Top Inventors for class "Coating apparatus" |
Rank | Inventor's name | Country | City/State | Last publication | # of patent apps in this class |
1 | Shao-Kai Pei | TW | Tu-Cheng | Jan 02, 2014 / 20140002429 - SYSTEM AND METHOD FOR SETTING BACKGROUND IMAGE OF DISPLAY MODULE | 41 |
2 | John M. White | US | Hayward, CA | Jun 22, 2017 / 20170178867 - GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES | 30 |
3 | Soo Young Choi | US | Fremont, CA | Sep 15, 2022 / 20220293793 - PROCESS TO REDUCE PLASMA INDUCED DAMAGE | 21 |
4 | David K. Carlson | US | San Jose, CA | May 05, 2016 / 20160126322 - METHOD AND STRUCTURE TO IMPROVE FILM STACK WITH SENSITIVE AND REACTIVE LAYERS | 17 |
5 | Robin L. Tiner | US | Santa Cruz, CA | Jul 21, 2022 / 20220228616 - FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT | 17 |
6 | Joseph M. Ranish | US | San Jose, CA | Dec 23, 2021 / 20210398793 - SIMPLIFIED LAMP DESIGN | 13 |
7 | Shunpei Yamazaki | JP | Tokyo | Sep 15, 2022 / 20220293795 - SEMICONDUCTOR DEVICE | 13 |
8 | Joseph Yudovsky | US | Campbell, CA | Dec 09, 2021 / 20210384063 - Apparatus and Methods for Wafer Chucking on a Susceptor for ALD | 13 |
9 | Juan Carlos Rocha-Alvarez | US | San Carlos, CA | Mar 31, 2022 / 20220102179 - POWER SUPPLY SIGNAL CONDITIONING FOR AN ELECTROSTATIC CHUCK | 13 |
10 | Hitoshi Kato | JP | Iwate | Jul 21, 2022 / 20220230852 - PLASMA PROCESSING APPARATUS | 13 |
11 | Mehmet Tugrul Samir | US | Mountain View, CA | May 19, 2016 / 20160138188 - MULTIZONE CONTROL OF LAMPS IN A CONICAL LAMPHEAD USING PYROMETERS | 12 |
12 | Dmitry Lubomirsky | US | Cupertino, CA | Sep 15, 2022 / 20220293396 - METHODS AND APPARATUS FOR SYMMETRICAL HOLLOW CATHODE ELECTRODE AND DISCHARGE MODE FOR REMOTE PLASMA PROCESSES | 12 |
13 | Satheesh Kuppurao | US | San Jose, CA | Nov 17, 2016 / 20160336205 - ABSORBING LAMPHEAD FACE | 11 |
14 | Beom Soo Park | US | San Jose, CA | Dec 31, 2015 / 20150380561 - METAL OXIDE TFT STABILITY IMPROVEMENT | 11 |
15 | Hitoshi Kato | JP | Oshu-Shi | May 19, 2016 / 20160138159 - FILM FORMING APPARATUS | 11 |
16 | Shinichi Kawato | JP | Osaka | Mar 10, 2022 / 20220077421 - SUBSTRATE SEALING STRUCTURE BODY, AND, DISPLAY DEVICE AND PRODUCTION METHOD THEREFOR | 11 |
17 | Paul Brillhart | US | Pleasanton, CA | Nov 17, 2016 / 20160336205 - ABSORBING LAMPHEAD FACE | 11 |
18 | Frank Herre | DE | Oberriexingen | Aug 25, 2022 / 20220266285 - COATING INSTALLATION AND CORRESPONDING COATING METHOD | 10 |
19 | Xiaoxiong Yuan | US | San Jose, CA | Oct 07, 2021 / 20210308703 - APPARATUS FOR INCREASING FLUX FROM AN AMPOULE | 10 |
20 | Khurshed Sorabji | US | San Jose, CA | Dec 29, 2016 / 20160380146 - PRESSURIZED HEATED ROLLING PRESS FOR MANUFACTURE AND METHOD OF USE | 10 |
