Top Inventors for class "Photocopying" |
Rank | Inventor's name | Country | City/State | Last publication | # of patent apps in this class |
1 | Yuichi Shibazaki | JP | Kumagaya-Shi | Dec 02, 2021 / 20210370444 - PROCESSING APPARATUS, PAINTING MATERIAL, PROCESSING METHOD, AND MANUFACTURING METHOD OF MOVABLE BODY | 105 |
2 | Bob Streefkerk | NL | Tilburg | Oct 17, 2019 / 20190317411 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 91 |
3 | Hans-Juergen Mann | DE | Oberkochen | Jan 07, 2016 / 20160004165 - IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE SYSTEM FOR MICROLITHOGRAPHY | 72 |
4 | Christiaan Alexander Hoogendam | NL | Veldhoven | Jul 13, 2017 / 20170199467 - LITHOGRAPHIC APPARATUS AND METHOD | 71 |
5 | Erik Roelof Loopstra | NL | Eindhoven | May 26, 2016 / 20160147161 - LITHOGRAPHIC METHOD | 67 |
6 | Nicolaas Ten Kate | NL | Almkerk | Jun 30, 2022 / 20220206400 - LITHOGRAPHIC APPARATUS AND METHOD | 67 |
7 | Hans Jansen | NL | Eindhoven | Jun 22, 2017 / 20170176876 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 65 |
8 | Jeroen Johannes Sophia Maria Mertens | NL | Duizel | Jun 01, 2017 / 20170153557 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 64 |
9 | Sjoerd Nicolaas Lambertus Donders | NL | S-Hertogenbosch | Jun 22, 2017 / 20170176876 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 62 |
10 | Erik Roelof Loopstra | NL | Heeze | May 18, 2017 / 20170139333 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 60 |
11 | Markus Deguenther | DE | Aalen | Sep 14, 2017 / 20170261861 - ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | 59 |
12 | Toralf Gruner | DE | Aalen-Hofen | Sep 22, 2022 / 20220299733 - PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY | 58 |
13 | Damian Fiolka | DE | Oberkochen | Sep 14, 2017 / 20170261861 - ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | 57 |
14 | Hiroyuki Nagasaka | JP | Kumagaya-Shi | Jun 22, 2017 / 20170176874 - EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE PRODUCING METHOD | 54 |
15 | Hans Butler | NL | Best | Oct 14, 2021 / 20210318624 - PIEZOELECTRIC ACTUATOR, ACTUATOR SYSTEM, SUBSTRATE SUPPORT, AND LITHOGRAPHIC APPARATUS INCLUDING THE ACTUATOR | 50 |
16 | Johannes Catharinus Hubertus Mulkens | NL | Waalre | Jun 01, 2017 / 20170153557 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 49 |
17 | Johannes Jacobus Matheus Baselmans | NL | Oirschot | Nov 18, 2021 / 20210356871 - RADIATION SYSTEM | 48 |
18 | Joost Jeroen Ottens | NL | Veldhoven | Jun 30, 2022 / 20220206400 - LITHOGRAPHIC APPARATUS AND METHOD | 42 |
19 | Vadim Yevgenyevich Banine | NL | Deurne | Sep 01, 2022 / 20220276553 - PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS | 41 |
20 | Nicolaas Rudolf Kemper | NL | Eindhoven | Feb 16, 2017 / 20170045831 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 41 |
21 | Sjoerd Nicolaas Lambertus Donders | NL | Vught | Oct 17, 2019 / 20190317411 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 40 |
22 | Marcus Adrianus Van De Kerkhof | NL | Helmond | Sep 01, 2022 / 20220276553 - PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS | 36 |
23 | Michael Patra | DE | Oberkochen | Jun 22, 2017 / 20170176865 - FACET MIRROR FOR AN ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY | 34 |
24 | Arie Jeffrey Den Boef | NL | Waalre | Sep 22, 2022 / 20220299751 - METROLOGY DEVICE AND PHASE MODULATOR APPARATUS THEREFOR | 33 |
25 | Yim-Bun Patrick Kwan | DE | Aalen | Feb 11, 2016 / 20160041473 - LENS COMPRISING A PLURALITY OF OPTICAL ELEMENT DISPOSED IN A HOUSING | 33 |
26 | Raymond Wilhelmus Louis Lafarre | NL | Helmond | Dec 29, 2016 / 20160377994 - SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER | 33 |
