Patent application number | Description | Published |
20080251108 | Sulfuric Acid Recycling Type Cleaning System and a Sulfuric Acid Recycling Type Persulfuric Acid Supply Apparatus - If incorporated in a cleaning system using persulfuric acid, the invention serves for continuous cleaning while increasing the persulfuric acid concentration adequately to ensure enhanced cleaning performance. The invention provides a feeding apparatus that feeds persulfuric acid to a cleaning apparatus. The cleaning system uses an electrolysis reactor | 10-16-2008 |
20100175714 | SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD - A substrate processing apparatus and a substrate processing method, with which a resist can be removed satisfactorily from the substrate and a processing solution used for removing the resist can be recycled, are provided. The substrate processing apparatus includes: a substrate holding means holding a substrate; a peroxosulfuric acid generating means generating a peroxosulfuric acid using sulfuric acid; a mixing means mixing the peroxosulfuric acid generated by the peroxosulfuric acid generating means and sulfuric acid of higher temperature and higher concentration than the sulfuric acid used in the peroxosulfuric acid generating means; and a discharging means discharging, toward the substrate held by the substrate holding means, the mixed solution of the peroxosulfuric acid and the sulfuric acid mixed by the mixing means as a processing solution for removing a resist from the substrate. | 07-15-2010 |
20100248959 | THERMOSENSITIVE RECORDING MEDIUM - The present invention provides a thermosensitive recording medium, which has a satisfactory color developing sensitivity, an excellent general printability (surface strength) and an excellent anti-sticking property. The thermosensitive recording layer of the thermosensitive recording medium of the present invention contains an alkylketene dimer. Without forming a protecting layer, the thermosensitive recording medium of the present invention is superior in color developing sensitivity, general printability (surface strength) and anti-sticking property. | 09-30-2010 |
20110017606 | ELECTROLYSIS METHOD - A wear of an electrode is prevented as much as possible, thereby efficiently electrolyzing a sulfuric acid solution and the like. An electrolysis method includes: passing an electrolytic solution through an electrolysis cell including at least a pair of an anode and a cathode; and supplying the electrodes with an electric power, so as to electrolyze the electrolytic solution, wherein a viscosity of the electrolytic solution is set in a range in response to a current density upon the electric power supply to carry out the electrolysis. The viscosity of a sulfuric acid solution as the electrolytic solution is equal to or less than 10 cP when the current density is equal to or less than 50 A/dm | 01-27-2011 |
20110120857 | FUNCTIONAL SOLUTION SUPPLY SYSTEM - A sulfuric acid electrolyte is produced efficiently as a functional solution and persulfuric acid produced by electrolysis is supplied efficiently to a use side while suppressing self-decomposition thereof. | 05-26-2011 |
20110130281 | THERMOSENSITIVE RECORDING MEDIUM - The present invention provides a thermosensitive recording medium with excellent color developing sensitivity, moist heat resistance and plasticizer resistance, as well as excellent heat resistance, background coloring, light resistance and the like in the printed image. | 06-02-2011 |
20110247929 | DIAMOND ELECTRODE AND METHOD FOR MANUFACTURING DIAMOND ELECTRODE - A diamond electrode having an oxidation resistant diamond film which will not separate from the electrode during electrolysis with highly oxidizing materials. The thickness of the diamond film is 20 pm or more and the diamond film should preferably cover opposite side surfaces of a substrate in such a manner as to also cover end surfaces | 10-13-2011 |
20130206176 | Cleaning system and cleaning method - Provided is a cleaning system including an electrolysis unit that electrolyses a sulphuric acid solution, thereby generating persulphuric acid, an electrolytic solution storage unit that stores the electrolyzed sulphuric acid solution, a first circulation line that circulates the sulphuric acid solution between the electrolysis unit and the electrolytic solution storage unit, a cleaning device that cleans a material subject to cleaning by using the sulphuric acid solution containing the persulphuric acid, a heating unit that heats the sulphuric acid solution used for the cleaning device, a waste liquid storage unit that stores the sulphuric acid solution used by the cleaning device, a second circulation line that transports the sulphuric acid solution electrolyzed by the electrolysis unit via the heating unit to the cleaning device, and circulates the sulphuric acid solution used by the cleaning device for the cleaning via the waste liquid storage unit, and a third circulation line that transports the sulphuric acid solution electrolyzed by the electrolysis unit to the waste liquid storage unit without passing the sulphuric acid solution through the cleaning device, thereby circulating the sulphuric acid solution. | 08-15-2013 |
20140116464 | METHOD FOR CLEANING METAL GATE SEMICONDUCTOR - Provided is a method for cleaning a metal gate semiconductor, by which a resist adhering to a semiconductor can be effectively stripped while etching of metal gates is suppressed. The method includes an ashing step (step s | 05-01-2014 |