Patent application number | Description | Published |
20110011338 | FLOW CONTROL FEATURES OF CVD CHAMBERS - Apparatus and methods for gas distribution assemblies are provided. In one aspect, a gas distribution assembly is provided comprising an annular body comprising an annular ring having an inner annular wall, an outer wall, an upper surface, and a bottom surface, an upper recess formed into the upper surface, and a seat formed into the inner annular wall, an upper plate positioned in the upper recess, comprising a disk-shaped body having a plurality of first apertures formed therethrough, and a bottom plate positioned on the seat, comprising a disk-shaped body having a plurality of second apertures formed therethrough which align with the first apertures, and a plurality of third apertures formed between the second apertures and through the bottom plate, the bottom plate sealingly coupled to the upper plate to fluidly isolate the plurality of first and second apertures from the plurality of third apertures. | 01-20-2011 |
20120079982 | MODULE FOR OZONE CURE AND POST-CURE MOISTURE TREATMENT - A substrate processing system that has a plurality of deposition chambers, and one or more robotic arms for moving a substrate between one or more of a deposition chamber, load lock holding area, and a curing and treatment module. The substrate curing and treatment module is attached to the load-lock substrate holding area, and may include: The curing chamber for curing a dielectric layer in an atmosphere comprising ozone, and a treatment chamber for treating the cured dielectric layer in an atmosphere comprising water vapor. The chambers may be vertically aligned, have one or more access doors, and may include a heating system to adjust the curing and/or heating chambers between two or more temperatures respectively. | 04-05-2012 |
20120145079 | LOADLOCK BATCH OZONE CURE - A substrate processing chamber for processing a plurality of wafers in batch mode. In one embodiment the chamber includes a vertically aligned housing having first and second processing areas separated by an internal divider, the first processing area positioned directly over the second processing area; a multi-zone heater operatively coupled to the housing to heat the first and second processing areas independent of each other; a wafer transport adapted to hold a plurality of wafers within the processing chamber and move vertically between the first and second processing areas; a gas distribution system adapted to introduce ozone into the second area and steam into the first processing area; and a gas exhaust system configured to exhaust gases introduced into the first and second processing areas. | 06-14-2012 |
20150013793 | FLOW CONTROL FEATURES OF CVD CHAMBERS - Apparatus and methods for gas distribution assemblies are provided. In one aspect, a gas distribution assembly is provided comprising an annular body comprising an annular ring having an inner annular wall, an outer wall, an upper surface, and a bottom surface, an upper recess formed into the upper surface, and a seat formed into the inner annular wall, an upper plate positioned in the upper recess, comprising a disk-shaped body having a plurality of first apertures formed therethrough, and a bottom plate positioned on the seat, comprising a disk-shaped body having a plurality of second apertures formed therethrough which align with the first apertures, and a plurality of third apertures formed between the second apertures and through the bottom plate, the bottom plate sealingly coupled to the upper plate to fluidly isolate the plurality of first and second apertures from the plurality of third apertures. | 01-15-2015 |
20150329970 | BATCH CURING CHAMBER WITH GAS DISTRIBUTION AND INDIVIDUAL PUMPING - Embodiments of the present disclosure generally relate to a batch processing chamber that is adapted to simultaneously cure multiple substrates at one time. The batch processing chamber includes multiple processing sub-regions that are each independently temperature controlled. The batch processing chamber may include a first and a second sub-processing region that are each serviced by a substrate transport device external to the batch processing chamber. In addition, a slotted cover mounted on the loading opening of the batch curing chamber reduces the effect of ambient air entering the chamber during loading and unloading. | 11-19-2015 |
Patent application number | Description | Published |
20080286978 | ETCHING AND PASSIVATING FOR HIGH ASPECT RATIO FEATURES - An etch method includes etching a masked substrate to form a recess with a first sidewall in the substrate. A thin surface layer of the substrate on the first sidewall is then converted into a passivation layer. The masked substrate is etched again to deepen the recess in the substrate. A surface layer of the substrate on the second sidewall of the recess is then converted into a passivation layer. In one embodiment, upon removal of the passivation layers from both sidewalls, the first and second sidewalls of the high aspect ratio recess are aligned to within 10 Å of each other to provide a high aspect ratio recess having a vertical profile. | 11-20-2008 |
