Patent application number | Description | Published |
20100302660 | OPTICAL FILTER, OPTICAL FILTER DEVICE, ANALYZER, AND METHOD FOR MANUFACTURING OPTICAL FILTER - An optical filter includes: a first substrate and a second substrate that are disposed to face each other; a first mirror and a first electrode that are disposed on the second substrate side of the first substrate; and a second mirror and a second electrode that are disposed on the first substrate side of the second substrate, wherein the first mirror and the second mirror are connected via a wire. | 12-02-2010 |
20110194118 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL SENSOR, ANALYZER AND PROCESS FOR PRODUCING WAVELENGTH VARIABLE INTERFERENCE FILTER - A wavelength variable interference filter includes: a first substrate which has a light transmissive property; a second substrate which has a light transmissive property and is disposed to face one surface of the first substrate and is bonded thereto; a first reflection film which is provided on the first substrate; a second reflection film which is provided on the second substrate; and a variable section which varies the gap; wherein the second substrate includes: a first layer which has a movable section; and a second layer which is laminated to a surface of the first layer facing the first substrate, is formed in a plate shape with a uniform thickness, and has a support section configured to displaceably support the movable section; and the first layer is not laminated to at least a region overlapping with the support section in the planar view. | 08-11-2011 |
20120086945 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, PHOTOMETRIC ANALYZER, AND MANUFACTURING METHOD OF TUNABLE INTERFERENCE FILTER - A tunable interference filter comprising a first substrate, a second substrate facing the first substrate, a first reflection film formed on the first substrate, a second reflection film formed on the second substrate, the second reflection film facing the first reflection film by interposing a gap, and a gap adjustable-part that adjusts the gap, wherein the second substrate has a first surface and a second surface opposed to the first surface, wherein the second substrate includes a first groove on the first surface, and wherein the second substrate includes a second groove on the second surface, the second groove facing the first groove. | 04-12-2012 |
20120120402 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL MODULE, AND LIGHT ANALYZER - A wavelength variable interference filter includes: a first movable mirror disposed on a first substrate; a second movable mirror disposed so as to be opposed to the first movable mirror with a predetermined gap interposed therebetween; and an electrostatic actuator which varies the length of the gap between the mirrors. The first substrate has a first movable portion on which the first movable mirror is disposed, and a first linkage portion which holds the first movable portion in such a manner that the first movable portion can shift in the thickness direction of the substrate. The second substrate has a second movable portion on which the second movable mirror is disposed, and a second linkage portion which holds the second movable portion in such a manner that the second movable portion can shift in the thickness direction of the substrate. | 05-17-2012 |
20120188552 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, SPECTROSCOPIC ANALYZER, AND ANALYZER - A variable wavelength interference filter includes a fixed substrate having a fixed reflecting film, a movable substrate having a movable reflecting film, and an electrostatic actuator including a fixed electrode and a movable electrode. The fixed electrode includes first and second fixed partial electrodes electrically isolated from each other. First and second extraction electrodes extending from the first and second fixed partial electrodes, respectively, are formed on the fixed substrate. The movable electrode is formed in a ring shape covering first and second facing regions facing the first and second fixed partial electrodes, respectively. | 07-26-2012 |
20120206731 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other. | 08-16-2012 |
20120257205 | TUNABLE INTERFERENCE FILTER, OPTICAL MODULE, AND PHOTOMETRIC ANALYZER - A tunable interference filter includes: a first substrate; a second substrate; a first drive electrode provided on the first substrate ; a second drive electrode provided on the second substrate; a first detection electrode provided on the first substrate; a second detection electrode provided on the second substrate, wherein the first drive electrode includes a first partial drive electrode and a second partial drive electrode, a first lead drive electrode extending from the first partial drive electrode and a second lead drive electrode extending from the second partial drive electrode are provided on the first substrate, the first detection electrode includes a first partial detection electrode and a second partial detection electrode provided along a virtual circle, a first lead detection electrode extending from the first partial detection electrode and a second lead detection electrode extending from the second partial detection electrode are provided on the first substrate. | 10-11-2012 |
20120287438 | OPTICAL FILTER, OPTICAL FILTER MODULE, AND PHOTOMETRIC ANALYZER - An optical filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided on a surface of the first substrate facing the second substrate, a second optical film provided on the second substrate and opposed to the first optical film via a gap, a first electrode provided on the surface of the first substrate facing the second substrate, and a second electrode provided on the second substrate and opposed to the first electrode, wherein a first charged body film with charge is formed on top of the first optical film, a second charged body film with charge is formed on top of the second optical film, and the first charged body film and the second charged body film are charged with the same polarity and opposed. | 11-15-2012 |