21 | Satoshi Inoue | JP | Osaka | Sep 14, 2017 / 20170263896 - ORGANIC ELECTROLUMINESCENT DEVICE AND METHOD FOR PRODUCING ORGANIC ELECTROLUMINESCENT DEVICE | 10 |
22 | Chung-Pei Wang | TW | Tu-Cheng | Dec 05, 2013 / 20130319317 - CRYSTAL PRODUCTION METHOD | 10 |
23 | Tohru Sonoda | JP | Osaka | Nov 17, 2016 / 20160336544 - VAPOR DEPOSITION METHOD FOR PRODUCING AN ORGANIC EL PANEL | 9 |
24 | Kevin Griffin | US | Livermore, CA | Sep 08, 2022 / 20220282379 - CONTROL OF LIQUID DELIVERY IN AUTO-REFILL SYSTEMS | 9 |
25 | Myung-Soo Huh | KR | Yongin-City | Dec 24, 2015 / 20150368790 - DISPLAY APPARATUS MANUFACTURING APPARATUS | 9 |
26 | Gregg Higashi | US | San Jose, CA | Feb 16, 2017 / 20170047471 - THIN-FILM SEMICONDUCTOR OPTOELECTRONIC DEVICE WITH TEXTURED FRONT AND/OR BACK SURFACE PREPARED FROM TEMPLATE LAYER AND ETCHING | 9 |
27 | Gang He | US | Cupertino, CA | Aug 11, 2022 / 20220254759 - Light Emission System with MicroLED Device Isolation | 8 |
28 | Shinichi Kurita | US | San Jose, CA | Jun 07, 2018 / 20180155835 - THIN FILM ENCAPSULATION PROCESSING SYSTEM AND PROCESS KIT | 8 |
29 | Sang In Lee | US | Sunnyvale, CA | Dec 17, 2015 / 20150361548 - Injection Assembly in Linear Deposition Apparatus with Bulging Ridges Extending along Bottom Openings | 8 |
30 | Alexander Tam | US | Union City, CA | May 05, 2016 / 20160126118 - PEDESTAL WITH MULTI-ZONE TEMPERATURE CONTROL AND MULTIPLE PURGE CAPABILITIES | 8 |
31 | Manabu Honma | JP | Oshu-Shi | Mar 24, 2016 / 20160083841 - SUBSTRATE PROCESSING APPARATUS AND METHOD OF FABRICATING SUBSTRATE LOADING UNIT | 8 |
32 | Hiroshi Tamagaki | JP | Takasago-Shi | Feb 18, 2016 / 20160047032 - DEPOSITION DEVICE AND DEPOSITION METHOD | 8 |
33 | Pekka Soininen | FI | Helsinki | Jun 04, 2015 / 20150152552 - APPARATUS FOR PROCESSING SURFACE OF SUBSTRATE AND NOZZLE HEAD | 8 |
34 | Tony P. Chiang | US | Campbell, CA | May 12, 2016 / 20160133691 - DRAM MIMCAP Stack with MoO2 Electrode | 7 |
35 | Choel-Min Jang | KR | Yongin-City | Jul 09, 2015 / 20150194604 - VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS | 7 |
36 | Sandeep Nijhawan | US | Los Altos, CA | Apr 21, 2016 / 20160111603 - Indium Zinc Oxide for Transparent Conductive Oxide Layer and Methods of Forming Thereof | 7 |
37 | Hiroyuki Kobayashi | JP | Kodaira | Dec 19, 2013 / 20130333617 - PLASMA PROCESSING APPARATUS | 7 |
38 | Il Kwang Yang | KR | Gyeonggi-Do | Dec 31, 2015 / 20150380284 - APPARATUS FOR PROCESSING SUBSTRATE | 7 |
39 | Gwo-Chuan Tzu | US | Sunnyvale, CA | Mar 19, 2015 / 20150075432 - APPARATUS TO IMPROVE SUBSTRATE TEMPERATURE UNIFORMITY | 7 |
40 | Jin-Kwang Kim | KR | Yongin-City | Apr 19, 2018 / 20180108866 - ORGANIC LIGHT EMITTING DIODE DISPLAY AND METHOD FOR MANUFACTURING THE SAME | 7 |