27 | Michel Riepen | NL | Veldhoven | Jun 22, 2017 / 20170176875 - FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD | 32 |
28 | Wilhelm Ulrich | DE | Aalen | May 12, 2016 / 20160131980 - MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | 32 |
29 | Marco Koert Stavenga | NL | Eindhoven | May 18, 2017 / 20170139333 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 31 |
30 | Alexander Epple | DE | Aalen | Dec 27, 2018 / 20180373006 - CATADIOPTRIC PROJECTION OBJECTIVE | 30 |
31 | Carl Zeiss Smt Gmbh | DE | Oberkochen | Aug 08, 2013 / 20130201464 - CHROMATICALLY CORRECTED OBJECTIVE WITH SPECIFICALLY STRUCTURED AND ARRANGED DIOPTRIC OPTICAL ELEMENTS AND PROJECTION EXPOSURE APPARATUS INCLUDING THE SAME | 30 |
32 | Douglas C. Watson | US | Campbell, CA | Mar 24, 2016 / 20160085160 - ENVIRONMENTAL SYSTEM INCLUDING A TRANSPORT REGION FOR AN IMMERSION LITHOGRAPHY APPARATUS | 29 |
33 | Manfred Maul | DE | Aalen | Jun 09, 2016 / 20160161858 - ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY | 29 |
34 | Jan Bernard Plechelmus Van Schoot | NL | Eindhoven | Jun 22, 2017 / 20170176868 - LITHOGRAPHIC APPARATUS AND METHOD | 29 |
35 | Patricius Aloysius Jacobus Tinnemans | NL | Hapert | Dec 16, 2021 / 20210389365 - METROLOGY APPARATUS AND METHOD FOR DETERMINING A CHARACTERISTIC OF ONE OR MORE STRUCTURES ON A SUBSTRATE | 28 |
36 | Roelof Frederik De Graaf | NL | Veldhoven | Feb 16, 2017 / 20170045831 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 28 |
37 | Joeri Lof | NL | Eindhoven | Oct 13, 2016 / 20160299440 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 27 |
38 | Klaus Simon | NL | Eindhoven | Oct 13, 2016 / 20160299440 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 27 |
39 | Wouter Anthon Soer | NL | Nijmegen | May 09, 2013 / 20130114059 - Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such Components | 27 |
40 | Nikon Corporation | JP | Tokyo | Aug 08, 2013 / 20130202727 - IMAGE FORMING OPTICAL SYSTEM, IMAGING APPARATUS, PROFILE MEASURING APPARATUS, STRUCTURE MANUFACTURING SYSTEM AND STRUCTURE MANUFACTURING METHOD | 27 |
41 | Aurelian Dodoc | DE | Heidenheim | May 12, 2016 / 20160131980 - MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | 26 |
42 | Kenichi Shiraishi | JP | Saitama-Shi | Oct 22, 2015 / 20150301457 - EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD | 26 |
43 | Martinus Hendrikus Antonius Leenders | NL | Rhoon | Sep 15, 2022 / 20220291591 - PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM | 26 |
44 | Johannes Petrus Martinus Bernardus Vermeulen | NL | Helmond | Dec 29, 2016 / 20160377993 - MULTI-STAGE SYSTEM, A CONTROL METHOD THEREFOR, AND A LITHOGRAPHIC APPARATUS | 26 |
45 | Martin Endres | DE | Koenigsbronn | Feb 18, 2016 / 20160048083 - REFLECTING COATING WITH OPTIMIZED THICKNESS | 26 |
46 | Alex Ka Tim Poon | US | San Ramon, CA | Feb 05, 2015 / 20150036113 - APPARATUS AND METHOD FOR PROVIDING FLUID FOR IMMERSION LITHOGRAPHY | 26 |
47 | Leonard Wai Fung Kho | US | San Francisco, CA | Sep 01, 2022 / 20220275504 - EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING | 25 |
48 | Soichi Owa | JP | Kumagaya-Shi | May 05, 2016 / 20160124314 - CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND METHOD FOR MANUFACTURING DEVICE | 25 |
49 | Wolfgang Singer | DE | Aalen | Jul 07, 2022 / 20220214518 - DEVICE FOR MOUNTING SPHERICAL OPTICAL COMPONENTS | 25 |
50 | Maarten Marinus Johannes Wilhelmus Van Herpen | NL | Heesch | Apr 21, 2016 / 20160106622 - MEDICINE CONTAINAER, HOUSING AND DISPLAY FOR MEDICINE CONTAINER | 24 |
