparatus for measuring a curvature of a surface of a wafer in a multi-wafer epitaxial reactor. | 01-24-2013 |
20130294476 | FLAT LIGHT EMITTING PLATE FOR SIMULATING THERMAL RADIATION, METHOD FOR CALIBRATING A PYROMETER AND METHOD FOR DETERMINING THE TEMPERATURE OF A SEMICONDUCTING WAFER - A flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. The invention provides a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources. | 11-07-2013 |
Gerd Kaspari, Reken DE
Patent application number | Description | Published |
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20100005905 | Apparatus for Determining and Controlling Flow Rate - The invention relates to an apparatus for determining a flow rate, with at least one flow passage for a fluid, an adjustable measuring device and a throttle. The apparatus is characterized in that the throttle is arranged to be movable about at least one pivot axis and engages with a predetermined and variable flow edge section at least in a partial region of the fluid flow passage prior to the measuring device. The apparatus according to the invention further comprises a bypass, which is variable at least by means of a bypass actuating member. | 01-14-2010 |
Gerd Kaspari, Coesfeld DE
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20120098373 | TORQUE SUPPORT - The invention relates to a torque support for motors, in particular drive motors, comprising at least one first and one second fixing unit that can be non-rotatably mounted to at least one first and one second motor and at least one connecting element between the first and the second fixing element. The invention is characterised in that the connecting element is designed to be moved at least in its longitudinal direction, in order to compensate differences in distance between the motors. | 04-26-2012 |
Patrick Kaspari, Lichtenau DE
Patent application number | Description | Published |
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20130297603 | MONITORING METHODS AND SYSTEMS FOR DATA CENTERS - A monitoring system includes a database storing configuration information about a plurality of objects in the data center; a first inventory instance that adds a first object to the database, where the first inventory instance classifies the first object based on a set of classification rules to select a set of monitoring rules for the first object based on its classification and add configuration information about the first object to the configuration database; and a first monitoring instance to monitor the first object, the monitoring instance monitoring status of the first object based on respective configuration information in the database; at least one of the first inventory instance and the first monitoring instance identifying a further object functionally connected to the first object, the further objects added to the database by the first or a second inventory instance and monitored by the first or a second monitoring instance. | 11-07-2013 |