20090294101 | FAST SUBSTRATE SUPPORT TEMPERATURE CONTROL - Methods and apparatus for controlling the temperature of a substrate support are provided herein. In some embodiments, an apparatus for controlling the temperature of a substrate support may include a first heat transfer loop and a second heat transfer loop. The first heat transfer loop may have a first bath with a first heat transfer fluid at a first temperature. The second heat transfer loop may have a second bath with a second heat transfer fluid at a second temperature. The first and second temperatures may be the same or different. First and second flow controllers may be provided for respectively providing the first and second heat transfer fluids to a substrate support. One or more return lines may couple one or more outlets of the substrate support to the first and second baths for returning the first and second heat transfer fluids to the first and second baths. | 12-03-2009 |
20110045672 | MULTI-FILM STACK ETCHING WITH POLYMER PASSIVATION OF AN OVERLYING ETCHED LAYER - A method and apparatus for plasma etching a workpiece, such as a semiconductor wafer, including a thin film stack having a top film disposed over a bottom film with an intervening middle film there between. Etch selectivity between the top and bottom films may be as low as between 1:1 and 2:1 and a first carbon-lean gas chemistry is used to etch through the top film, a second carbon-lean gas chemistry is used to etch through the middle film, and the bottom film is etched through by alternating between depositing a polymer passivation on the top film using a carbon-rich gas chemistry and an etching of the bottom film with a third carbon-lean gas chemistry, which may be the same as the first carbon-lean gas chemistry. | 02-24-2011 |
20120088371 | METHODS FOR ETCHING SUBSTRATES USING PULSED DC VOLTAGE - Methods for etching substrates using a pulsed DC voltage are provided herein. In some embodiments, a method for method for etching a substrate disposed on a substrate support within a process chamber may include providing a process gas to the process chamber; forming a plasma from the process gas; applying a pulsed DC voltage to a first electrode disposed within the process chamber; and etching the substrate while applying the pulsed DC voltage. | 04-12-2012 |
20140212994 | SELF ALIGNED DUAL PATTERNING TECHNIQUE ENHANCEMENT WITH MAGNETIC SHIELDING - Embodiments of the present disclosure generally provide apparatus and method for improving processing uniformity by reducing external magnetic noises. One embodiment of the present disclosure provides an apparatus for processing semiconductor substrates. The apparatus includes a chamber body defining a vacuum volume for processing one or more substrate therein, and a shield assembly for shielding magnetic flux from the chamber body disposed outside the chamber body, wherein the shield assembly comprises a bottom plate disposed between the chamber body and the ground to shield magnetic flux from the earth. | 07-31-2014 |
20140377959 | METHODS FOR FORMING THREE DIMENSIONAL NAND STRUCTURES ATOP A SUBSTRATE - In some embodiments, methods for forming a three dimensional NAND structure include providing to a process chamber a substrate having alternating nitride layers and oxide layers or alternating polycrystalline silicon consisting layers and oxide layers formed atop the substrate and a photoresist layer formed atop the alternating layers; etching the photoresist layer to expose at least a portion of the alternating layers; providing a process gas comprising sulfur hexafluoride and oxygen to the process chamber; providing RF power of about 4 kW to about 6 kW to a first inductive RF coil and a second inductive RF coil disposed proximate the process chamber to ignite the process gas to form a plasma, wherein a current flowing through the first inductive RF coil is out of phase with RF current flowing through the second inductive RF coil; and etching through a desired number of the alternating layers to form a feature. | 12-25-2014 |
20150031187 | METHODS FOR FORMING A ROUND BOTTOM SILICON TRENCH RECESS FOR SEMICONDUCTOR APPLICATIONS - Embodiments of the present invention provide methods to etching a recess channel in a semiconductor substrate, for example, a silicon containing material. In one embodiment, a method of forming a recess structure in a semiconductor substrate includes transferring a silicon substrate into a processing chamber having a patterned photoresist layer disposed thereon exposing a portion of the substrate, providing an etching gas mixture including a halogen containing gas and a Cl | 01-29-2015 |
20150096959 | METHOD OF MATCHING TWO OR MORE PLASMA REACTORS - Etch rate distributions are captured at a succession of hardware tilt angles of the RF source power applicator relative to the workpiece and their non-uniformities computed, and the behavior is modeled as a non-uniformity function for each one of at least two plasma reactors. An offset Δα in tilt angle α between the non-uniformity functions of the two plasma reactors is detected. The two plasma reactors are then matched by performing a hardware tilt in one of them through a tilt angle equal to the offset Δα. | 04-09-2015 |
