Patent application number | Description | Published |
20100248595 | ABRASIVE TOOL FOR USE AS A CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER - An abrasive tool including a CMP pad conditioner having a substrate including a first major surface, a second major surface opposite the first major surface, and a side surface extending between the first major surface and the second major, wherein a first layer of abrasive grains is attached to the first major surface and a second layer of abrasive grains is attached to the second major surface. The conditioner further includes a first sealing member extending in a peripheral direction along a portion of the side surface of the substrate. | 09-30-2010 |
20100330886 | Corrosion-Resistant CMP Conditioning Tools and Methods for Making and Using Same - An abrasive tool for conditioning CMP pads includes abrasive grains coupled to a substrate through a metal bond and a coating, e.g., a fluorine-doped nanocomposite coating. The abrasive grains can be arranged in a self-avoiding random distribution. In one implementation, an abrasive tool includes a coated plate and a coated abrasive article that has two abrading surfaces. Other implementations related to a process for producing an abrasive tool that includes a coating at one or more of its surfaces. Also described are methods for dressing a CMP pad. | 12-30-2010 |
20120266543 | VITRIOUS BONDED ABBRASIVE - A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 μm in diameter. Seventy percent of the pores are in a range of between about 40 μm and about 500 μm and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product. | 10-25-2012 |
20120279139 | Resin Bonded Abrasive - A superabrasive resin product includes a superabrasive grain component, an oxide component, and a continuous phase defining a network of interconnected pores. The oxide component consists of an oxide of a lanthanoid, and the continuous phase includes a thermoplastic polymer component. The superabrasive grain component and the oxide component are distributed in the continuous phase. | 11-08-2012 |
20130078895 | ABRASIVE TOOL FOR USE AS A CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER - An abrasive tool including a CMP pad conditioner having a substrate including a first major surface, a second major surface opposite the first major surface, and a side surface extending between the first major surface and the second major, wherein a first layer of abrasive grains is attached to the first major surface and a second layer of abrasive grains is attached to the second major surface. The conditioner further includes a first sealing member extending in a peripheral direction along a portion of the side surface of the substrate. | 03-28-2013 |
20130316630 | TOOL FOR USE WITH DUAL-SIDED CHEMICAL MECHANICAL PLANARIZATION PAD CONDITIONER - A tool includes a holder configured to couple to a dual-sided chemical mechanical planarization (CMP) pad conditioner. The holder has a magnetic material, a first magnetic field strength (H | 11-28-2013 |
20140182214 | Abrasive Articles and Method of Forming Same - An abrasive article including a bonded abrasive body having a bond material made of a vitrified material, abrasive particles comprising a first type of superabrasive material contained in the bond material, a porosity of at least about 50 vol % of the total volume of the bonded abrasive body, and a ΔCTE of not greater than about 5.5 ppm/° C., wherein ΔCTE is defined as a difference between a CTE of the bond material and a CTE of the abrasive particles. | 07-03-2014 |
20140234568 | SAPPHIRE SUBSTRATE - A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm | 08-21-2014 |
20140290149 | Vitreous Bonded Abrasive - A vitrified superabrasive product includes a superabrasive component and a vitrified bond component in which the superabrasive component is dispersed. The vitrified bond includes an oxide of a lanthanoid. Additionally, the vitrified bond component defines pores that can be essentially all less than 800 μm in diameter. Seventy percent of the pores are in a range of between about 40 μm and about 500 μm and have an average aspect ratio less than about 2. The porosity is in a range of between about 50% and about 90% of the total volume of the superabrasive product. | 10-02-2014 |
20140335308 | SAPPHIRE SUBSTRATE - A sapphire substrate includes a generally planar surface having a crystallographic orientation selected from the group consisting of a-plane, r-plane, m-plane, and c-plane orientations, and having a nTTV of not greater than about 0.037 μm/cm | 11-13-2014 |
20150059256 | ABRASIVE ARTICLE AND METHOD OF FORMING - An abrasive article including a bonded abrasive body including a bond material having a metal, abrasive particles contained within the bond material, and a filler blend including fine filler particles and coarse filler particles and defining a filler particle size ratio (Ff/Fc) of not greater than about 0.97, where Ff represents the average particle of the fine filler particles and Fc represents the average particle size of the coarse filler particles. | 03-05-2015 |
20150183086 | ABRASIVE ARTICLE AND METHOD OF FORMING - A bonded abrasive article suitable for processing hard materials such as sapphire. In an embodiment, an abrasive article includes a bonded abrasive body including a bond material comprising a metal, abrasive particles contained within the bond material having an average particle size of not greater than about 20 μm, and a pore size standard deviation of not greater than about 16 μm. An abrasive article can also include a bonded abrasive body having a bond material comprising metal, abrasive particles contained within the bond material having an average particle size of not greater than about 20 μm, and an average pore size of not greater than about 110 μm. | 07-02-2015 |