51 | Gerardus Hubertus Petrus Maria Swinkels | NL | Eindhoven | Feb 25, 2016 / 20160054663 - SOURCE COLLECTOR APPARATUS, LITHOGRAPHIC APPARATUS AND METHOD | 23 |
52 | Engelbertus Antonius Fransiscus Van Der Pasch | NL | Oirschot | Jun 30, 2022 / 20220205775 - INTERFEROMETER SYSTEM, METHOD OF DETERMINING A MODE HOP OF A LASER SOURCE OF AN INTERFEROMETER SYSTEM, METHOD OF DETERMINING A POSITION OF A MOVABLE OBJECT, AND LITHOGRAPHIC APPARATUS | 23 |
53 | Helmar Van Santen | NL | Amsterdam | Jun 01, 2017 / 20170153557 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 23 |
54 | Vadim Yevgenyevich Banine | NL | Helmond | Nov 19, 2015 / 20150331334 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 23 |
55 | Alexander Straaijer | NL | Eindhoven | Oct 13, 2016 / 20160299440 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 23 |
56 | Johannes Wangler | DE | Koenigsbronn | Mar 17, 2016 / 20160077446 - ILLUMINATION SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS | 23 |
57 | Marc Wilhelmus Maria Van Der Wijst | NL | Veldhoven | Jan 07, 2016 / 20160004170 - Lithographic Apparatus and Device Manufacturing Method | 22 |
58 | Arno Jan Bleeker | NL | Westerhoven | Feb 04, 2016 / 20160033877 - Metrology Method and Inspection Apparatus, Lithographic System and Device Manufacturing Method | 22 |
59 | Shinji Sato | JP | Fukaya-Shi | Sep 08, 2022 / 20220281104 - PROCESSING SYSTEM, PROCESSING METHOD, ROBOT SYSTEM, CONNECTING APPARATUS AND END EFFECTOR APPARATUS | 22 |
60 | Marcel Mathijs Theodore Marie Dierichs | NL | Venlo | May 18, 2017 / 20170139333 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 22 |
61 | Yuho Kanaya | JP | Kumagaya-Shi | Aug 13, 2015 / 20150227058 - EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE | 22 |
62 | Johannes Henricus Wilhelmus Jacobs | NL | Eindhoven | May 18, 2017 / 20170139333 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 22 |
63 | Daniel Kraehmer | DE | Essingen | Jan 07, 2016 / 20160004164 - ILLUMINATION SYSTEM FOR AN EUV LITHOGRAPHY DEVICE AND FACET MIRROR THEREFOR | 21 |
64 | Frank Schlesener | DE | Oberkochen | Jun 09, 2016 / 20160161858 - ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY | 21 |
65 | Markus Hauf | DE | Ulm | Sep 14, 2017 / 20170261859 - ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICAL SYSTEM | 21 |
66 | Heiko Feldmann | DE | Aalen | Dec 23, 2021 / 20210397099 - APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK | 21 |
67 | Ingo Saenger | DE | Heidenheim | Jan 07, 2016 / 20160004164 - ILLUMINATION SYSTEM FOR AN EUV LITHOGRAPHY DEVICE AND FACET MIRROR THEREFOR | 21 |
68 | Harry Sewell | US | Ridgefield, CT | Sep 11, 2014 / 20140253891 - TUNABLE WAVELENGTH ILLUMINATION SYSTEM | 20 |
69 | Joannes Theodoor De Smit | NL | Eindhoven | Mar 03, 2016 / 20160062248 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 20 |
70 | Derek Coon | US | Redwood City, CA | Mar 19, 2015 / 20150075751 - FLUID DISTRIBUTION NETWORK FOR LARGE STATOR MOTOR | 20 |
71 | Armin Schoeppach | DE | Aalen | Dec 24, 2015 / 20150370176 - ACTUATORS AND MICROLITHOGRAPHY PROJECTION EXPOSURE SYSTEMS AND METHODS USING THE SAME | 20 |
72 | Sascha Bleidistel | DE | Aalen | Mar 19, 2020 / 20200089126 - POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS | 20 |
73 | Antonius Theodorus Anna Maria Derksen | NL | Eindhoven | Oct 13, 2016 / 20160299440 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 20 |
74 | Henrikus Herman Marie Cox | NL | Eindhoven | Feb 16, 2017 / 20170045831 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 20 |
75 | Timotheus Franciscus Sengers | NL | S-Hertogenbosch | Jun 22, 2017 / 20170176876 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 20 |
