Patent application number | Description | Published |
20130224889 | CHARGED PARTICLE BEAM APPARATUS, THIN FILM FORMING METHOD, DEFECT CORRECTION METHOD AND DEVICE FORMING METHOD - A charged particle beam apparatus is provided that enables faster semiconductor film deposition than the conventional deposition that uses silicon hydrides and halides as source gases. The charged particle beam apparatus includes a charged particle source | 08-29-2013 |
20130248483 | METHOD FOR FABRICATING EMITTER - A method for fabricating a sharpened needle-like emitter, the method including: electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; performing a second etching in which the tip portion is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion at a predetermined number or less; and heating the emitter material to arrange the atoms at the leading edge of the tip portion of the sharpened part in a pyramid shape. | 09-26-2013 |
20140246397 | METHOD FOR FABRICATING EMITTER - A method for fabricating a sharpened needle-like emitter, the method including: electrolytically polishing an end portion of an electrically conductive emitter material so as to be tapered toward a tip portion thereof; performing a first etching in which the electrolytically polished part of the emitter material is irradiated with a charged-particle beam to form a pyramid-like sharpened part having a vertex including the tip portion; performing a second etching in which the tip portion is further sharpened through field-assisted gas etching, while observing a crystal structure at the tip portion by a field ion microscope and keeping the number of atoms at a leading edge of the tip portion at a predetermined number or less; and heating the emitter material to arrange the atoms at the leading edge of the tip portion of the sharpened part in a pyramid shape. | 09-04-2014 |
20140291542 | EMITTER STRUCTURE, GAS ION SOURCE AND FOCUSED ION BEAM SYSTEM - There is provided an emitter structure, a gas ion source including the emitter structure, and a focused ion beam system including the gas ion source. The emitter structure includes a pair of conductive pins which are fixed to a base member, a filament which is connected between the pair of conductive pins, and an emitter which is connected to the filament and has a sharp tip. A supporting member is fixed to the base material, and the emitter is connected to the supporting member. | 10-02-2014 |
20150047079 | Iridium Tip, Gas Field Ion Source, Focused Ion Beam Apparatus, Electron Source, Electron Microscope, Electron Beam Applied Analysis Apparatus, Ion-Electron Multi-Beam Apparatus, Scanning Probe Microscope, and Mask Repair Apparatus - There is provided an iridium tip including a pyramid structure having one {100} crystal plane as one of a plurality of pyramid surfaces in a sharpened apex portion of a single crystal with <210> orientation. The iridium tip is applied to a gas field ion source or an electron source. The gas field ion source and/or the electron source is applied to a focused ion beam apparatus, an electron microscope, an electron beam applied analysis apparatus, an ion-electron multi-beam apparatus, a scanning probe microscope or a mask repair apparatus. | 02-12-2015 |
20150053866 | Repair Apparatus - There is provided a repair apparatus including a gas field ion source which includes an ion generation section including a sharpened tip, a cooling unit which cools the tip, an ion beam column which forms a focused ion beam by focusing ions of a gas generated in the gas field ion source, a sample stage which moves while a sample to be irradiated with the focused ion beam is placed thereon, a sample chamber which accommodates at least the sample stage therein, and a control unit which repairs a mask or a mold for nano-imprint lithography, which is the sample, with the focused ion beam formed by the ion beam column. The gas field ion source generates nitrogen ions as the ions, and the tip is constituted by an iridium single crystal capable of generating the ions. | 02-26-2015 |
20150162160 | FOCUSED ION BEAM APPARATUS - A focused ion beam apparatus has an ion source chamber in which is disposed an emitter for emitting ions. The surface of the emitter is formed of a precious metal, such as platinum, palladium, iridium, rhodium or gold. A gas supply unit supplies nitrogen gas to the ion source chamber so that the nitrogen gas adsorbs on the surface of the emitter. An extracting electrode is spaced from the emitter, and a voltage is applied to the extracting electrode to ionize the adsorbed nitrogen gas and extract nitrogen ions in the form of an ion beam. A temperature control unit controls the temperature of the emitter. | 06-11-2015 |
20150357147 | EMITTER STRUCTURE, GAS ION SOURCE AND FOCUSED ION BEAM SYSTEM - A focused ion beam system includes a gas ion source and an emitter structure. The emitter structure includes a pair of conductive pins fixed to a base member, a filament connected between the pair of conductive pins, and an emitter which has a tip end with one atom or three atoms and which is connected to the filament. A supporting member is fixed to the base material, and the emitter is connected to the supporting member. | 12-10-2015 |
Patent application number | Description | Published |
20130299509 | AUTOMATIC VENDING MACHINE - An automatic vending machine for vending a product selected by a user includes: an automatic vending machine cabinet having an opening that is opened and closed by a door: a plurality of product racks that is provided in the automatic vending machine cabinet, each product rack including a plurality of product storage columns each storing products ordered in a line; and a product storage device that allows a user to take out one product at a time by holding a body of the product, when the door is opened to open the opening. | 11-14-2013 |
20150060479 | COMMODITY STORAGE DEVICE - A commodity storage device has commodity storage columns defining respective commodity storage passages in each of which commodities are stored upright in a line. The commodity storage device includes: first gate members, each of which is provided turnably in such a manner as to enter and retreat from the corresponding commodity storage passage; second gate members, each of which is provided so as to be able to turn in conjunction with the corresponding first gate member in such a manner as to enter and retreat from the corresponding commodity storage passage; and flapper members, each of which is provided turnably on a side wall forming the corresponding commodity storage passage in such a manner as to enter and retreat from the commodity storage passage. | 03-05-2015 |
20150213669 | PRODUCT STORAGE DEVICE - A product storage device includes: a product rack including a plurality of product storage columns, the product storage column having a product storage path; a main gate member provided the product storage columns to be rotatable in a form of moving into or out of the product storage path; and a restraining unit including a guide member extending along a direction of arranging the product storage columns, and a plurality of piece members slidably housed in a housing region of the guide member. The restraining unit in a normal state restrains all the main gate members from being retreated from the product storage path. The restraining unit allows any one main gate member to be retreated from the product storage path and restrain the other main gate members from being retreated from the product storage path when extraction of a product in the product rack is allowed. | 07-30-2015 |