Patent application number | Description | Published |
20100238572 | DISPLAY DEVICE WITH OPENINGS BETWEEN SUB-PIXELS AND METHOD OF MAKING SAME - An electromechanical systems device includes a plurality of supports disposed over a substrate and a deformable reflective layer disposed over the plurality of supports. The deformable reflective layer includes a plurality of substantially parallel columns extending in a first direction. Each column has one or more slots extending in a second direction generally perpendicular to the first direction. The slots can be created at boundary edges of sub-portions of the columns so as to partially mechanically separate the sub-portions without electrically disconnecting them. A method of fabricating an electromechanical device includes depositing an electrically conductive deformable reflective layer over a substrate, removing one or more portions of the deformable layer to form a plurality of electrically isolated columns, and forming at least one crosswise slot in at least one of the columns. | 09-23-2010 |
20110169724 | INTERFEROMETRIC PIXEL WITH PATTERNED MECHANICAL LAYER - Interferometric modulators and methods of making the same are disclosed. In one embodiment, an interferometric display includes a sub-pixel having a membrane layer with a void formed therein. The void can be configured to increase the flexibility of the membrane layer. The sub-pixel can further include an optical mask configured to hide the void from a viewer. In another embodiment, an interferometric display can include at least two movable reflectors wherein each movable reflector has a different stiffness but each movable reflector has substantially the same effective coefficient of thermal expansion. | 07-14-2011 |
20110235155 | MECHANICAL LAYER AND METHODS OF SHAPING THE SAME - A method of shaping a mechanical layer is disclosed. In one embodiment, the method comprises depositing a support layer, a sacrificial layer and a mechanical layer over a substrate, and forming a support post from the support layer. A kink is formed adjacent to the support post in the mechanical layer. The kink comprises a rising edge and a falling edge, and the kink can be configured to control the shaping and curvature of the mechanical layer upon removal of the sacrificial layer. | 09-29-2011 |
20110249315 | MECHANICAL LAYER AND METHODS OF FORMING THE SAME - This disclosure provides mechanical layers and methods of forming the same. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer having an actuated position and a relaxed position. The mechanical layer is spaced from the substrate to define a collapsible gap. The gap is in a collapsed condition when the mechanical layer is in the actuated position and in a non-collapsed condition when the mechanical layer is in the relaxed position. The mechanical layer includes a reflective layer, a conductive layer, and a supporting layer. The supporting layer is positioned between the reflective layer and the conductive layer and is configured to support the mechanical layer. | 10-13-2011 |
20120056855 | INTERFEROMETRIC DISPLAY DEVICE - This disclosure provides systems, methods, and apparatus including one or more capacitance control layers to decrease the magnitude of an electric field between a movable layer and an electrode. In one aspect, a display device includes an electrode, a movable layer, and a capacitance control layer. At least a portion of the movable layer can be configured to move toward the electrode when a voltage is applied across the electrode and the movable layer and an interferometric cavity can be disposed between the movable layer and the first electrode. The capacitance control layer can be configured to decrease the magnitude of an electric field between the movable layer and the electrode when the voltage is applied across the movable layer and the electrode. | 03-08-2012 |
20120242638 | DIELECTRIC SPACER FOR DISPLAY DEVICES - This disclosure provides systems, methods and apparatus for forming spacers on a substrate and building an electromechanical device over the spacers and the substrate. In one aspect, a raised anchor area is formed over the spacer by adding layers that result in a high point above the substrate. The high point can protect the movable sections of the MEMS device from contact with a backplate. | 09-27-2012 |
20120248478 | PIXEL VIA AND METHODS OF FORMING THE SAME - This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, depositing a mechanical layer over the optical stack, and anchoring the mechanical layer over the optical stack at each corner of each pixel. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via in the dielectric layer electrically connecting the stationary electrode to the black mask, the via disposed at a corner of the first pixel, offset from where the mechanical layer is anchored over the optical stack in an optically non-active area of the first pixel. | 10-04-2012 |
20120249558 | PIXEL VIA AND METHODS OF FORMING THE SAME - This disclosure provides systems, methods and apparatuses for pixel vias. In one aspect, a method of forming an electromechanical device having a plurality of pixels includes depositing an electrically conductive black mask on a substrate at each of four corners and along at least one edge region of each pixel, depositing a dielectric layer over the black mask, depositing an optical stack including a stationary electrode over the dielectric layer, and depositing a mechanical layer over the optical stack. The method further includes providing a conductive via in a first pixel of the plurality of pixels, the via disposed in the dielectric layer and electrically connecting the stationary electrode to the black mask, the via disposed in a position along an edge of the first pixel, spaced offset from the edge of the first pixel in a direction towards the center of the first pixel. | 10-04-2012 |
20130057558 | MECHANICAL LAYER AND METHODS OF MAKING THE SAME - This disclosure provides systems, methods and apparatus for controlling a mechanical layer. In one aspect, an electromechanical systems device includes a substrate and a mechanical layer positioned over the substrate to define a gap. The mechanical layer is movable in the gap between an actuated position and a relaxed position, and includes a mirror layer, a cap layer, and a dielectric layer disposed between the mirror layer and the cap layer. The mechanical layer is configured to have a curvature in a direction away from the substrate when the mechanical layer is in the relaxed position. In some implementations, the mechanical layer can be formed to have a positive stress gradient directed toward the substrate that can direct the curvature of the mechanical layer upward when the sacrificial layer is removed. | 03-07-2013 |