76 | Jens Kugler | DE | Aalen | Sep 08, 2022 / 20220283509 - SUPPORT OF AN OPTICAL UNIT | 19 |
77 | Hiroaki Takaiwa | JP | Kumagaya-Shi | Apr 14, 2016 / 20160103397 - Exposure Apparatus with Component from which Liquid is Protected and/or Removed and Device Fabricating Method | 19 |
78 | Martinus Hendrikus Antonius Leenders | NL | Rotterdam | May 19, 2016 / 20160139514 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 19 |
79 | Michael Totzeck | DE | Schwaebisch-Gmuend | Feb 27, 2014 / 20140055593 - TEST SAMPLE DEVICE AND TEST METHOD FOR AN OPTICAL MICROSCOPE WITH SUBWAVELENGTH RESOLUTION | 18 |
80 | Marcel Beckers | NL | Eindhoven | Jan 26, 2017 / 20170023870 - LITHOGRAPHIC APPARATUS | 18 |
81 | Gaurav Keswani | US | Fremont, CA | Aug 21, 2014 / 20140232999 - APPARATUS AND METHODS FOR KEEPING IMMERSION FLUID ADJACENT TO AN OPTICAL ASSEMBLY DURING WAFER EXCHANGE IN AN IMMERSION LITHOGRAPHY MACHINE | 18 |
82 | Martinus Cornelis Maria Verhagen | NL | Valkenswaard | May 18, 2017 / 20170139333 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 18 |
83 | Dirk Heinrich Ehm | DE | Lauchheim | Oct 13, 2016 / 20160299268 - METHOD FOR CORRECTING THE SURFACE FORM OF A MIRROR | 18 |
84 | Antonius Johannus Van Der Net | NL | Tilburg | Feb 18, 2016 / 20160048085 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A HEATER | 18 |
85 | Sergei Shulepov | NL | Eindhoven | Jan 14, 2021 / 20210012887 - METHOD OF ESTIMATION PHYSIOLOGICAL PARAMETERS USING MEDICAL IMAGE DATA | 18 |
86 | Jan-Gerard Cornelis Van Der Toorn | NL | Eindhoven | Dec 02, 2021 / 20210375580 - STAGE APPARATUS | 18 |
87 | Johannes Hubertus Josephina Moors | NL | Helmond | Sep 15, 2022 / 20220291591 - PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM | 17 |
88 | Yasufumi Nishii | JP | Kumagaya-Shi | Oct 22, 2015 / 20150301457 - EXPOSURE METHOD, SUBSTRATE STAGE, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD | 17 |
89 | Paulus Martinus Maria Liebregts | NL | Veldhoven | Jan 26, 2017 / 20170023870 - LITHOGRAPHIC APPARATUS | 17 |
90 | Koen Steffens | NL | Veldhoven | Oct 01, 2015 / 20150277238 - SUBSTRATE TABLE, IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 17 |
91 | Katsushi Nakano | JP | Kumagaya-Shi | Aug 20, 2020 / 20200264519 - INFORMATION CALCULATION METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE MANUFACTURING METHOD, PROGRAM, AND RECORDING MEDIUM | 17 |
92 | Norbert Wabra | DE | Werneck | Nov 25, 2021 / 20210364677 - OPTICAL ELEMENT HAVING A COATING FOR INFLUENCING HEATING RADIATION AND OPTICAL ARRANGEMENT | 17 |
93 | Andrei Mikhailovich Yakunin | NL | Eindhoven | Jun 12, 2014 / 20140160455 - PELLICLE FOR RETICLE AND MULTILAYER MIRROR | 17 |
94 | Bernhard Gellrich | DE | Aalen | Sep 08, 2022 / 20220283509 - SUPPORT OF AN OPTICAL UNIT | 17 |
95 | Johannes Henricus Wilhelmus Jacobs | NL | Heeze | Sep 15, 2022 / 20220291591 - PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM | 16 |
96 | Stefan Hembacher | DE | Bobingen | Dec 30, 2021 / 20210405543 - COMPENSATION OF CREEP EFFECTS IN AN IMAGING DEVICE | 16 |
97 | Boris Bittner | DE | Roth | Nov 25, 2021 / 20210364677 - OPTICAL ELEMENT HAVING A COATING FOR INFLUENCING HEATING RADIATION AND OPTICAL ARRANGEMENT | 16 |
98 | Jacobus Johannus Leonardus Hendricus Verspay | NL | Thorn | Dec 02, 2021 / 20210375498 - RADIOISOTOPE PRODUCTION | 16 |
99 | Christiaan Alexander Hoogendam | NL | Westerhoven | Oct 17, 2019 / 20190317411 - LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD | 16 |
100 | Michael B. Binnard | US | Belmont, CA | Aug 27, 2015 / 20150241794 - Coil Switching Method for Moving Magnet Planar Motor | 16 |