Patent application number | Description | Published |
20080243296 | Substrate processing system and group management system - It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device. | 10-02-2008 |
20090265322 | INFORMATION MANAGING METHOD, INFORMATION MANAGING APPARATUS AND SUBSTRATE PROCESSING SYSTEM - An information managing method for managing information, based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, comprises: storing the apparatus information of the substrate processing apparatus at the transmission time of the electronic message containing the apparatus information in a first apparatus information storage unit; when the electronic message containing the event information is transmitted, comparing conditions for accumulating the event information and the apparatus information; and when the conditions coincide with each other, storing the apparatus information in a second apparatus information storage unit in association with time when the event information has been generated. | 10-22-2009 |
20100324718 | Substrate processing system and group management system - It is intended to provide a substrate processing system and a group management system enabling a more flexible and simplified structure of substrate processing apparatuses. The substrate processing system according to this invention has a plurality of substrate processing apparatuses for processing substrates and the group management system connected to the substrate processing apparatuses, and the group management system includes a structure information memory device (structure management device) for memorizing structure information, a plurality of communication devices (connection management devices) for communicating with at least one of the plural substrate processing apparatuses based on the structure information memorized in the structure information memory device, and an apparatus information storage device (data management device) connected to any of the plural communication devices based on the structure information memorized in the structure information memory device and which stores information relating to the substrate processing apparatus performing communication with the communication device. | 12-23-2010 |
20110071661 | SUBSTRATE PROCESSING SYSTEM - Provided is a substrate processing system, which comprises a substrate processing apparatus and a group management apparatus. The group management apparatus includes a communication part configured to communicate with the substrate processing apparatus, a first storage part configured to store data transmitted through the communication part from the substrate processing apparatus, a second storage part configured to store, when a predetermined abnormality is detected from at least the data, a file that prescribes an abnormality detection condition for detecting the abnormality, a display part including a manipulation screen configured to input a condition for detecting an abnormality by using the file or the data stored in the first storage part and/or the second storage part, and a screen control part configured to change, when an abnormality item for detecting an abnormality is selected from a plurality of abnormality items in the manipulation screen, the manipulation screen to a registration screen. | 03-24-2011 |
20110079177 | SUBSTRATE PROCESSING SYSTEM, GROUP MANAGING APPARATUS, AND METHOD OF ANALYZING ABNORMAL STATE - A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for identifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information. | 04-07-2011 |
20120065763 | SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PROCESSING APPARATUS AND DISPLAY METHOD OF SUBSTRATE PROCESSING APPARATUS - Provided are a substrate processing apparatus, a display method thereof, and a substrate processing system capable of detecting any change in the condition of each component of a substrate processing apparatus. In the substrate processing system including the substrate processing apparatus for processing a substrate and a group management apparatus connected thereto, the substrate processing apparatus is configured to acquire monitor data representing at least the condition of each component of the substrate processing apparatus, aggregate a plurality of the monitor data to generate package data including at least one of a maximum value, an average value, and a minimum value of the monitor data, and transmit the package data to the group management apparatus. The group management apparatus is configured to receive the package data from the substrate processing apparatus and readably store the same therein. | 03-15-2012 |
20120226475 | SUBSTRATE PROCESSING SYSTEM, MANAGEMENT APPARATUS, DATA ANALYSIS METHOD - A substrate processing system including a management apparatus, the management apparatus including: a substrate processing apparatus configured to process a substrate; an accumulation unit configured to accumulate measurement data transmitted from the substrate processing apparatus; a storage unit configured to individually store an item of the measurement data regarding an operation state of the substrate processing apparatus, a type of statistics applied to the measurement data, and a condition used for determining the statistics; and an extraction unit configured to extract a combination of data for which the measurement data accumulated in the accumulation unit is determined to be abnormal, with respect to a combination of data including the item of the measurement data, the statistics, and the condition stored in the storage unit. | 09-06-2012 |
20120253724 | MANAGEMENT DEVICE - A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value. | 10-04-2012 |
20130066857 | INFORMATION MANAGING METHOD, INFORMATION SEARCHING METHOD AND DATA DISPLAYING METHOD - An information managing method for managing information based upon an electronic message containing apparatus information or event information transmitted from a substrate processing apparatus, the information managing method comprising: storing the apparatus information of the substrate processing apparatus at a transmission time of the electronic message in a first apparatus information storage unit; comparing the event information with a condition for accumulating the apparatus information when the electronic message is transmitted; and accumulating the apparatus information in a second apparatus information storage unit by associating the apparatus information with a time stamp of a generation of the event information when the condition is satisfied. | 03-14-2013 |