Patent application number | Description | Published |
20120187524 | DOPED OXIDE FOR SHALLOW TRENCH ISOLATION (STI) - The embodiments described provide methods and structures for doping oxide in the STIs with carbon to make etch rate in the narrow and wide structures equal and also to make corners of wide STIs strong. Such carbon doping can be performed by ion beam (ion implant) or by plasma doping. The hard mask layer can be used to protect the silicon underneath from doping. By using the doping mechanism, the even surface topography of silicon and STI enables patterning of gate structures and ILD | 07-26-2012 |
20120190167 | MECHANISMS OF DOPING OXIDE FOR FORMING SHALLOW TRENCH ISOLATION - The embodiments described provide mechanisms for doping oxide in the STIs with carbon to make etch rate in the narrow and wide structures equal and also to make corners of wide STIs strong. Such carbon doping can be performed by ion beam (ion implant) or by plasma doping. The hard mask layer can be used to protect the silicon underneath from doping. By using the doping mechanism, the even surface topography of silicon and STI enables patterning of gate structures and ILD0 gapfill for advanced processing technology. | 07-26-2012 |
20130017660 | SELF-ALIGNED SOURCE AND DRAIN STRUCTURES AND METHOD OF MANUFACTURING SAMEAANM Fang; ZiweiAACI Baoshan TownshipAACO TWAAGP Fang; Ziwei Baoshan Township TWAANM Zhang; YingAACI Hsinchu CityAACO TWAAGP Zhang; Ying Hsinchu City TWAANM Xu; Jeff J.AACI Jhubei CityAACO TWAAGP Xu; Jeff J. Jhubei City TW - An integrated circuit device and method for manufacturing the integrated circuit device are disclosed. In an example, the method includes forming a gate structure over a substrate; forming a doped region in the substrate; performing a first etching process to remove the doped region and form a trench in the substrate; and performing a second etching process that modifies the trench by removing portions of the substrate. | 01-17-2013 |
20140120693 | METHOD OF MAKING A SHALLOW TRENCH ISOLATION (STI) STRUCTURES - A method of making shallow trench isolation (STI) structures includes forming a first opening in a substrate and filling the first opening with silicon oxide to form a first STI structure. The method further includes doping a top surface of the silicon oxide with carbon, wherein a bottom portion of the silicon oxide is free of carbon. The method further includes planarizing the silicon oxide so that the top surface of the silicon oxide is at substantially a same level as a surface of the substrate surrounding the silicon oxide. | 05-01-2014 |
20150028355 | Method of Forming A Semiconductor Device - A semiconductor device having dislocations and a method of fabricating the semiconductor device is disclosed. The exemplary semiconductor device and method for fabricating the semiconductor device enhance carrier mobility. The method includes providing a substrate having an isolation feature therein and two gate stacks overlying the substrate, wherein one of the gate stacks is atop the isolation feature. The method further includes performing a pre-amorphous implantation process on the substrate. The method further includes forming a stress film over the substrate. The method also includes performing an annealing process on the substrate and the stress film. | 01-29-2015 |
20150072487 | Semiconductor Device and Method of Forming the Same - A method of forming a semiconductor device includes forming a NMOS gate structure over a substrate. The method further includes forming an amorphized region in the substrate adjacent to the NMOS gate structure. The method also includes forming a lightly doped source/drain (LDD) region in the amorphized region. The method further includes depositing a stress film over the NMOS gate structure, performing an annealing process, and removing the stress film. | 03-12-2015 |
20150099342 | Mechanism of Forming a Trench Structure - Forming a shallow trench isolation (STI) structure filled with a flowable dielectric layer involves performing an implant to generate passages in the upper portion of the flowable dielectric layer. The passages enable oxygen source in a thermal anneal to reach the flowable dielectric layer near the bottom of the STI structure during the thermal anneal to convert a SIONH network of the reflowable dielectric layer to a network of SiOH and SiO. The passages also help to provide escape paths for by-products produced during another thermal anneal to convert the network of SiOH and SiO to SiO | 04-09-2015 |
20150111359 | Source/Drain Junction Formation - An embodiment method of forming a source/drain region for a transistor includes forming a recess in a substrate, epitaxially growing a semiconductor material in the recess, amorphizing the semiconductor material, and doping the semiconductor material to form a source/drain region. In an embodiment, the doping utilizes either phosphorus or boron as the dopant. Also, the amorphizing and the doping may be performed simultaneously. The amorphizing may be performed at least in part by doping with helium. | 04-23-2015 |