20150099314 | PREDICTIVE METHOD OF MATCHING TWO PLASMA REACTORS - Etch rate distribution non-uniformities are predicted for a succession of hardware tilt angles of the RF source applicator relative to the workpiece, and the behavior is modeled as a non-uniformity function for each one of at least two plasma reactors. An offset Δα in tilt angle α between the non-uniformity functions of the two plasma reactors is detected. The two reactors are then matched by performing a hardware tilt in one of them through a tilt angle equal to the offset Δα. | 04-09-2015 |
Patent application number | Description | Published |
20080205508 | METHOD AND APPARATUS FOR LOW COMPLEXITY VIDEO ENCODING AND DECODING - This disclosure describes unique video encoding and decoding processes compliant to one or more specific coding standards, such as the H.264/AVC standard, without sacrificing coding efficiency. A higher resolution input image is divided into a corresponding set of lower resolution sub-sampled images. The first image of each set is coded as an independent I picture, or coded with respect to the first image of one or more other sets as a P or B picture. Each subsequent image of a set, other than the first image in each set, is encoded with respect to the first image of the same set or an image of another set as a regular P or B picture. A decoding process may employ a decoder conforming to the specific coding standard to decode the encoded data, by rearranging the decoded lower resolution sub-sampled images of each set into corresponding higher resolution output images. | 08-28-2008 |
20090172584 | METHOD AND APPARATUS FOR INTERACTIVE SCHEDULING OF VLIW ASSEMBLY CODE - A method and apparatus for the manually optimizing the scheduling of code are disclosed. Accordingly, a software development tool with a graphical user interface enables manually ordering the scheduling of operations for architectures that execute multiple instructions/operations per machine cycle, such as very long instruction word (VLIW) processors. Assistance is provided at the instruction scheduling stage of VLIW compilation process to increase instruction level parallelism (ILP). The apparatus provides graphical views of assembly code and related information. An interactive, user friendly method to manipulate the code during or after scheduling is provided. The programmer can temporarily pause the automated scheduling, override decision taken by the scheduler, and then resume scheduling. The method lets the programmer interact graphically with scheduling decisions in a feedback environment. The method allows movement of only those operations that do not violate the target processor architectural constraints and algorithmic constraints of the code being optimized. | 07-02-2009 |
20090216520 | SYSTEM AND METHOD FOR INTERFACING A MEDIA PROCESSING APPARATUS WITH A COMPUTER - A system comprising a media processing apparatus and a computer where the media processing apparatus emulates a mass storage device and interfaces with the computer is disclosed. In one embodiment the media processing apparatus appears to the computer as a Universal serial bus (USB) mass storage device, and the operating system (OS) on the computer, using its pre-installed USB mass storage device driver, establishes bi-directional communication channel with the media processing apparatus. Thus, the need to develop an OS specific kernel-mode device driver for the media processing apparatus is eliminated. The system may employ a proprietary communication protocol on the USB bus to send and receive data between the computer and the media processing apparatus. In one embodiment, the computer sends and receives data by executing read and write operations to sectors of the emulated USB mass storage device; while the media processing apparatus deciphers the read and write operations on emulated sectors and takes appropriate actions. User-mode applications on the computer and the media processing apparatus may employ Remote Procedure Call (RPC) mechanisms to issue commands and share their respective resources with each other. | 08-27-2009 |
20110040901 | Multi-functional USB apparatus with auto-configuration and USB battery cap - The present invention describes a multi-module USB system consisting of a multi-function USB apparatus and associated USB cap. The multi-function USB apparatus operates as a USB host as well as a USB client. The USB cap houses a rechargeable battery pack and when docked with the multi-function USB apparatus provides power to the multi-function USB apparatus. The multi-function USB apparatus and USB cap can also operate independently. The USB system is a multi-functional device having modes that embody, including recording, sharing, playback, storage, and charging battery of USB based portable media devices. Further, the USB system configures itself automatically for the various modes based on use of its interfaces with no specific settings required from the user. | 02-17-2011 |