20130088498 | ELECTROMECHANICAL SYSTEMS DEVICE WITH NON-UNIFORM GAP UNDER MOVABLE ELEMENT - Systems, methods and apparatus are provided for electromechanical systems devices having a non-uniform gap under a mechanical layer. An electromechanical systems device includes a movable element supported at its edges over a substrate by at least two support structures. The movable element can be spaced from the substrate by a gap having two or more different heights in two or more corresponding distinct regions. The gap has a first height in a first region below the gap, such as an active area of the device, and a second height in a second region adjacent the support structure. In an interferometric modulator implementation, the second region can be encompasses within an anchor region with a black mask. | 04-11-2013 |
20130100145 | ELECTROMECHANICAL SYSTEMS DEVICE - This disclosure provides systems, methods, and apparatus for EMS devices. In one aspect, an EMS device includes at least one movable layer configured to move relative to one or more electrodes. The at least one movable layer can include a first conductive layer, a second conductive layer, and a non-conductive layer disposed between the first conductive layer and the second conductive layer. In some implementations, the movable layer can include at least one conductive via electrically connecting the first conductive layer and the second conductive layer through the non-conductive layer. | 04-25-2013 |
20130100518 | TUNING MOVABLE LAYER STIFFNESS WITH FEATURES IN THE MOVABLE LAYER - This disclosure provides systems, methods and apparatus for an electromechanical systems device. In one aspect, an electromechanical systems device may include a substrate and a movable layer positioned apart from the substrate. The movable layer and the substrate may define a cavity. The movable layer may be movable to increase the size of the cavity or to decrease the size of the cavity. The movable layer also may include a first anchor point attaching the movable layer to the substrate and a first feature associated with the first anchor point. The first feature may include a protrusion of the movable layer into or out from the cavity. | 04-25-2013 |
20140071139 | IMOD PIXEL ARCHITECTURE FOR IMPROVED FILL FACTOR, FRAME RATE AND STICTION PERFORMANCE - Pixels that include display elements that are configured with different structural dimensions corresponding to the color of light they provide are disclosed. In one implementation, a display device includes an array having a plurality of electromechanical pixels disposed on a substrate, each pixel including at least a first display element and a second display element. Each of the first and second display elements interferometrically modulating light by moving a reflective element between a relaxed position spaced apart from the substrate to an actuated position further away from the substrate than the relaxed position by applying a voltage across the reflective element and a stationary electrode. The stationary electrode of each display element is sized to provide actuation of the movable reflective element using the same actuation voltage even though the electrical gap through which the reflective element moves is different within a pixel. | 03-13-2014 |
20140078185 | SYSTEMS, DEVICES, AND METHODS FOR IMPROVING IMAGE QUALITY OF A DISPLAY - This disclosure provides systems, methods and apparatus for writing data to a display. In one aspect, the display includes an array of display elements arranged at the intersection of a plurality of common lines and segment lines. The display also includes a common driver and a segment driver coupled to the common lines and segment lines. According to one aspect, the display includes a greater number of segment lines than columns of display elements in the array. According to another aspect, the display may also include a first number of display element segment electrodes that are coupled to each other along a first common line, and a second number of display element segment electrodes coupled to each other along a second common line, where the first number is different than the second number. | 03-20-2014 |
20140168223 | PIXEL ACTUATION VOLTAGE TUNING - This disclosure provides systems, methods and apparatus for electromechanical systems displays. In one aspect, the display can include a plurality of electromechanical display elements including a first set of electromechanical display elements and a second set of electromechanical display elements. Each electromechanical display element can include a common electrode and a segment electrode. Each of the segment electrodes of the first set of electromechanical display elements can have a first area located under the common electrodes of the first set. Each of the segment electrodes of the second set of electromechanical display elements can have a second area smaller than the first area located under the common electrodes of the second set. In some implementations, an actuation voltage of each electromechanical display element of the first set is approximately the same as an actuation voltage of each electromechanical display element of the second set. | 06-19-2014 |
20140192060 | CONTROLLING MOVABLE LAYER SHAPE FOR ELECTROMECHANICAL SYSTEMS DEVICES - Systems, methods and apparatus are provided for controlling launch effects of movable layers in electromechanical systems (EMS) devices. First and second EMS devices with first and second step creating layers are positioned over a substrate and spaced, by different gaps, from the movable layers of the EMS devices. The movable layers of the first and second EMS devices include steps having different heights and/or different edge spacing from the center of an anchoring region of each EMS device. The different steps can provide different launch effects for different EMS devices, and if the same thickness of sacrificial material is used for the different devices, the different launch effects can be responsible for different gap heights in the unbiased conditions. | 07-10-2014 |