41 | Choong-Ho Lee | KR | Yongin-City | Dec 24, 2015 / 20150368784 - THIN FILM DEPOSITION APPARATUS | 7 |
42 | Errol Antonio C. Sanchez | US | Tracy, CA | Sep 08, 2022 / 20220283029 - METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY | 7 |
43 | Suk-Won Jung | KR | Yongin-City | Jul 09, 2015 / 20150194604 - VAPOR DEPOSITION APPARATUS, VAPOR DEPOSITION METHOD AND METHOD FOR MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS | 7 |
44 | Suhail Anwar | US | San Jose, CA | Nov 26, 2015 / 20150340204 - Transmission Line RF Applicator for Plasma Chamber | 7 |
45 | Roger Hamamjy | US | San Jose, CA | May 12, 2016 / 20160130724 - HEATING LAMP SYSTEM | 7 |
46 | Johannes Käppeler | DE | Würselen | Feb 21, 2013 / 20130045548 - Apparatus and method for simultaneous deposition of a plurality of semiconductor layers in a plurality of process chambers | 7 |
47 | Satoshi Hashimoto | JP | Osaka | Jul 07, 2022 / 20220211972 - ENVIRONMENT CONTROL DEVICE | 7 |
48 | Mei Chang | US | Saratoga, CA | Oct 07, 2021 / 20210308703 - APPARATUS FOR INCREASING FLUX FROM AN AMPOULE | 7 |
49 | Karthik Janakiraman | US | San Jose, CA | Sep 08, 2022 / 20220285232 - CONTROLLING CONCENTRATION PROFILES FOR DEPOSITED FILMS USING MACHINE LEARNING | 7 |
50 | Heng Liu | US | Sunnyvale, CA | Feb 04, 2021 / 20210033900 - MODULAR FLAT PANEL DISPLAY | 7 |
51 | Manabu Honma | JP | Iwate | Sep 15, 2022 / 20220293439 - SUBSTRATE PROCESSING APPARATUS | 7 |
52 | Byoung Gyu Song | KR | Gyeonggi-Do | Dec 31, 2015 / 20150380284 - APPARATUS FOR PROCESSING SUBSTRATE | 7 |
53 | Yoshiteru Fukutomi | JP | Kyoto | Jun 09, 2016 / 20160163573 - SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES | 7 |
54 | Michael Long | US | Hilton, NY | Oct 13, 2011 / 20110247562 - Vaporizing Material at a Uniform Rate | 6 |
55 | Yawara Morioka | JP | Chigasaki-Shi | Dec 08, 2011 / 20110300694 - ELECTRODE CIRCUIT, FILM FORMATION DEVICE, ELECTRODE UNIT, AND FILM FORMATION METHOD | 6 |
56 | Satohiro Okayama | JP | Chigasaki-Shi | Jun 25, 2015 / 20150179395 - ION BEAM IRRADIATION DEVICE | 6 |
57 | Hiromichi Nagashima | JP | Kyoto | Jun 09, 2016 / 20160163573 - SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES | 6 |
58 | Gerhard Karl Strauch | DE | Aachen | Feb 14, 2013 / 20130040054 - COATING DEVICE AND METHOD FOR OPERATING A COATING DEVICE HAVING A SHIELDING PLATE | 6 |
59 | Seok-Rak Chang | KR | Yongin-City | Jun 25, 2015 / 20150176131 - THIN FILM DEPOSITION APPARATUS | 6 |
60 | Hiroyuki Kurihara | JP | Chigasaki-Shi | Aug 04, 2011 / 20110189384 - THIN-FILM SOLAR CELL MANUFACTURING APPARATUS | 6 |
61 | Koichi Matsumoto | JP | Chigasaki-Shi | Aug 08, 2013 / 20130199572 - FILM-FORMING APPARATUS, AND METHOD FOR MAINTAINING FILM-FORMING APPARATUS | 6 |
