Wajda
Cory Wajda, Albany, NY US
Patent application number | Description | Published |
---|---|---|
20150221550 | INTEGRATION OF ALD BARRIER LAYER AND CVD Ru LINER FOR VOID-FREE Cu FILLING - Methods for integration of atomic layer deposition (ALD) of barrier layers and chemical vapor deposition (CVD) of Ru liners for Cu filling of narrow recessed features for semiconductor devices are disclosed in several embodiments. According to one embodiment, the method includes providing a substrate containing a recessed feature, depositing a conformal barrier layer by ALD in the recessed feature, where the barrier layer contains TaN or TaAlN, depositing a conformal Ru liner by CVD on the barrier layer, and filling the recessed feature with Cu metal. | 08-06-2015 |
Mark Wajda, Toronto CA
Patent application number | Description | Published |
---|---|---|
20130103653 | SYSTEM AND METHOD FOR OPTIMIZING THE LOADING OF DATA SUBMISSIONS - A system and method for detecting changes in data records based on summary values calculated on input data and existing data in a database is provided. An input data record including indicative data and financial data may be received. The indicative data may be normalized. A summary value may be calculated based on the normalized data to determine if any differences between the input record and existing data exist. If an existing summary value corresponding to the input record does not exist, the calculated summary value and financial data may be stored. If an existing summary value corresponding to the input record exists, the calculated summary value and the existing summary value may be compared to determine if they are equivalent. The calculated summary value and financial data may be stored if the summary values are not equivalent. The financial data may be stored if the summary values are equivalent. | 04-25-2013 |
Tom Wajda, Oshawa CA
Patent application number | Description | Published |
---|---|---|
20140237765 | SURFACE CLEANING APPARATUS - A surface cleaning apparatus is provided wherein at least one of an upstream air plenum that is positioned upstream of the pre-motor filter, and a downstream air plenum that is positioned downstream of the pre-motor filter comprises an end wall spaced from the pre-motor filter and comprises a first portion having an air flow port and a second portion proximate the outer perimeter of the pre-motor filter, wherein the first portion and the second portion meet at a first juncture that extends at an angle to the first portion and the second portion. | 08-28-2014 |
Tomasz F. Wajda, Oshawa CA
Patent application number | Description | Published |
---|---|---|
20150091292 | PIPE SEALING TOOL AND METHODS FOR USE - A pipe connecting tool having a pipe joining material section including a pipe joining material container, a conduit from the pipe joining material container to a delivery nozzle, and a heater in thermal communication with at least a portion of the pipe joining material section. The pipe connecting tool may include one or both of a sensor for determining when a cavity has been filled by pipe joining material ejected from the delivery nozzle and a drill module. | 04-02-2015 |