20110229105 | DECENTRALIZED SYMMETRIC NETWORK OF AUTONOMOUS DIGITAL VIDEO RECORDERS AND ITS METHOD OF USE - The present invention describes a decentralized symmetric configuration of digital video recorders (DVCRs) for monitoring, controlling, analyzing, recording, playback and streaming of audio/visual (A/V) media over a network. Each DVCR is an autonomous device able to operate in its local environment as well as access and operate another DVCR available on the network to facilitate the overall working of the disclosed system. Each DVCR also exhibits storage fail-safe feature whereby it recovers data automatically if storage media gets corrupted such as due to sudden power failure. A DVCR can be configured to scan the network for other DVCR units. A list of discovered DVCRs is displayed. Each DVCR can access, after authentication, any of the listed DVCR for configuration, monitoring, controlling, recording, playback and other available functionality over the network. The same controls used for operating a local DVCR, including use of buttons, can be employed to operate the remote DVCR, giving a virtual presence at the remote location. The functionality exhibited by each of the DVCR, can be identical. A plurality of the DVCR can thus form a decentralized, symmetric network in which there is no master or central controller. | 09-22-2011 |
20120294367 | METHOD AND APPARATUS FOR LOW COMPLEXITY VIDEO ENCODING AND DECODING - This disclosure describes unique video encoding and decoding processes compliant to one or more specific coding standards, such as the H.264/AVC standard, without sacrificing coding efficiency. A higher resolution input image is divided into a corresponding set of lower resolution sub-sampled images. The first image of each set is coded as an independent I picture, or coded with respect to the first image of one or more other sets as a P or B picture. Each subsequent image of a set, other than the first image in each set, is encoded with respect to the first image of the same set or an image of another set as a regular P or B picture. A decoding process may employ a decoder conforming to the specific coding standard to decode the encoded data, by rearranging the decoded lower resolution sub-sampled images of each set into corresponding higher resolution output images. | 11-22-2012 |
Patent application number | Description | Published |
20120281540 | MOBILE SERVICE ROUTING IN A NETWORK ENVIRONMENT - A data flow is received from a mobile network relating to a mobile subscriber. Subscriber data is received for the subscriber identifying a service path corresponding to the subscriber and at least one service policy corresponding to the subscriber, the service path including a set of network service nodes in a plurality of network service nodes. Packets of the data flow are routed according to the service path, the packets corresponding to a request for a resource. At least one packet is appended with service header data identifying the service policy. Each service node performs at least one service based on received request data, each service node in the set of service nodes performing a service defined in a service subscription of the subscriber. At least one particular service node in the set of network service nodes performs a particular service based at least in part on the service policy. | 11-08-2012 |
20140169375 | MOBILE SERVICE ROUTING IN A NETWORK ENVIRONMENT - A data flow is received from a mobile network relating to a mobile subscriber. Subscriber data is received for the subscriber identifying a service path corresponding to the subscriber and at least one service policy corresponding to the subscriber, the service path including a set of network service nodes in a plurality of network service nodes. Packets of the data flow are routed according to the service path, the packets corresponding to a request for a resource. At least one packet is appended with service header data identifying the service policy. Each service node performs at least one service based on received request data, each service node in the set of service nodes performing a service defined in a service subscription of the subscriber. At least one particular service node in the set of network service nodes performs a particular service based at least in part on the service policy. | 06-19-2014 |
20150312801 | MOBILE SERVICE ROUTING IN A NETWORK ENVIRONMENT - A data flow is received from a mobile network relating to a mobile subscriber. Subscriber data is received for the subscriber identifying a service path corresponding to the subscriber and at least one service policy corresponding to the subscriber, the service path including a set of network service nodes in a plurality of network service nodes. Packets of the data flow are routed according to the service path, the packets corresponding to a request for a resource. At least one packet is appended with service header data identifying the service policy. Each service node performs at least one service based on received request data, each service node in the set of service nodes performing a service defined in a service subscription of the subscriber. At least one particular service node in the set of network service nodes performs a particular service based at least in part on the service policy. | 10-29-2015 |
Patent application number | Description | Published |
