Patent application number | Description | Published |
20080239017 | LIQUID EJECTING HEAD AND METHOD FOR MANUFACTURING THE SAME - A liquid ejecting head includes a flow channel substrate having a pressure generating chamber communicating with a nozzle aperture through which liquid is ejected, and a piezoelectric element disposed on one surface of the flow channel substrate. The piezoelectric element includes a common electrode, a piezoelectric layer, and an individual electrode. The piezoelectric layer is made of lead zirconate titanate having a rhombohedral or monoclinic crystal structure preferentially oriented in the (100) plane. The saturated polarization Pm and the residual polarization Pr of the piezoelectric layer satisfy the relationship 33%≦2Pr/2Pm≦46%. | 10-02-2008 |
20090077782 | METHOD FOR PRODUCING ACTUATOR DEVICE AND METHOD FOR PRODUCING LIQUID EJECTING HEAD - A method for producing an actuator device includes forming a lower electrode above a substrate, forming thereon a piezoelectric layer including multiple piezoelectric films by repeatedly sintering a piezoelectric precursor film containing titanium, zirconium, and lead, and forming an upper electrode above the piezoelectric layer. A titanium seed layer is formed above the lower electrode and a piezoelectric precursor film is crystallized by sintering to form a first piezoelectric layer above the titanium seed layer. An intermediate titanium seed layer is formed above the first piezoelectric layer and a piezoelectric precursor film is crystallized by sintering, forming a second piezoelectric layer above the intermediate titanium seed layer. At least one piezoelectric precursor film is stacked above the second piezoelectric layer and crystallized by sintering at a temperature higher than a temperature at which the first and second piezoelectric layers are formed, thereby forming a third piezoelectric layer. | 03-26-2009 |
20100214372 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR UNIT - A liquid ejecting head includes a flow channel-forming substrate including a pressure-generating chamber that is in communication with a nozzle opening through which liquid is ejected; and a piezoelectric device that is provided on a surface of the flow channel-forming substrate and is configured to cause change in pressure of the pressure-generating chamber. The piezoelectric device includes a pair of electrodes constituted by a cathode and an anode, and a piezoelectric layer that is sandwiched between the pair of electrodes and is displaceably disposed. A negatively charged region is formed in a portion of the piezoelectric layer, the portion being near the cathode. A positively charged region is formed in a portion of the piezoelectric layer, the portion being near the anode. | 08-26-2010 |
20110219592 | METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR - In sputter etching to improve the adhesion between upper electrodes and lead electrodes, the sputter etching of surfaces of the upper electrodes under an Ar gas flow at a flow rate of 60 sccm or more can reduce the residence time of Ar ions on the surfaces of the upper electrodes because of the Ar gas flow. This can prevent the charging of the upper electrodes due to the buildup of ionized Ar gas on the surfaces, reduce the influence of charging on piezoelectric elements, and provide a method for manufacturing a piezoelectric actuator that includes the piezoelectric elements each including a piezoelectric layer having small variations in hysteresis characteristics and deformation characteristics. | 09-15-2011 |
20150052715 | METHODS OF MANUFACTURING PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND ULTRASONIC TRANSDUCER - A method of manufacturing a piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, in which unevenness on one surface of the piezoelectric layer is formed by forming an oxidizable metal layer on the one surface of the piezoelectric layer; aggregating the metal layer by thermal oxidation; and performing isotropic etching on the metal layer aggregated on the one surface of the piezoelectric layer. | 02-26-2015 |
20150130877 | LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS - A liquid ejecting apparatus is provided with an actuator substrate on which a piezoelectric actuator that generates a pressure change in a pressure generation chamber, which is in communication with a nozzle opening that ejects a liquid, is provided. The liquid ejecting head is provided with lead-out wiring that is led out from the piezoelectric actuator to the top of the actuator substrate, the lead-out wiring is provided with an adhesive layer that is provided on an actuator substrate side, and a conductive layer that is provided on a side of the adhesive layer which is opposite the actuator substrate, and the adhesive layer has a width that is narrower than the conductive layer in at least a parallel arrangement direction of the lead-out wiring. | 05-14-2015 |
20150151541 | LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS - A liquid ejecting head includes a pressure chamber forming substrate that forms a pressure chamber filled with ink, a nozzle that ejects the ink in a Z direction along the pressure chamber forming substrate, and a communicating flow path that allows the pressure chamber to communicate with the nozzle, in which the communicating flow path includes a first flow path along a Y direction intersecting the Z direction. | 06-04-2015 |
20150202870 | LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS - Provided is a liquid ejecting head including a pressure chamber forming substrate for forming a pressure chamber which is filled with liquid, a nozzle through which the ink is ejected in a direction along the pressure chamber forming substrate, and a communication flow path which allows the pressure chamber to communicate with the nozzle. The nozzle and the communication flow path are formed in the pressure chamber forming substrate. | 07-23-2015 |