62 | Muhammad Rasheed | US | San Jose, CA | Sep 18, 2014 / 20140262764 - METHODS AND APPARATUS FOR REDUCING SPUTTERING OF A GROUNDED SHIELD IN A PROCESS CHAMBER | 6 |
63 | Jacob Grayson | US | Santa Clara, CA | Feb 02, 2012 / 20120024388 - MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD | 6 |
64 | Yasuo Kawamatsu | JP | Kyoto | Jun 09, 2016 / 20160163573 - SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES | 6 |
65 | Noriyasu Sugiyama | JP | Chigasaki-Shi | Aug 04, 2011 / 20110189384 - THIN-FILM SOLAR CELL MANUFACTURING APPARATUS | 6 |
66 | Tsutomu Sahoda | JP | Kawasaki-Shi | Mar 05, 2015 / 20150060434 - CHAMBER APPARATUS AND HEATING METHOD | 6 |
67 | Takashi Shigeta | JP | Chigasaki-Shi | Aug 04, 2011 / 20110189384 - THIN-FILM SOLAR CELL MANUFACTURING APPARATUS | 6 |
68 | Dae-Youn Kim | KR | Daejeon | Feb 16, 2017 / 20170044665 - DEPOSITION APPARATUS AND DEPOSITION SYSTEM HAVING THE SAME | 6 |
69 | Jason Van Sciver | US | Los Gatos, CA | Feb 25, 2016 / 20160052200 - METHOD OF DRYING BIOABSORBABLE COATING OVER STENTS | 6 |
70 | Sang-Shin Lee | KR | Yongin-City | Feb 26, 2015 / 20150052724 - METHOD FOR TENSIONING VAPOR DEPOSITION MASK USING AN ALIGNMENT MASTER GLASS | 6 |
71 | Tsuyoshi Mitsuhashi | JP | Kyoto | Jun 09, 2016 / 20160163573 - SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES | 6 |
72 | Kazuhide Hasebe | JP | Nirasaki City | May 26, 2016 / 20160148801 - SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND STORAGE MEDIUM | 6 |
73 | Eric A. Armour | US | Pennington, NJ | Jun 09, 2016 / 20160160387 - Linear Cluster Deposition System | 6 |
74 | Tadao Okimoto | JP | Takasago-Shi | Oct 17, 2013 / 20130269610 - PLASMA CVD APPARATUS | 6 |
75 | Yasuo Shimizu | JP | Chigasaki-Shi | Aug 08, 2013 / 20130199572 - FILM-FORMING APPARATUS, AND METHOD FOR MAINTAINING FILM-FORMING APPARATUS | 6 |
76 | Kow-Je Ling | TW | Taipei | Sep 16, 2010 / 20100233946 - Polishing holder for workpiece end surface | 6 |
77 | Hiroyuki Ogura | JP | Kyoto | Jun 09, 2016 / 20160163573 - SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES | 6 |
78 | Shu-Kwan Lau | US | Sunnyvale, CA | Sep 08, 2022 / 20220283029 - METHODS FOR DETECTION USING OPTICAL EMISSION SPECTROSCOPY | 6 |
79 | Hideyuki Ogata | JP | Chigasaki-Shi | Jul 26, 2012 / 20120190176 - CATALYTIC CVD EQUIPMENT, METHOD FOR FORMATION OF FILM, AND PROCESS FOR PRODUCTION OF SOLAR CELL | 6 |
80 | Takafumi Noguchi | JP | Chigasaki-Shi | Feb 09, 2012 / 20120034731 - PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING SYSTEM AND PHOTOELECTRIC CONVERSION DEVICE MANUFACTURING METHOD | 6 |
