Patent application number | Description | Published |
20090251678 | STAGE UNIT, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD - A stage unit includes the following elements. A stator includes a first coil array in which first coils extending in the x direction are arranged in the y direction, a second coil array in which second coils extending in the x direction are arranged in the y direction and which is located next to the first coil array in the x direction, and a third coil array in which third coils extending in the y direction are arranged in the x direction and which covers the first and second coil arrays. A movable member moves above the stator. A controller controls driving of the movable member by allowing current amplifiers to supply current to the coils included in the first, second, and third coil arrays. A switch is capable of connecting the first coil to the second coil. | 10-08-2009 |
20120126459 | DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, METHOD OF MANUFACTURING DEFLECTING APPARATUS, AND METHOD OF MANUFACTURING DRAWING APPARATUS - A drawing apparatus includes a plurality of charged particle optical elements that are sequentially passed through by a plurality of charged particle beams and performs drawing on a substrate with the charged particle beams. The apparatus further includes a deflector array which includes a plurality of deflectors disposed for respective one or more charged particle beams, each of which aligning corresponding one or more charged particle beams between two of the plurality of charged particle optical elements, a plurality of devices configured to respectively apply a plurality of potentials to the deflector array, and a connector configured to connect each of a plurality of electrodes included in the deflector array to one of the plurality of devices and connect electrodes, to which an equal potential is applied, to each other. Number of devices included in the plurality of devices is less than number of electrodes included in the deflector array. | 05-24-2012 |
20130063708 | DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a drawing apparatus Including a generation device configured to generate drawing data, a blanking device configured to blank a bears, and a blanking controller includes a first storage device, a second, storage device, and a third storage device configured to respectively store the drawing data generated by the generation device, and being configured to control operations of the first storage device, the second storage device, and the third storage device so that an operation of storing the drawing data generated by the generation device in a selected one of the first storage device and the second storage device, and an operation of reading out the drawing data stored in the other of the first storage device and the second storage device, and storing the readout drawing data in the third storage device are executed in parallel. | 03-14-2013 |
20130175453 | DRAWING APPARATUS, METHOD OF MANUFACTURING ARTICLE, AND INFORMATION PROCESSING APPARATUS - The present invention provides a drawing apparatus including a plurality of drawing units each of which is configured to perform drawing on a substrate with a charged particle beam, a plurality of first processors configured to be selectively connectable to each of the plurality of drawing units, an information processor configured to determine, from the plurality of first processors, a first processor to be connected to a first drawing unit among the plurality of drawing units, based on drawing data, and a connection unit configured to connect the determined first processor to the first drawing unit. | 07-11-2013 |
20140057212 | TRANSMISSION APPARATUS, DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a transmission apparatus for transmitting a light signal between an outside and an inside of a vacuum chamber, comprising a plurality of first transmission lines configured to transmit a plurality of light signals outside the vacuum chamber, a plurality of second transmission lines configured to transmit the plurality of light signals inside the vacuum chamber, and a light-transmissive member configured to transmit the light signals between the plurality of first transmission lines and the plurality of second transmission lines, wherein the light-transmissive member has a structure formed to isolate light paths of the plurality of light signals between the plurality of first transmission lines and the plurality of second transmission lines from each other. | 02-27-2014 |
20140302443 | DRAWING APPARATUS, AND METHOD OF MANUFACTURING ARTICLE - The present invention provides a drawing apparatus which performs drawing on a substrate with a charged particle beam, including a transmission unit including a plurality of channels and configured to transmit drawing data via the plurality of channels, a plurality of storages respectively corresponding to the plurality of channels, and configured to respectively store the drawing data transmitted via the plurality of channels, and a controller ( | 10-09-2014 |
20150072445 | LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE - A lithography apparatus which performs writing on a substrate using a charged particle beam is provided. The apparatus comprises a plurality of column units each of which comprises a charged particle optical system, a plurality of stages each of which is movable while holding the substrate, and a controller. The controller moves the stages in synchronization with each other in a positional relationship corresponding to an arrangement of the column units, and performs writing on substrates held in the stages simultaneously. | 03-12-2015 |
20150092175 | LITHOGRAPHY APPARATUS, METHOD OF MEASURING SURFACE POSITION, AND METHOD OF PRODUCING DEVICE - An apparatus includes a conductive holding part configured to hold an insulating material, and a capacitance sensor configured to generate an electric field between the capacitance sensor and the holding part. The apparatus determines a surface position of a surface of the insulating material based on information of an output value of the capacitance sensor obtained in a case where the insulating material is located in the electric field and information associated with capacitance of the insulating material, and then adjusts the surface position of the insulating material at a pattern formation position. | 04-02-2015 |