20090083647 | VIRTUALIZATION OF SCALABLE ROLE-BASED COMMAND LINE INTERFACE VIEWS - Providing for virtualization of a role-based command line interface (CLI) view that enables highly scalable association of such a view with an inter-networking operating system (IOS) device is disclosed herein. By way of example, an IOS correlation component can define VPN routing/forwarding tables (VRFs) to reference a virtual role-based CLI view. Whereas typically an instance of the CLI view must be re-created in memory for each VRF, the subject specification provides for referencing a single CLI view that is global to an IOS platform, greatly increasing scalability of the IOS platform. According to further aspects, transferable CLI views are provided that can be saved in a portable file format and distributed amongst various network devices. The subject disclosure, therefore, provides for greatly increased efficiency and scalability with respect to configuration and implementation of IOS CLI views. | 03-26-2009 |
20110035796 | Providing Differentiated Network Services and Priorities to VPN Routers/Clients - In one embodiment, a first network device receives a priority message from a second network device, wherein the priority message conforms to a connection establishment protocol and indicates a priority associated with the second network device. The first network device obtains the priority from the priority message and stores the priority. The first network device allocates resources for at least one of control or data plane processing to the second network device in accordance with the priority. | 02-10-2011 |
20140365672 | PROVIDING DIFFERENTIATED NETWORK SERVICES AND PRIORITIES TO VPN ROUTERS/CLIENTS - In one embodiment, a first network device receives a priority message from a second network device, wherein the priority message conforms to a connection establishment protocol and indicates a priority associated with the second network device. The first network device obtains the priority from the priority message and stores the priority. The first network device allocates resources for at least one of control or data plane processing to the second network device in accordance with the priority. | 12-11-2014 |
Patent application number | Description | Published |
20090022069 | Preventing loops in networks operating different protocols to provide loop-free topology - A method and system for preventing loops in a network including network devices operating different protocols for providing loop-free topology are disclosed. In one embodiment, a method includes receiving link state information at a network device operating a first protocol and in communication with a network device operating a second protocol, creating at least one tunnel to one or more other network devices operating the first protocol and in communication with a network device operating the second protocol, receiving a proposal, blocking designated boundary ports in communication with network devices operating the second protocol, and transmitting an agreement. | 01-22-2009 |
20090219836 | DISTRIBUTED SPANNING TREE PROTOCOL ON A MULTI CHASSIS PORT CHANNEL - In one embodiment, a technique for routing traffic in networks represented by logical topologies, such as Multi Chassis Port Channel (MCPC) or Multi Chassis Ether Channel (MCEC) topologies, is provided. By modifying a port priority vector (PPV) to include an additional “Switch ID” field that identifies a designated bridge ID or a local switch ID, depending on whether the corresponding port is used as an MCT, a routing protocol designed to avoid loops in routing paths, such as STP, may avoid blocking MCT ports. | 09-03-2009 |
20100002577 | GRACEFUL REMOVAL AND/OR INSERTION OF A NETWORK ELEMENT - In one embodiment, when a network element is to be removed from or inserted into a network a Graceful Operations Manager schedules graceful shut-down and/or start-up routines for different protocols and/or components on the network element in an optimal order based on dependencies between the different protocols and components. The Graceful Operations Manager communicates with the different components at different stages of their shut-down or start-up process and communicates information on the standby topology across components and/or protocols to enable the synchronization of the standby topology computation on all components and/or protocols that are affected by the removal or insertion. | 01-07-2010 |
20110064002 | Preventing loops in networks operating different protocols to provide loop-free topology - A method and apparatus for preventing loops in a network with network devices operating a spanning tree protocol and network devices operating a link state routing protocol to prevent loops are disclosed. In one embodiment, a method includes receiving from one of the network devices operating a link state protocol, a link state routing synchronization packet at a first network device in communication with one of the network devices operating the spanning tree protocol, blocking at the first network device, boundary ports in communication with the network devices operating the spanning tree protocol, transmitting a link state routing synchronization acknowledgement packet at the first network device after the boundary ports are blocked, and performing a loop-free topology convergence process at the first network device. | 03-17-2011 |