20130038876 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, OPTICAL ANALYSIS DEVICE, AND METHOD FOR MANUFACTURING VARIABLE WAVELENGTH INTERFERENCE FILTER - A variable wavelength interference filter includes a first substrate having a fixed mirror, a second substrate bonded to the first substrate and having a movable portion and a movable mirror fixed to the movable portion, a third substrate bonded to the second substrate on the side opposite to the first substrate, and an electrostatic actuator which displaces the movable portion in a substrate thickness direction, wherein a penetration hole connecting a light exiting-side space between the first substrate and the second substrate and a light incident-side space between the second substrate and the third substrate to a space outside the filter is formed, and the penetration hole is sealed with a sealant which tightly closes each space in a reduced-pressure state. | 02-14-2013 |
20130083399 | WAVELENGTH VARIABLE INTERFERENCE FILTER, OPTICAL FILTER DEVICE, OPTICAL MODULE, AND ELECTRONIC APPARATUS - A wavelength variable interference filter includes a fixed substrate, a movable substrate, a fixed reflective film provided on the fixed substrate, a movable reflection film provided on the movable substrate and opposed to the fixed reflective film via an inter-reflective film gap, a fixed electrode provided on the fixed substrate, a movable electrode provided on the movable substrate and opposed to the fixed electrode via an inter-electrode gap, a fixed charging preventing electrode provided along the outer circumferential edge of the fixed electrode and in non-contact with the fixed electrode and grounded, and a movable charging preventing electrode provided along the outer circumferential edge of the movable electrode and in non-contact with the movable electrode and grounded. | 04-04-2013 |
20130107262 | SPECTROPHOTOMETER | 05-02-2013 |
20130308134 | OPTICAL MODULE, ELECTRONIC DEVICE, FOOD ANALYZER, SPECTROSCOPIC CAMERA, DRIVING METHOD OF WAVELENGTH VARIABLE INTERFERENCE FILTER - A optical module includes, a wavelength variable interference filter which include reflection films opposite to each other and an electrostatic actuator portion including a first electrostatic actuator and a second electrostatic actuator and changing a gap between the reflection films, and a voltage control portion which controls voltage which is applied to the electrostatic actuator portion, the voltage control portion includes, a bias driving portion which applies bias voltage to the first electrostatic actuator, a gap detector, and a feedback control portion which applies feedback voltage corresponding to a detected gap amount to the second electrostatic actuator. | 11-21-2013 |
20140063501 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, ELECTRONIC APPARATUS, AND METHOD OF MANUFACTURING VARIABLE WAVELENGTH INTERFERENCE FILTER - A variable wavelength interference filter includes a first substrate having a stationary mirror, a second substrate bonded to the first substrate and provided with a movable section and a movable mirror fixed to the movable section, and a third substrate bonded to the second substrate on an opposite side to the first substrate, and is provided with a first inner space sandwiched by the first substrate and the second substrate, a first gap, through which the first inner space communicates with the outside, a second inner space sandwiched by the second substrate and the third substrate, and a second gap, through which the second inner space communicates with the outside, and the first gap and the second gap are each sealed by a sealing member. | 03-06-2014 |
20140071445 | Optical Module, Electronic Device, and Driving Method - An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films. | 03-13-2014 |
20140340686 | VARIABLE WAVELENGTH INTERFERENCE FILTER, OPTICAL MODULE, AND OPTICAL ANALYSIS DEVICE - An etalon is provided with a fixed substrate and a movable substrate opposed to the fixed substrate. The fixed substrate is provided with a first bonding surface to be bonded to the movable substrate via a bonding film and a first electrode surface on which a part of the first electrode is formed. The movable substrate is provided with a second bonding surface to be bonded to the first bonding surface via the bonding film and a second electrode surface on which a part of the second electrode is formed. In the state in which the fixed substrate and the movable substrate are bonded to each other with the bonding film, the first electrode formed on the first electrode surface and the second electrode formed on the second electrode surface have contact with each other. | 11-20-2014 |
20150029590 | OPTICAL FILTER DEVICE, OPTICAL MODULE, ELECTRONIC APPARATUS, AND MEMS DEVICE - An optical filter device includes a wavelength variable interference filter that has a fixed substrate provided with a fixed reflective film and a movable substrate provided with a movable reflective film, a casing that has an inner space for storing the wavelength variable interference filter therein, and a fixation portion that fixes the wavelength variable interference filter to the casing. In addition, the fixation portion is provided between a side surface of the fixed substrate and an inner surface of the casing. | 01-29-2015 |