81 | Oliver Heimel | DE | Wabern | Dec 27, 2018 / 20180374732 - APPARATUS FOR TRANSPORTATION OF A SUBSTRATE, APPARATUS FOR VACUUM PROCESSING OF A SUBSTRATE, AND METHOD FOR MAINTENANCE OF A MAGNETIC LEVITATION SYSTEM | 6 |
82 | Nir Merry | US | Mountain View, CA | Sep 15, 2022 / 20220293444 - FRONT-DUCTED EQUIPMENT FRONT END MODULES, SIDE STORAGE PODS, AND METHODS OF OPERATING THE SAME | 6 |
83 | Harry C. Malecki | US | Abingdon, MD | Oct 22, 2015 / 20150299849 - CNT-INFUSED METAL FIBER MATERIALS AND PROCESS THEREFOR | 6 |
84 | Ravinder Aggarwal | US | Gilbert, AZ | Nov 20, 2014 / 20140338596 - SELF-CENTERING SUSCEPTOR RING ASSEMBLY | 6 |
85 | Curtis Chambers | US | Palm Beach Gardens, FL | May 18, 2017 / 20170140562 - ELECTRONIC MANIFEST OF UNDERGROUND FACILITY LOCATE MARKS | 6 |
86 | Kenya Morinishi | JP | Kyoto | Jun 09, 2016 / 20160163573 - SUBSTRATE TREATING APPARATUS WITH PARALLEL SUBSTRATE TREATMENT LINES | 6 |
87 | Ronald Stevens | US | San Ramon, CA | Jan 16, 2014 / 20140014745 - MULTI-GAS STRAIGHT CHANNEL SHOWERHEAD | 6 |
88 | Yung-Ming Chen | US | Cupertino, CA | Jan 15, 2015 / 20150018936 - SEVERABLE SUPPORT FOR A STENT | 6 |
89 | Jeffrey R. Shutic | US | Wakeman, OH | Jan 29, 2015 / 20150027365 - OVERSPRAY COLLECTION APPARATUS FOR A POWDER SPRAY BOOTH | 6 |
90 | Gaku Furuta | US | Sunnyvale, CA | Jun 22, 2017 / 20170178867 - GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES | 6 |
91 | Masaaki Sakaguchi | JP | Suzuka-Shi | Oct 25, 2012 / 20120266820 - REACTOR FOR POLYCRYSTALLINE SILICON AND POLYCRYSTALLINE SILICON PRODUCTION METHOD | 5 |
92 | Bulent M. Basol | US | Manhattan Beach, CA | Dec 10, 2015 / 20150357502 - GROUP IIB-VIA COMPOUND SOLAR CELLS WITH MINIMUM LATTICE MISMATCH AND REDUCED TELLURIUM CONTENT | 5 |
93 | Michael Hentschel | DE | Dresden | Dec 24, 2015 / 20150368793 - METHOD FOR PROCESSING A SUBSTRATE AND PROCESSING ARRANGEMENT FOR PROCESSING A SUBSTRATE | 5 |
94 | Yasushi Takeuchi | JP | Iwate | Oct 16, 2014 / 20140305540 - METHOD FOR MANAGING ATMOSPHERE IN STORAGE CONTAINER | 5 |
95 | Yan Rozenzon | US | San Carlos, CA | May 12, 2016 / 20160133778 - DYNAMIC SUPPORT SYSTEM FOR QUARTZ PROCESS CHAMBER | 5 |
96 | Pravin K. Narwankar | US | Sunnyvale, CA | Sep 22, 2022 / 20220298920 - METHODS FOR DEPOSITING COATINGS ON AEROSPACE COMPONENTS | 5 |
97 | Andrej Wolf | DE | Dresden | Jun 06, 2013 / 20130139750 - MODULAR-CONSTRUCTION VACUUM-COATING SYSTEM | 5 |
98 | Qiwei Liang | US | Fremont, CA | Jan 06, 2022 / 20220004104 - METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WAFERS | 5 |
99 | Akihiko Sato | JP | Kawasaki-Shi | Aug 28, 2014 / 20140242284 - COATING APPARATUS AND COATING METHOD | 5 |
100 | Akira Yamaguchi | JP | Tokyo | May 12, 2016 / 20160130695 - VAPOR PHASE GROWTH APPARATUS | 5 |